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IEEE/LEOS International Conference on Optical MEMs最新文献

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A high aspect ratio 2D gimbaled microscanner with large static rotation 具有大静态旋转能力的高纵横比二维万向显微扫描仪
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031486
Sunghoon Kwon, V. Milanovic, L. Lee
{"title":"A high aspect ratio 2D gimbaled microscanner with large static rotation","authors":"Sunghoon Kwon, V. Milanovic, L. Lee","doi":"10.1109/OMEMS.2002.1031486","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031486","url":null,"abstract":"Introduces an isolation method for SOI MEMS technologies, and demonstrates a high aspect ratio 2D gimbaled microscanner with large static rotation using the method. The proposed isolation method, termed backside island process, provides electrical isolation and mechanical coupling of SOI structures through deep reactive ion etching of the backside substrate. The fabricated 2D mirrors perform large static optical deflection from -20.3/spl deg/ to 15.6/spl deg/ by outer gimbal and from 0/spl deg/ to -11.9/spl deg/ by inner mirror.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131292127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 20
Electrostatically actuated moving-fibre switch 静电驱动移动光纤开关
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031468
M. Hoffmann, D. Nusse, E. Voges
{"title":"Electrostatically actuated moving-fibre switch","authors":"M. Hoffmann, D. Nusse, E. Voges","doi":"10.1109/OMEMS.2002.1031468","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031468","url":null,"abstract":"An optical moving-fibre switch for optical protection switching is presented which is based on butt-coupled standard fibres without further optical elements. The electrostatic parallel-plate actuators as well as the fibre alignment structures are realised by anisotropic machining of [110]- or [100]-silicon. The actuation voltage is below 30 V. A coupling loss of 0.5 dB is achieved in the lensless optical path. This type of switch is especially useful for rows of switches.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"227 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133607775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of high-NA GaN diffractive microlenses 高na氮化镓衍射微透镜的制备
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031446
Chii-Chang Chen, Ming-Hung Li, Chih-Yang Chang, G. Chi, Jenq-Yang Chang, W. Cheng, J. Yeh, C. Wu
{"title":"Fabrication of high-NA GaN diffractive microlenses","authors":"Chii-Chang Chen, Ming-Hung Li, Chih-Yang Chang, G. Chi, Jenq-Yang Chang, W. Cheng, J. Yeh, C. Wu","doi":"10.1109/OMEMS.2002.1031446","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031446","url":null,"abstract":"We present the fabrication of the high-numerical-aperture GaN diffractive microlenses by gray-level mask and inductively coupled plasma etching. (NA=0.85) The microlenses were designed for the application of high-density optical data storage. The advantage of using GaN as the material of the diffractive microlenses is discussed.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132792970","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Improvement of stresses in multilayer structures with SiO/sub 2//Pt/Pb(Zr,Ti)O/sub 3//Pt thin-film stacks for micro-scanner actuators 用SiO/ sub2 //Pt/Pb(Zr,Ti)O/ sub3 //Pt薄膜层改善微扫描仪致动器多层结构应力
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031484
L. Zhang, R. Maeda, Z.J. Wang
{"title":"Improvement of stresses in multilayer structures with SiO/sub 2//Pt/Pb(Zr,Ti)O/sub 3//Pt thin-film stacks for micro-scanner actuators","authors":"L. Zhang, R. Maeda, Z.J. Wang","doi":"10.1109/OMEMS.2002.1031484","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031484","url":null,"abstract":"Stresses in MEMS multilayer structures with SiO/sub 2//Pt/Pb(Zr,Ti)O/sub 3//Pt thin-film stacks on Si substrates for micro-scanner actuators were investigated by measuring radius of wafer curvature for each film. The stresses in each film after the last coating were in tension except the Pt top electrode. The Pt bottom electrode shows an especially large tensile stress of approximately 1.3 GPa. The beam-scanners were then fabricated to,investigate the curving state of multilayer structure released from Si substrate. The curving states of beams are related to not only the stresses in each film but also the balance of flexural rigidity of each film. A beam without any curvature was obtained successfully by changing the thickness of each film. A large optical scanning angle of 40-degree was obtained at the first resonance frequency of 2.78 kHz for the fabricated straight beam-scanner.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131480323","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
On the design and fabrication precision of Micro-Origami devices 微折纸装置的设计与制作精度
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031434
T. Aida, P. Vaccaro, K. Kubota
{"title":"On the design and fabrication precision of Micro-Origami devices","authors":"T. Aida, P. Vaccaro, K. Kubota","doi":"10.1109/OMEMS.2002.1031434","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031434","url":null,"abstract":"Micro Opto-Electro-Mechanical Systems (MOEMS) technology is expanding the potential of device technologies in regard to fabrication methods as well as device performance. We proposed and successfully demonstrated a simple method named Micro-Origami to make self-positioning micro-machined three-dimensional structures by using the strain in a pair of lattice-mismatched GaAs/InGaAs epitaxial layers grown on GaAs substrates. Micro-Origami is expected to become a viable fundamental technique for developing MOEMS devices with complex three-dimensional structures. However, the precision of the three-dimensional structures fabricated by Micro-Origami is supposed to be strongly affected by the fabrication process, because of the self-positioning mechanism. In this paper, we report on the fabrication of a free-standing plate and a retro-reflector, as examples of Micro-Origami devices, and discuss the design and fabrication precision.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130339862","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Air damping of mechanical microbeam resonators with optical excitation and optical detection 具有光激发和光检测的机械微光束谐振器的空气阻尼
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031443
Hua Chen, D. Drilhole, O. Robert
{"title":"Air damping of mechanical microbeam resonators with optical excitation and optical detection","authors":"Hua Chen, D. Drilhole, O. Robert","doi":"10.1109/OMEMS.2002.1031443","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031443","url":null,"abstract":"This paper is dedicated to both Finite Element Method (FEM) simulations and optical measurements of the mechanical quality factor dependence on air pressure of microbeam resonators. Firstly, a summary of previous theoretical works is given, for two different air cavity cases. Different damping mechanisms are discussed. Secondly, FEM simulation results using MEMCAD software are obtained for resonators with small air gaps. Finally, prototypes of silicon resonators are fabricated using SOI technology, and characterized under a precisely controlled vacuum chamber. In order to investigate both air cavity cases, optical excitation/detection is used. Good agreements are obtained with theory and simulations.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127506316","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Novel optical structure for micromachined wavelength-selective and tunable InP based MOEMS 微机械波长选择性可调谐InP MOEMS的新型光学结构
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031512
D. Zhou, K. Sun, M. Garrigues, J. Leclercq, P. Regreny, J. Peng, P. Viktorovitch
{"title":"Novel optical structure for micromachined wavelength-selective and tunable InP based MOEMS","authors":"D. Zhou, K. Sun, M. Garrigues, J. Leclercq, P. Regreny, J. Peng, P. Viktorovitch","doi":"10.1109/OMEMS.2002.1031512","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031512","url":null,"abstract":"The paper describes a new concept for the fabrication of integrated wavelength selective photo-detectors (or emitters). These devices are based on the InP/InGaAs semiconductor system for application in the wavelength range from 1.1 to 1.7 /spl mu/m. Such integrated wavelength selective and tunable active devices are expected to be cost effective solutions for NIR spectroscopy or WDM optical communications.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129772340","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A large out-of-plane motion mechanism for optical applications 用于光学应用的大型面外运动机构
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031442
J. Tsai, C. Chu, J. Hsieh, W. Fang
{"title":"A large out-of-plane motion mechanism for optical applications","authors":"J. Tsai, C. Chu, J. Hsieh, W. Fang","doi":"10.1109/OMEMS.2002.1031442","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031442","url":null,"abstract":"Utilizing the high aspect ratio process on [111] Si substrate (BELST process), a large out-of-plane motion actuator that can be applied for MOEMS has been developed. In this design, the combination of vertical comb and robust leverage are exploited to provide an extremely large out-of-plane motion. Moreover, the thickness of the twin-beams torsional bar can also be trimmed to reduce the driving voltage.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126530434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Monolithic MEMS optical switch with amplified out-of-plane angular motion 具有放大面外角运动的单片MEMS光开关
IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031494
D. López, M. Simon, F. Pardo, V. Aksyuk, F. Klemens, R. Cirelli, D. Neilson, H. Shea, T. Sorsch, E. Ferry, O. Nalamasu, P. Gammel
{"title":"Monolithic MEMS optical switch with amplified out-of-plane angular motion","authors":"D. López, M. Simon, F. Pardo, V. Aksyuk, F. Klemens, R. Cirelli, D. Neilson, H. Shea, T. Sorsch, E. Ferry, O. Nalamasu, P. Gammel","doi":"10.1109/OMEMS.2002.1031494","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031494","url":null,"abstract":"We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127740152","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 24
CO/sub 2//H/sub 2/O gas sensor with a Fabry-Perot filter CO/sub 2//H/sub 2/O气体传感器与法布里-珀罗过滤器
IEEE/LEOS International Conference on Optical MEMs Pub Date : 1900-01-01 DOI: 10.1109/OMEMS.2002.1031427
M. Noro, K. Suzuki, N. Kishi, H. Hara, T. Watanabe, H. Iwaoka
{"title":"CO/sub 2//H/sub 2/O gas sensor with a Fabry-Perot filter","authors":"M. Noro, K. Suzuki, N. Kishi, H. Hara, T. Watanabe, H. Iwaoka","doi":"10.1109/OMEMS.2002.1031427","DOIUrl":"https://doi.org/10.1109/OMEMS.2002.1031427","url":null,"abstract":"An electrostatically driven tunable MEMS Fabry-Perot filter with wide wavelength range from 2.5 /spl mu/m to 4.5 /spl mu/m has been developed for NDIR CO/sub 2//H/sub 2/O gas sensors. The Fabry-Perot filter is equipped with the NDIR system, and the principle of this gas sensing method has been confirmed.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129739553","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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