添加单向晶须提高微零件激光光刻精度

MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530) Pub Date : 2000-10-22 DOI:10.1109/MHS.2000.903287

T. Nakamoto, K. Yamaguchi, T. Obata

{"title":"添加单向晶须提高微零件激光光刻精度","authors":"T. Nakamoto, K. Yamaguchi, T. Obata","doi":"10.1109/MHS.2000.903287","DOIUrl":null,"url":null,"abstract":"Shrinkage and irradiated energy distribution cause manufacturing errors in laser photolithography for producing micro parts. The manufacturing accuracy when producing micro parts is calculated. The micro polymer part is reinforced by unidirectional whiskers in order to improve the manufacturing accuracy. The shrinkage ratio is decreased by the addition of unidirectional whiskers.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Improvement of accuracy in laser photolithography for producing micro part by the addition of unidirectional whisker\",\"authors\":\"T. Nakamoto, K. Yamaguchi, T. Obata\",\"doi\":\"10.1109/MHS.2000.903287\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Shrinkage and irradiated energy distribution cause manufacturing errors in laser photolithography for producing micro parts. The manufacturing accuracy when producing micro parts is calculated. The micro polymer part is reinforced by unidirectional whiskers in order to improve the manufacturing accuracy. The shrinkage ratio is decreased by the addition of unidirectional whiskers.\",\"PeriodicalId\":372317,\"journal\":{\"name\":\"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)\",\"volume\":\"54 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-10-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MHS.2000.903287\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MHS.2000.903287","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

激光光刻加工微细零件时，收缩和辐照能量分布是造成加工误差的主要原因。对微细零件的加工精度进行了计算。微聚合物部件采用单向晶须增强，以提高制造精度。单向晶须的加入降低了收缩率。

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Improvement of accuracy in laser photolithography for producing micro part by the addition of unidirectional whisker

Shrinkage and irradiated energy distribution cause manufacturing errors in laser photolithography for producing micro parts. The manufacturing accuracy when producing micro parts is calculated. The micro polymer part is reinforced by unidirectional whiskers in order to improve the manufacturing accuracy. The shrinkage ratio is decreased by the addition of unidirectional whiskers.

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MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)

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