2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)最新文献

{"title":"A Lean and Sustainable User Access System for a University Microfabrication Laboratory","authors":"A. Roth, J. Lee","doi":"10.1109/UGIM.2012.6247101","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247101","url":null,"abstract":"Summary form only given. The objective of this project is to develop a user access system for the Microscale Process Engineering Laboratory (MPEL) at San Jose State University (SJSU). The system implements hardware/software locks that limit tool use to authorized users only. The MPEL at SJSU is a 5,000 sq. ft. instructional facility that is also used for research projects and industry collaboration. Based on the size of the facility and its support infrastructure, it is critical that the user access system be very lean and sustainable for the limited staffing available. In addition to the interlock system, the necessary system functions include a database with user information and authorization levels that can easily be modified by the lab managers. Preventing unauthorized tool use, or any use in the case of a tool that is down, will help maintain user safety and prevent tool damage. Individual user and tool hours are logged to add user accountability, budget tracking, and improve tool maintenance. This project evaluates trade-offs between having a centralized master computer that communicates with \"child\" computers stationed at each major functional area of the lab and having independent computers located separately at each functional area. Each option has benefits and costs related to expense, sustainability and usability. The implemented system will provide SJSU's MPEL with a lean and sustainable user access system that will improve safety, maintainability and quality.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126782127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fab Pitfalls with \"Green Energy\" at University and Government Campuses","authors":"A. McEachern","doi":"10.1109/UGIM.2012.6247068","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247068","url":null,"abstract":"Many university and government campuses have rapidly expanding “Green Energy” programs. These programs often include a mix of solar photovoltaic power, wind power, fuel cells, and other low-carbon sources. Unfortunately, practical experience has shown serious problems with these sources powering sensitive fab tools. A better solution is to operate the fab tools from traditional utility-provided power, then use the “green” power to operate less-sensitive fab support equipment: chillers, CDA compressors, CDW pumps, and so forth. This less-sensitive equipment often consumes half or more of the entire fab energy budget, and is readily adaptable - with some small technical effort - to tolerate the power disturbances found on a “green” grid.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121593870","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fab Security","authors":"P. Karulkar","doi":"10.1109/ugim.2012.6247080","DOIUrl":"https://doi.org/10.1109/ugim.2012.6247080","url":null,"abstract":"It is very common to encounter the topic of security while running day-to-day operations of a fabrication facility (Fab. Recently, this topic came up because of a request for information posted on an e-mail based community bulletin board. Other occasions involve general awareness resulting from something in the news, scouting or starting a new project, sponsor/customer inquiries, reaction to a specific local situation, and, most importantly, audits evaluating the compliance with federal, state and local regulations. Independent of its origin, the so called \"Fab Security Plan\" tends to be a patchwork of rules and requirements because of the poor understanding of its importance, resource limitations, conflicting program requirements, dynamic local situations, and inability to anticipate future needs. Usually, finalizing and documenting one's security posture turns out to be a challenging task. But it is critical for every fab to have a functional security plan. Giving numerous examples of practical situations, this presentation will discuss development of a security posture. The list of topics that would be emphasized includes but is not limited to: (1) Understanding the importance of the security posture, (2) Devil in the detail: analyzing security situations, (3) Understanding the law, rules, policies, and requirements, (4) Knowing customer needs: current and anticipated, (5) Knowing your business, (6) Knowing existing commitments, (7) Flushing out local environment, (8) Flushing out stake holder requirements, (9) Know what you can afford, (10) Comprehensiveness within limits, (11) Developing security procedures, (12) Reconciling with safety & environmental codes, and other local policies, (14) Iterative reviews, approvals, (15) Trial implementations, roto-rooting, and revisions, (16) Finalizing, adoption, and acceptance, (17) Training, briefing, debriefing, reporting, corrective actions and recourses for violations, and appeals, (15) Dos, don'ts and common mistakes, (14) Understanding that practical situations have a lot of gray but security postures tend to be black and white for a reason. Balancing gray with black & white requires a bottom up approach combined with a lot of training. Security plan is a \"live\" document but should not be subject to rapid change or perpetual tweaking. About the Author: Dr. Pramod C Karulkar has held engineering, program management and senior management positions in micro-nano programs involving R&D and custom manufacturing that have successfully produced cutting edge, high performance components/systems for field applications. He has been a major contributor to establishing, expanding, equipping, bringing on line, and qualifying fab facilities for deliverable products. His contributions to R&D, engineering, and fab management work have been commended by customers. Addressing fab security successfully has played a key role in the success of his projects in government contract environment. Dr. Karulkar received Ph.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126988117","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A Phosphine Sub Atmospheric Delivery System (SADS) Applied to Low Pressure Chemical Vapor Deposition (LPCVD) of In-Situ Doped Polysilicon","authors":"J. Bowser, W. Young, Lei Chen, V. Luciani","doi":"10.1109/UGIM.2012.6247086","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247086","url":null,"abstract":"A phosphine SADS has been fitted to a conventional LPCVD furnace system. Through careful design and implementation, we have demonstrated an inherently safe system with significantly lower infrastructure requirements and costs that meet all semiconductor industry safety requirements.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114543470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}