T. Murthy, M. Vijayaraghavan, P. Savitha, G. Hegde, S. Raghavan, P. Kumar, R. Pratap, N. Bhat
{"title":"National Nanofabrication Centre at IISc Bangalore: A Chronicle of Design, Construction and Management of Cleanroom in Indian Context","authors":"T. Murthy, M. Vijayaraghavan, P. Savitha, G. Hegde, S. Raghavan, P. Kumar, R. Pratap, N. Bhat","doi":"10.1109/UGIM.2012.6247096","DOIUrl":null,"url":null,"abstract":"We present the evolution of the state-of-the-art multiuser, open access, Nanofab facility at the Indian Institute of Science Bangalore. The process behind the design and execution of the cleanroom will be described. The challenges faced in moving the equipments from the old facility and the issues in coordinating installation of new equipments and utility hookup will be presented. The methodology used to manage the facility, challenges in staffing to run the facility and balancing the time sharing between internal and external users will be discussed.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UGIM.2012.6247096","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We present the evolution of the state-of-the-art multiuser, open access, Nanofab facility at the Indian Institute of Science Bangalore. The process behind the design and execution of the cleanroom will be described. The challenges faced in moving the equipments from the old facility and the issues in coordinating installation of new equipments and utility hookup will be presented. The methodology used to manage the facility, challenges in staffing to run the facility and balancing the time sharing between internal and external users will be discussed.