具有放大面外角运动的单片MEMS光开关

IEEE/LEOS International Conference on Optical MEMs Pub Date : 2002-11-07 DOI:10.1109/OMEMS.2002.1031494

D. López, M. Simon, F. Pardo, V. Aksyuk, F. Klemens, R. Cirelli, D. Neilson, H. Shea, T. Sorsch, E. Ferry, O. Nalamasu, P. Gammel

{"title":"具有放大面外角运动的单片MEMS光开关","authors":"D. López, M. Simon, F. Pardo, V. Aksyuk, F. Klemens, R. Cirelli, D. Neilson, H. Shea, T. Sorsch, E. Ferry, O. Nalamasu, P. Gammel","doi":"10.1109/OMEMS.2002.1031494","DOIUrl":null,"url":null,"abstract":"We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.","PeriodicalId":285115,"journal":{"name":"IEEE/LEOS International Conference on Optical MEMs","volume":"32 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"24","resultStr":"{\"title\":\"Monolithic MEMS optical switch with amplified out-of-plane angular motion\",\"authors\":\"D. López, M. Simon, F. Pardo, V. Aksyuk, F. Klemens, R. Cirelli, D. Neilson, H. Shea, T. Sorsch, E. Ferry, O. Nalamasu, P. Gammel\",\"doi\":\"10.1109/OMEMS.2002.1031494\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.\",\"PeriodicalId\":285115,\"journal\":{\"name\":\"IEEE/LEOS International Conference on Optical MEMs\",\"volume\":\"32 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-11-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"24\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE/LEOS International Conference on Optical MEMs\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMEMS.2002.1031494\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE/LEOS International Conference on Optical MEMs","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2002.1031494","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 24

摘要

我们描述了一组用于光纤交换的静电驱动表面微机械反射镜。使用纯弯曲角度放大机构，反射镜可以在小于60 V的情况下连续倾斜0到14度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Monolithic MEMS optical switch with amplified out-of-plane angular motion

We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

IEEE/LEOS International Conference on Optical MEMs

自引率

0.00%

发文量