2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)最新文献

{"title":"Safety Considerations in Building Ultra-High Vacuum Plasma Enhanced Chemical Vapor Deposition System for Low Temperature Group IV Epitaxy","authors":"H. Naseem, Shui-Qing Yu, S. El-Ghazaly, Z. Waqar, H. Abu-Safe, S. Adcock, B. Conley, A. Mosleh, Bryant Hankton, Asanka Munasinghe","doi":"10.1109/UGIM.2012.6247104","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247104","url":null,"abstract":"A state-of-the-art chemical vapor deposition tool has been designed and built at the Photovoltaics Lab, Department of Electrical Engineering in the Engineering Research Center for depositing epitaxial films of group IV elements and their alloys. Due to the use of extremely toxic and flammable/pyrophoric gases safety and process integrity was built into the design right from the get go. College and University safety committees as well as external advisors were used throughout planning and building stages. Standard operating procedures (SOP) and travelers have been developed for various procedures and safety-training documents have been produced for proper training of new students and researchers. This lab is expected to be a model for new equipment building and acquisition at the University.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122710850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"FY11 Financial and Operational Survey of Major University Nanofabrication Facilities","authors":"D. Grimard, L. Jones","doi":"10.1109/UGIM.2012.6247088","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247088","url":null,"abstract":"The primary intent of this survey is to provide all interested parties (researchers, management, users, administration, and support staff) with a well-vetted updated set of data upon which a constructive discourse may be established regarding operational costs, tool rates, staffing, safety, and basic efficiency guidelines of a complex nanofabrication facility. Secondarily, the authors also aim to establish a set of data by which the stakeholders may evaluate the total cost of research, not just the cost of the laboratory, ranging from lab fees to tuition to indirect cost policies to student stipend.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128697765","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Re-Engineering the User-Hazard \"Coalface\" at the Melbourne Centre for Nanofabrication","authors":"P. Spizzirri","doi":"10.1109/UGIM.2012.6247093","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247093","url":null,"abstract":"Limiting user exposure to hazards in a state-of-the-art, multi-user facility can be challenging given the breadth of technology and processes that are available. Compounding this problem is the multi-disciplinary nature of research in the field of nano- technology which encourages users with varied experience levels to work in areas outside of their core expertise. Recent efforts to redesign the user-hazard interface at the MCN are discussed as new opportunities for lower risk capabilities are brought online.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128752795","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Mercury Lab Management Software","authors":"T. Merport, O. Proskurowski","doi":"10.1109/UGIM.2012.6247079","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247079","url":null,"abstract":"Mercury is a system that helps management, staff, and members efficiently use laboratory resources. Mercury emphasizes accounting by utilizing a double entry accounting system: lab activities are recorded and debited/credited to the appropriate accounts in real-time. It is a Management Information System or more appropriately a Member Information System. The software is named Mercury after the Roman god that acted as a messenger (often depicted holding a purse). The components of Mercury are a relational database management system (Ingres), daemons, and clients. It is a dual, three tier application (see the diagram below). The client program that runs in the laboratory is called MercuryClient. It connects to a session management daemon, Mercury Server. There is also a client system that runs in a browser, MercuryWeb. Most of the logic or business rules for the system are implemented in the database as stored procedures. This helps insure data integrity and improves speed. It also minimizes duplication of procedures in the middle tier and clients. MercuryClient is a Java application that members use in the laboratory. When the application is run, a sign-in window appears. Members enter their login name, password, and select a project associated with their account. If members are qualified to use the lab, the full MercuryClient screen appears (lab charges commence). At this point they are connected to the Mercury database through Mercury Server and have access to equipment status, qualifications, materials, viewing who is in the lab, and more. The main task for members once logged in, will be to select an equipment row and enable the equipment. Several rules are checked at this point including presence, equipment and facility qualifications, and problem reports. MercuryClient maintains a continual session with the server and holds session information such as location, lab time, and idle time. MercuryWeb is a web application that provides lab members and staff access to the Mercury database system through any web browser. MercuryWeb is written in Java and uses SQL queries and stored procedures to access and update data in the Ingres RDMS. MercuryWeb also allows creating various reports in PDF, Word, Excel, and PowerPoint formats. MercuryWeb includes the following major modules: Accounting, Inventory, Member Management, Online Tests, Facilities, Reservations, Calendar, and Tasks. The Accounting module is used for day to day tasks as well as to create end of month financial statements and reports. The Inventory module helps to maintain inventory of supplies and parts used in the lab. Member Management provides member and staff account setup and administration. Online Tests allow creating, taking, and grading tests online, completely replacing paper based tests. Facilities are used to define resources (equipment, utilities, and locations) and create associations between them. The Reservation modules allow lab members to reserve frequently used equipmen","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125401045","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A National Facility- Challenges and Progress","authors":"D. Hirons","doi":"10.1109/UGIM.2012.6247097","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247097","url":null,"abstract":"It is all well and good to set up a National Facility comprising 8 Nodes distributed throughout Australia but it is another to actually get the Nodes to interact, communicate, share resources, handle multi-nodal requests, and promote activities together. At the Australian National Fabrication Facility (ANFF) we have make significant steps to become a truly National Facility. Regular meetings of all the Facility Manager's have facilitated discussion on issues of a national perspective. Keywords - facilities, key performance indicators, management, strategy, national, fabrication.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"36 18","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"113974867","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"An Overview of Daily Operations at the VINSE Core Laboratories","authors":"A. Hmelo","doi":"10.1109/UGIM.2012.6247084","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247084","url":null,"abstract":"Vanderbilt University maintains a 1635 sq. ft. class 10,000 cleanroom facility to support the teaching, research and outreach objectives of the Vanderbilt Institute of Nanoscale Science and Engineering (VINSE). Operating since 2004 the facility is a shared, multi-user laboratory space that services the research and training needs of at least 19 independent groups from across the Vanderbilt campus, as well as the middle Tennessee region including Fisk University, Tennessee State University, Middle Tennessee State University, and the University of Tennessee Space Institute in Tullahoma, TN. Since we last reported in 2010 the VINSE facilities have undergone an substantial renovation of infrastructure, and the faculty users have been successful in winning funding to install new instrumentation and additional capabilities in support of our mission of service to the Vanderbilt community and beyond. Nevertheless, as the facility matures we face lingering issues of cost recovery and maintenance of the physical infrastructure at a private University. During this presentation I will discuss various strategies we pursue for successful laboratory management of this multi-user facility, including cost recovery mechanisms, tool specific and chemical safety training, facility staffing and after-hours buddy system access, coursework development, and integration of ongoing outreach efforts in our daily operations.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114381531","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The Design and Building of the Draper Laboratory Microfabrication Center","authors":"R. Morrison, D. J. Carter, L. Racz","doi":"10.1109/UGIM.2012.6247070","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247070","url":null,"abstract":"Draper is a not-for-profit research and development laboratory focused on the design, development, and deployment of advanced technological solutions for our nation's most challenging and important problems in security, space exploration, healthcare, and energy. Since the late 1980's, Draper has been performing research and development in the areas of MEMS and Multichip Modules (MCM). Two separate laboratories have been utilized by Draper over the past 25 years in pursuit of this research. When these laboratories were constructed cleanroom technology was is in its mid-life cycle. Class 100 laboratory spaces were common, with local Class 10 areas needed to control particles in critical process areas. The MCM lab at Draper is Class 10000 with local Class 1000 areas supporting line/space processes of 25 microns. The MEMS lab at Draper is Class 1000 with Class 100 areas and supports line/space process of ~2-5 microns. Due to customer requirements and industry road maps, Draper must support MCM technology down to 5 micron line/space and MEMS technology down to a 1 micron line space or smaller. Therefore, Draper needs to upgrade its cleanroom laboratories. This paper will discuss the rationale used by Draper Laboratory to design its new Microfabrication Center. We will discuss the trade-offs required to retrofit a state-of-the-art processing facility into a building built in the 1970's. Expanding on that theme, we will discuss how the design specifications were defined, how we selected an architecture firm, construction manager (CM) and the pros and cons of using a Commissioning Agent (Cx). We will discuss the construction and commissioning aspects of the project, which is due to be completed in September 2012.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124850618","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nanofabrication Lab Security Project","authors":"H. Anderson, D. Bunzow, A. Gregg, J. Hughes, J. Kita, R. Morrison","doi":"10.1109/UGIM.2012.6247103","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247103","url":null,"abstract":"Summary form only given. Nanofabrication laboratories have well established programs to protect the health and safety of researchers and the nearby communities, but programs to protect the security of reagents and hazardous process gases are just getting started, particularly at universities. Enforcement of security and export regulation has increased. A survey of 51 people (more than half lab managers) from at least 31 nanofabrication facilities explores their views on security threats. The top security concern is theft or diversion of dangerous chemicals. Half of US respondents either want more information or are unfamiliar with Chemical Facility Anti-Terrorism Standards (CFATS) though they all have chemicals covered by the regulations. Only 8% are highly confident that stolen or missing chemicals would be noticed within 24 hours of the incident. Other threats include theft of intellectual property, cyber security, the actions of anti-nanotechnology protesters and natural disasters. However, 24% of the respondents do not see any threat to the security of their laboratories. This presentation covers the results of the survey, a review of security threats, mitigation strategies, sources of information and outreach programs to enhance the security of laboratories. Also covered are regulatory issues related to security, including disclosure of restricted technology to foreign nationals in the U.S. (\"deemed exports\") and CFATS.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"57 5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123255307","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"On the Co-Evolution of Microelectronic Engineering Laboratories and Education at RIT","authors":"R. Pearson","doi":"10.1109/UGIM.2012.6247053","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247053","url":null,"abstract":"The undergraduate Microelectronic Engineering Program at the Rochester Institute of Technology (RIT) has been in existence since 1982 [1]. Since the founding of the program, integrated circuit technology has progressed from the desk-top PC to mobile devices of unprecedented capability. The lecture and laboratory content of our program which educates future engineers in the fabrication of the integrated circuits that go into these devices has been consistently challenged to keep pace. In addition, over the last two decades the advances in semiconductor technology has been applied to many more fields, such as, nanotechnology, MEMS, chemical and bio sensors, photovoltaics, energy harvesting and displays [2]. Courses which provide the basic semiconductor processing foundation must be coupled with additional elective coursework in these areas as well as new lab requirements [3]. The complexity and cost of the evolving tool set along with tool maintenance puts an additional burden on faculty and staff as exemplified by the recent installation of our ASML Stepper.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130554177","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Preparing an Aging Facility to Meet Expanding Lab Demands: Renovation of the Stanford Nanofabrication Facility","authors":"J. Shott, J. Bumgarner, M. X. Tang","doi":"10.1109/UGIM.2012.6247095","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247095","url":null,"abstract":"The Stanford Nanofabrication Facility at Stanford University is housed in a building approaching 30 years in age. The ability of the program to meet research needs is increasingly hampered by the capacity and age of the physical structure. In late 2010, the Stanford Nanofabrication Facility was awarded funding from the National Science Foundation, and matched by contributions from the University, to begin a renovation program that addresses these infrastructure shortcomings. This paper describes the key tasks undertaken and the challenges of executing a construction project of this nature with minimal impact to ongoing research. We conclude with lessons learned.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"190 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133991808","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}