2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)最新文献

{"title":"A Happy Workplace - Are We There Yet?","authors":"D. Kirk","doi":"10.1109/UGIM.2012.6247063","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247063","url":null,"abstract":"Great emphasis is placed on the laboratories, equipment and emerging technologies that are hosted by a core service facility at universities, however, expert staff are the most important assets. Staff retention can be a significant management challenge, particularly when career progression pathways are unclear, key performance indicators differ from other university employees and when long-term operational funding may be uncertain. A variety of techniques are available to managers who are seeking to enhance the morale and performance of service facility employees working within this environment.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124160188","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Process Definition Spreadsheet for Run Card Creation","authors":"B. Baker","doi":"10.1109/UGIM.2012.6247105","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247105","url":null,"abstract":"Retention and dissemination of microfabrication process knowledge is a challenge for most university clean room facilities. Many new graduate student researchers arrive with little or no microfabrication experience and do not possess an understanding of the effects of process variables. For these researchers, well-documented standardized processes give a solid starting point to learn the steps they need to build their devices. To address the need for better communication of standard fab processes, a process definition spreadsheet has been created. This spreadsheet gives researchers the ability to select processes, vary inputs, generate recipe parameters, and view deposition and etch rates for standard processes. It also allows the creation and printing of run cards that can be carried into the clean room for reference during tool set up. Available processes include photolithography, deposition, etch, and packaging. Each process contains an integrated drop-down list of corresponding equipment, and each tool contains a drop-down list of associated materials. The spreadsheet is available to download through a website link and is manually updated whenever new process information is available. The data in the Excel-based spreadsheet is maintained by part-time student employees who perform regular process runs and take associated measurements. The results are verified by full-time engineering staff before being entered into the process spreadsheet. Initial researcher feedback is very positive, with 40% of users who responded to an anonymous survey using the software at least once per week, and the deposition process drop-down list being the most frequently accessed section. The spreadsheet has had the unexpected benefit of helping staff be more aware of current process results and problems. A web-based upgrade is currently under development that will include enhancements such as links to process charts and up-to-date results obtained from the researcher measurements through a Coral database. The new system will use a database to store process-related information. A group of computer science students is doing the design and the development of the new web app for a class project.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115467090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Badger Lab Management Software","authors":"W. Murray, M. Bell","doi":"10.1109/UGIM.2012.6247102","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247102","url":null,"abstract":"Summary form only given. Stanford University has actively supported the development of lab management software since the late 1990's. The Coral application, developed at Stanford, was popular for over a decade. The latest offering in this evolving process is Badger Lab Management Software. The Badger application is a robust and flexible, client/server architecture application that can support multiple labs while embodying diverse strategies for equipment reservations, equipment rates, runtime data and member access control. Badger Lab Management Software allows the implementation of extensively customized lab operational parameters. Complex reservation strategies can be embodied within the xml specified, rule based reservation engine which results in efficient and equitable equipment resource utilization. Runtime data can be flexibly defined, captured and manipulated to provide process related research information. Equipment usage rates and related runtime costs can be combined with staff consulting, training and other charges on a per device basis. These may be rolled into monthly billings that include subscription fees and inventory charges. All cost data may be subject to lab specific rules such as expense caps based on volume usage within a lab or by groups of equipment. Finally, automated cost recovery data can be uploaded to university financials with online account validation where supported by the institution. System status information is available on a real- time basis. Equipment status is graphically displayed as are lab member current equipment enabled. Updates to reservation activities, historical usage information, staff charges and inventory status are pushed to active client sessions. Actions of interest, such as changes in equipment status and maintenance activites may also be disseminated via user defined mailing lists on a per device basis. IP addressable equipment interlocks ensure accurate capture of equipment utilization time and serve as a positive access control system resulting in enhanced security and automatic enforcement of training requirements. The Badger application can easily be provisioned over the internet, eliminating the need for local servers or in-house technical expertise. Badger's architecture provides superior performance and a better flow to application use eliminating the hesitation and latency often found in browser based applications. Badger Lab Management Software provides a rapidly deployable solution for efficiently managing multiple research labs at disparate locations within an institution.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"76 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126032432","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Opening the Doors: Converting a University Laboratory into an Open-Access Facility","authors":"L. Macks","doi":"10.1109/UGIM.2012.6247090","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247090","url":null,"abstract":"Many of the world's most successful open-access laboratory facilities have grown out of universities where existing infrastructure, expertise and research networks have provided a solid foundation for the provision of specialized laboratory services to the wider research community. However, the core aims and business model of an open-access facility may be quite different to that of a host university, presenting a number of operational challenges. Our experiences in converting a university nanofabrication facility to part of a national open-access facility are presented as a case-study.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"94 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121452011","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"In Search of the Perfect \"Core\" Nano Facility: Trends in Research Cleanroom and Imaging Lab Design","authors":"A. Gregg","doi":"10.1109/UGIM.2012.6247072","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247072","url":null,"abstract":"AGI will present recent benchmarking of nanotechnology and multidisciplinary cleanrooms and imaging labs, explaining emerging trends including common tool lists, the latest “must have” process and metrology tools, size/configuration trends in cleanrooms and imaging spaces, and trends in accommodation of shared toolset expansion over time (phasing plans). We will also cover architectural/site planning considerations, and the increasing complexity of imaging lab environments, especially in urban settings. Design considerations that are critical to research environments, regardless of specific process, will be discussed, along with their cost drivers.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132435629","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Key Considerations for Selection of Diffusion Furnaces","authors":"T. Olsen","doi":"10.1109/UGIM.2012.6247107","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247107","url":null,"abstract":"Diffusion furnaces are an integral part of nano and micro-fabrication. Research micro-fabrication labs often face the challenge of selecting furnaces that can minimize cost and space requirements, while maximizing process flexibility. This presentation will discuss several LPCVD and atmospheric furnace options that labs may find useful when selecting furnaces for their facility.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134143156","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Facilities Planning for Safety & Emergency Response: Bridging the Gap between Design Features and Safety Planning","authors":"J. Paul","doi":"10.17764/JIET.56.1.T62UL063500J5K75","DOIUrl":"https://doi.org/10.17764/JIET.56.1.T62UL063500J5K75","url":null,"abstract":"This paper will present three key components of the platform required for safe operation and emergency response in micro and nanotechnology facilities. These include a) an overview of design features incorporated into facility design, b) common approaches to safety and emergency response planning, and c) bridging the gap between these two so that they are well integrated at the time of facility turnover to the owner, manager, and end users.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124739771","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Efforts to Increase Utilization & Reduce the Subsidy for a Mid-Size Cleanroom Facility","authors":"J. Aebersold, K. Walsh, S. McNamara","doi":"10.1109/UGIM.2012.6247089","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247089","url":null,"abstract":"The annual operating budget of the University of Louisville's 10,000 ft2 100/1000 class cleanroom or the Micro/Nano Technology Center is heavily subsidized to cover salaried expenses by the engineering school of the University of Louisville (Speed School of Engineering). Expenses of the cleanroom include liquid nitrogen, gowning supplies, chemicals, compressed gas cylinders, sputtering targets, glassware, maintenance, repairs, etc. It is expected that these expenses are paid via cleanroom fees, while the salaried positions are subsidized. Yet, aging of the facility has increased expenses and the MNTC has been challenged to cover its operational expenses via collected cleanroom fees. Additionally, budget cuts from the state of Kentucky have given the impetus to reduce the subsidy from the engineering school and increase cleanroom revenue by means of increasing internal users, external users and service center work.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"137 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122972546","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"National Nanofabrication Centre at IISc Bangalore: A Chronicle of Design, Construction and Management of Cleanroom in Indian Context","authors":"T. Murthy, M. Vijayaraghavan, P. Savitha, G. Hegde, S. Raghavan, P. Kumar, R. Pratap, N. Bhat","doi":"10.1109/UGIM.2012.6247096","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247096","url":null,"abstract":"We present the evolution of the state-of-the-art multiuser, open access, Nanofab facility at the Indian Institute of Science Bangalore. The process behind the design and execution of the cleanroom will be described. The challenges faced in moving the equipments from the old facility and the issues in coordinating installation of new equipments and utility hookup will be presented. The methodology used to manage the facility, challenges in staffing to run the facility and balancing the time sharing between internal and external users will be discussed.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130582697","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The RIT Semiconductor & Microsystems Fabrication Laboratory: Challenges in Supporting a Growing Research Agenda","authors":"K. Hirschman, S. Blondell","doi":"10.1109/UGIM.2012.6247066","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247066","url":null,"abstract":"The RIT Semiconductor & Microsystems Fabrication Laboratory (SMFL) has 10,000 sq. ft. of class 1000 clean room space, and provides fabrication resources for CMOS and MEMS devices on 100 & 150 mm silicon substrates. The primary mission of the facility, since its completion in 1986, is to provide support to the academic programs in microelectronic engineering. This support is for both teaching laboratories that are integral to the curriculum, as well as senior projects and graduate research activities. The process toolset is comprehensive, including ion implantation and e-beam maskmaking systems; tools not typically found in university laboratories. This enables all process sequences to be done completely \"in house\", providing our students with the unique hands-on experience of integrated circuit fabrication from design to final test. Around a decade ago RIT introduced a Ph.D. program in Microsystems Engineering, which was around a decade after RIT had introduced its first Ph.D. program in Imaging Science. Since that time the emphasis on research at RIT has increased dramatically, with the current number of Ph.D. programs at six. The priorities in support of research in the micro/nano arena (microsystems, nanophotonics, nanoelectronics, etc.) are quite different than the priorities in support of educational programs in microelectronic engineering. The teaching labs require process capabilities that are representative of what the students will see or use in an industrial facility, and cover all aspects of CMOS fabrication. While research activities may utilize CMOS processes, they also typically involve specialized tooling to do specific processes that do not necessarily benefit a significant fraction of the lab users. Faculty investigators may bring in funding for unique capabilities for their research, however, they typically do not bring in funding to help upgrade general-use process equipment, nor are they accustomed to securing equipment acquisitions through donations by industrial affiliates. In 2001 the decision to operate the SMFL as a separate unit outside of the Microelectronic Engineering Department was made by the administration in an attempt to expand the user base to other departments in engineering and science, and to support specific research initiatives. This began a series of changes in the operation of the SMFL, and presented several challenges involved with supporting research activities while ensuring that the quality of the services provided to the educational programs was not compromised. Internal funds have been provided to a number of research groups that utilize the SMFL resources, while the funds allocated for SMFL infrastructure and equipment upgrades has decreased significantly. In addition to financial considerations, there has also been an allocation of space to investigators for research activity in what was formerly general-use space. These trends have resulted in increased expenses associated with researchers who ar","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121848775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}