{"title":"寻找完美的“核心”纳米设备:研究洁净室和成像实验室设计的趋势","authors":"A. Gregg","doi":"10.1109/UGIM.2012.6247072","DOIUrl":null,"url":null,"abstract":"AGI will present recent benchmarking of nanotechnology and multidisciplinary cleanrooms and imaging labs, explaining emerging trends including common tool lists, the latest “must have” process and metrology tools, size/configuration trends in cleanrooms and imaging spaces, and trends in accommodation of shared toolset expansion over time (phasing plans). We will also cover architectural/site planning considerations, and the increasing complexity of imaging lab environments, especially in urban settings. Design considerations that are critical to research environments, regardless of specific process, will be discussed, along with their cost drivers.","PeriodicalId":347838,"journal":{"name":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"In Search of the Perfect \\\"Core\\\" Nano Facility: Trends in Research Cleanroom and Imaging Lab Design\",\"authors\":\"A. Gregg\",\"doi\":\"10.1109/UGIM.2012.6247072\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"AGI will present recent benchmarking of nanotechnology and multidisciplinary cleanrooms and imaging labs, explaining emerging trends including common tool lists, the latest “must have” process and metrology tools, size/configuration trends in cleanrooms and imaging spaces, and trends in accommodation of shared toolset expansion over time (phasing plans). We will also cover architectural/site planning considerations, and the increasing complexity of imaging lab environments, especially in urban settings. Design considerations that are critical to research environments, regardless of specific process, will be discussed, along with their cost drivers.\",\"PeriodicalId\":347838,\"journal\":{\"name\":\"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)\",\"volume\":\"2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-07-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/UGIM.2012.6247072\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 19th Biennial University/Government/Industry, Micro/Nano Symposium (UGIM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UGIM.2012.6247072","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
In Search of the Perfect "Core" Nano Facility: Trends in Research Cleanroom and Imaging Lab Design
AGI will present recent benchmarking of nanotechnology and multidisciplinary cleanrooms and imaging labs, explaining emerging trends including common tool lists, the latest “must have” process and metrology tools, size/configuration trends in cleanrooms and imaging spaces, and trends in accommodation of shared toolset expansion over time (phasing plans). We will also cover architectural/site planning considerations, and the increasing complexity of imaging lab environments, especially in urban settings. Design considerations that are critical to research environments, regardless of specific process, will be discussed, along with their cost drivers.
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