IEEE/LEOS International Conference on Optical MEMs

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IEEE/LEOS International Conference on Optical MEMs - 最新文献

Design for reliability of high voltage, high density interconnects for MOEMS mirror drive electrodes

Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031423 A. Jazairy, J.H. Smith, S. Nasiri, J. Bryzek, A. Flannery, M. Novack, R. Sprague, D. Skurnik

MEMS applications of laser-induced ultra-shallow and ultraheavy boron-doping of silicon above the solid-solubility

Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031477 G. Kerrien, K. Kakushima, T. Sarnet, J. Boulmer, D. Débarre, D. Bouchier, A. Bosseboeuf, T. Bourouina

MEMS reflective type variable optical attenuator using off-axis misalignment

Pub Date : 2002-11-07 DOI: 10.1109/OMEMS.2002.1031440 Che-Heung Kim, N. Park, Yong-Kweon Kim

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