National Nanofabrication Centre at IISc Bangalore: A Chronicle of Design, Construction and Management of Cleanroom in Indian Context

T. Murthy, M. Vijayaraghavan, P. Savitha, G. Hegde, S. Raghavan, P. Kumar, R. Pratap, N. Bhat
{"title":"National Nanofabrication Centre at IISc Bangalore: A Chronicle of Design, Construction and Management of Cleanroom in Indian Context","authors":"T. Murthy, M. Vijayaraghavan, P. Savitha, G. Hegde, S. Raghavan, P. Kumar, R. Pratap, N. Bhat","doi":"10.1109/UGIM.2012.6247096","DOIUrl":null,"url":null,"abstract":"We present the evolution of the state-of-the-art multiuser, open access, Nanofab facility at the Indian Institute of Science Bangalore. The process behind the design and execution of the cleanroom will be described. The challenges faced in moving the equipments from the old facility and the issues in coordinating installation of new equipments and utility hookup will be presented. The methodology used to manage the facility, challenges in staffing to run the facility and balancing the time sharing between internal and external users will be discussed.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UGIM.2012.6247096","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

We present the evolution of the state-of-the-art multiuser, open access, Nanofab facility at the Indian Institute of Science Bangalore. The process behind the design and execution of the cleanroom will be described. The challenges faced in moving the equipments from the old facility and the issues in coordinating installation of new equipments and utility hookup will be presented. The methodology used to manage the facility, challenges in staffing to run the facility and balancing the time sharing between internal and external users will be discussed.
班加罗尔IISc国家纳米制造中心:印度环境下洁净室的设计、建造和管理编年史
我们介绍了印度班加罗尔科学研究所最先进的多用户、开放获取的纳米实验室设施的发展。将描述洁净室设计和执行背后的过程。将介绍从旧设施转移设备所面临的挑战,以及协调安装新设备和公用事业连接的问题。将讨论用于管理设施的方法,在人员配置方面的挑战,以及平衡内部和外部用户之间的时间分配。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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