2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)最新文献

{"title":"Modified Adaptive Control of a 10,000 Square Foot Cleanroom Using Particle Counters to Maintain Design Specifications and Reduce Energy Consumption","authors":"T. Tribble, C. Rochester, M. Beauvais","doi":"10.1109/UGIM.2012.6247077","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247077","url":null,"abstract":"As the post-construction resident facilities management team, we present the iterative steps planned and taken in order to reduce the energy profile of a 10,000 GSF, Class 100 - 10,000 research cleanroom. These steps have been planned and taken without sacrifice to initial design requirement or hindrance to installed ''tools''. We describe the process of taking a finished design and fully constructed all new cleanroom and modifying it. Our goal was to equal or exceed design specifications for air quality, but to significantly reduce the energy consumption of the HVAC systems serving this space. To achieve this goal we used twenty-six commercial particle counters, combined with a revised Building Automation System (BAS) control programming sequence to achieve these results. This change led to a series of additional alterations of cleanroom system components. Each of these alterations was monitored for particle performance in the cleanroom. The system changes completed have generated HVAC performance improvements and at the same time, significant energy savings.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128483816","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The UofL MNTC and the KY NanoNET - Two Initiatives to Promote Nano-Science in the State of Kentucky","authors":"K. Walsh, S. McNamara, J. Aebersold, D. Yeager, C. Mckenna, M. Martin, W. Metcalf, A. Sanchez, T. Roussel, C. Vissers, B. Westhoff","doi":"10.1109/UGIM.2012.6247067","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247067","url":null,"abstract":"The University of Louisville constructed its first cleanroom in 1997, a modestly-sized 1,500 sq. ft. class 1,000 facility. Since then, the “micro/nano/MEMS” revolution has exploded nationally and U of L has positioned itself to be the leader of this effort for the state of Kentucky. With the success of existing faculty and the hiring of new faculty over the last 10 years in the diverse disciplines that utilize micro/nanotechnology, U of L outgrew its original cleanroom. In 2001, plans were initiated for the design of a new greatly-expanded, multi-user cleanroom, large enough to support the emergent research activities at U of L and throughout the state and region. In 2006, construction was completed on a new 120,000 sq. ft., $60M, interdisciplinary research building which houses the new AGI-designed cleanroom facility (see Fig. 1). This stateof-the-art, 10,000 sq. ft., class 100/1000 facility serves over 100 internal users from over 7 different departments at the university, including Physics, Chemistry, all fields of Engineering, and Medicine. In addition, it serves industry and the other universities in Kentucky (UK, EKU, WKU, Morehead State, and Murray State). Our industrial customers include established Kentucky companies like Lexmark International, local start-ups like Micro Werks, Assenti, NaugaNeedles, and OrthoData Technologies, and companies/universities/national labs outside Kentucky, such as Zyvex, Google, Honeywell, the University of Cincinnati, and the Naval Research Lab (NRL) to name just a few.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126785376","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Berkeley Micro/NanoLab Affiliate Members Program: A Critical Component of Laboratory Growth and Stability","authors":"A. Flounders, K. Voros","doi":"10.1109/UGIM.2012.6247052","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247052","url":null,"abstract":"In fiscal year 1995, the Berkeley Microlab formalized access to the university laboratory cleanroom and use of the lab's micro/nano-fabrication academic research equipment by industrial researchers. The system wide bureaucratic coordination to establish this program was significant. Input, review and final approval from multiple campus offices was required to address contract administration, recharge and overhead rates, intellectual property policies, and workers compensation and university liability issues. The return on investment of this program cannot be overstated. Since program inception over $7.7M of recharge revenue has been generated representing on average 20% of the Laboratory's annual operations budget. Critical to the faculty support of the program is management evaluation of all materials and processes planned by commercial researchers and the commitment to reject any application that risks or interferes with academic research priorities. The compensation to faculty have been stable recharge rates, a well-defined path for startup companies and a discretionary fund that enables infrastructure and equipment upgrades and funded a majority of the transition to our new laboratory. This affiliate program is not linked to the NNIN.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115105331","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Financial Analysis of a Successful Multi-User Academic Laboratory","authors":"K. Voros","doi":"10.1109/UGIM.2012.6247051","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247051","url":null,"abstract":"Maintaining a working university laboratory with capability to build any kind of electronic devices is a major effort and commitment on the part of the faculty. The only way we could manage is by pooling all efforts in a shared facility; developing a balanced financial structure and providing transparency to participating PIs; having a dedicated, professional staff to maintain equipment and processes; efficient equipment utilization by applying computer control; providing student training and support, and by keeping safety issues in the fore front. Of all these crucial components I will address our financial strategy and how the UC Berkeley Microlab maintained its fiscal health over the years. While the financial support structure, scale of operation, and missions of other labs may differ from ours, many of the problems we have been struggling with are fundamental and every lab's management has to deal with them. The type and scale of a university semiconductor fabrication laboratory should be in line with existing and planned research activities and the realistic support likely to come from them. Grants obtained for lab construction and startup are quickly expended, leaving the organization to its own resources. Without a strong supporting base and some type of subsidy, a university lab will face extreme difficulties. The Berkeley Microlab, now the Nanolab is a campus \"Recharge Center\", which means that it provides specific, ongoing services to a number of PIs, units, or projects, and recovers the costs of these services from the units served on a \"rate basis\". We develop and submit for review \"recharge rates\" to recover the costs of operations such as salaries, benefits, equipment maintenance and depreciation, materials, services and supplies. The campus Recharge Committee monitors compliance. When the Microlab opened for general use 28 years ago, a recharge structure was initiated based on estimated expenses and income. Over the years the rates increased with inflation, but the basic structure is still the same and includes the following categories: Monthly Access Fee, General Laboratory Rate, Special Equipment Rate, Exceptional Equipment rate and Staff Services. Except for the monthly access fee, applied as long as the lab member (user) is in active status, hourly rates are established (billed by actual use-minutes). The rates are calculated by dividing the total estimated expenses for the category by the estimated use hours. Laboratory and equipment use data is provided by an equipment computer control software system, which records start and end times of each use. This data is fed into the accounting module which provides monthly, yearly, periodic reports on demand. Monthly billing is uploaded to the University's accounting system, attaching the charges directly to the assigned research grants. Faculty PIs receive monthly informative statements directly from the lab. Once the billing mechanism was in place, we developed strict budgetary con","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124771491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"The Development of a Formal Emergency Response Team for a Populous University Clean Room in a Dense Urban Setting","authors":"J. Sweeney","doi":"10.1109/UGIM.2012.6247082","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247082","url":null,"abstract":"A campus-based emergency response team can greatly augment the overall safety infrastructure of a university cleanroom. Here we present the components needed to develop an effective emergency response team capable of responding to emergencies that may occur within Harvard University's Center for Nano-scale Systems clean room facility (a site specific emergency response team). A team has been formed with at least 8 members, most cleanroom personnel, and this group meets monthly to train for toxic gas releases and hazardous liquid spills. The training ranges from fit-testing respirators, to donning Level B emergency response suits, to participation in mock drills with leaders from the local fire department. Here we discuss the following: 1. Describe the reasons for choosing to have a formal emergency response team comprised of personnel from the clean room staff. 2. A description of the facility and its hazards, including a description of the toxic gas monitoring system and how it is used during emergencies. 3. Describe the members of this site-specific emergency response team (ERT) and their roles and limitations during toxic gas related emergencies. 4. Describe the level and frequency of training the members of this ERT receive. 5. Describe the other campus resources that support the ERT during emergencies and describe their roles. 6. Explain the importance of building a solid working relationship with the local fire department. Describe the alignment of the responsibilities of the campus ERT and the local department during a toxic gas related alarm. 7. Describe essential emergency response equipment will be reviewed including fixed camera systems to a variety of reliable portable gas detectors and the importance of having a reliable preventive maintenance program for these portable gas detectors. 8. Present an example scenario and describe how a silane gas leak might be handled. The time commitment and cost to maintain a site-specific emergency response team for a university clean room are not insignificant. However, we show that there are benefits from having a site-specific team ready to work with the local fire department during an actual event.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123786151","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Towards a Supermassive Research Center: Scaling Rules for Laboratory Operations","authors":"E. Martin","doi":"10.1109/UGIM.2012.6247069","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247069","url":null,"abstract":"Financial scaling laws are shown to be useful instruments for the examination of size limits for university laboratory operations. Historical cost data and cost models are shown to have utility for examining scenarios of varying laboratory usage levels. As expected, laboratory operations are composed of both fixed and varying costs. However the variable expenses expand non-linearly with usage as additional capital investments are required to provide required capacity.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"138 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131577327","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Coordinating Lab Resources for a Project-Based MEMS Course","authors":"I. Puchades, L. Fuller","doi":"10.1109/UGIM.2012.6247054","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247054","url":null,"abstract":"In order to evaluate the effectiveness of teaching technique in Rochester Institute of Technology's EMCR870-microelectromechanical systems course, the authors conducted a survey to evaluate this course . The student's answers are classified based on their previous background. Preliminary data shows that students with previous work experience are more likely to be successful in this type of teaching setting while those without it seem to struggle but benefit the most. Surveys have also been sent out to alumnae of the course to assess how this type of teaching setting has helped them in their current jobs. Results of these surveys were presented.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131438484","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"How Do You Pay for It? Financing Situation at McGill Nanotools Microfab","authors":"M. Nannini","doi":"10.1109/UGIM.2012.6247108","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247108","url":null,"abstract":"This document presents and discusses the financing strategies for the McGill Nanotools Microfab.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129766127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Sabanci University Nanotechnology Research and Application Center: An Experience in Building a Multi-Disciplinary Research Facility Overseas","authors":"B. Birkan, E. Heves, B. Koroglu, C. Findik, H. Sarısu, E. Duzgoren, V. Ozguz","doi":"10.1109/UGIM.2012.6247071","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247071","url":null,"abstract":"Sabanci University Nanotechnology Research and Application Center (SUNUM) is developed with approximately 30 M$ and started its operations in June 2011. The center provides valuable additional capabilities to the existing research infrastructure of the Faculty of Engineering and Natural Sciences of Sabanci University. The high-tech facility is designed to support cutting-edge scientific and technological research related to nanotechnologies including advanced materials, nano-biotechnology, nano-medicine, nano-electronics, micro-nanofluidics, nanomechanics, nano-optics, micromachining, micro and nano-systems and alternative energy sources.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"115 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131778254","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Evaluating Laboratory Staff Performance","authors":"J. Weaver","doi":"10.1109/UGIM.2012.6247091","DOIUrl":"https://doi.org/10.1109/UGIM.2012.6247091","url":null,"abstract":"Performance evaluations are often considered a nuisance by laboratory managers, but a carefully developed and implemented evaluation process can have a very positive effect on employee performance. It provides a formal setting for discussions between a supervisor and employee, it provides long-term documentation on employee performance, and it provides a method for ranking employees when assessing the distribution of merit-based increases in salary. This paper details a method of employee evaluation that has evolved over a long career of supervising fabrication-facility personnel.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133928086","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}