H. Misawa, S. Juodkazis, A. Marcinkevičius, V. Mizeikis, A. Yamaguchi, Hongbo Sun, S. Matsuo
{"title":"Laser microfabrication/manipulation of dielectric materials","authors":"H. Misawa, S. Juodkazis, A. Marcinkevičius, V. Mizeikis, A. Yamaguchi, Hongbo Sun, S. Matsuo","doi":"10.1109/MHS.2000.903278","DOIUrl":null,"url":null,"abstract":"We describe microfabrication of various materials by multiphoton absorption of femtosecond (120-150 fs) light pulses. The photo-modification at the focal point of tightly focused laser beam occurs inherently within a volume smaller than that defined by the diffraction limit. The achievable lateral resolution is compared with that obtainable by lithography which uses near-field optical microscopy. This technique can in principle lead to the realization of 3D optical memory and photonic crystals with arbitrary lattice in polymers and silica glass, 3D prototyping in polymerizable resins, and etching of 3D structures guided by the optically damaged pattern in silica. Another topic also discussed deals with laser micromanipulation using continuous wave laser operating at 1.06 /spl mu/m. Light-controlled revolution of liquid crystal droplet and volume-phase transition of gels are described.","PeriodicalId":372317,"journal":{"name":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","volume":"439 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"MHS2000. Proceedings of 2000 International Symposium on Micromechatronics and Human Science (Cat. No.00TH8530)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MHS.2000.903278","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
We describe microfabrication of various materials by multiphoton absorption of femtosecond (120-150 fs) light pulses. The photo-modification at the focal point of tightly focused laser beam occurs inherently within a volume smaller than that defined by the diffraction limit. The achievable lateral resolution is compared with that obtainable by lithography which uses near-field optical microscopy. This technique can in principle lead to the realization of 3D optical memory and photonic crystals with arbitrary lattice in polymers and silica glass, 3D prototyping in polymerizable resins, and etching of 3D structures guided by the optically damaged pattern in silica. Another topic also discussed deals with laser micromanipulation using continuous wave laser operating at 1.06 /spl mu/m. Light-controlled revolution of liquid crystal droplet and volume-phase transition of gels are described.
我们描述了通过飞秒(120-150秒)光脉冲的多光子吸收来实现各种材料的微加工。紧聚焦激光束焦点处的光修饰固有地发生在小于衍射极限的体积内。将可实现的横向分辨率与使用近场光学显微镜的光刻获得的横向分辨率进行了比较。原则上,该技术可以在聚合物和硅玻璃中实现任意晶格的三维光存储和光子晶体,在可聚合树脂中实现三维原型,并在硅中实现由光学损伤模式引导的三维结构蚀刻。另一个主题也讨论了激光微操作使用连续波激光工作在1.06 /spl μ m /m。描述了液晶液滴的光控旋转和凝胶的体相转变。