CO/sub 2//H/sub 2/O气体传感器与法布里-珀罗过滤器

IEEE/LEOS International Conference on Optical MEMs Pub Date : 1900-01-01 DOI:10.1109/OMEMS.2002.1031427

M. Noro, K. Suzuki, N. Kishi, H. Hara, T. Watanabe, H. Iwaoka

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引用次数: 0

摘要

为NDIR CO/ sub2 //H/ sub2 /O气体传感器开发了一种波长范围为2.5 ~ 4.5 /spl μ m的可调谐MEMS法布里-珀罗滤波器。法布里-珀罗过滤器配备了NDIR系统，并证实了这种气敏方法的原理。

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CO/sub 2//H/sub 2/O gas sensor with a Fabry-Perot filter

An electrostatically driven tunable MEMS Fabry-Perot filter with wide wavelength range from 2.5 /spl mu/m to 4.5 /spl mu/m has been developed for NDIR CO/sub 2//H/sub 2/O gas sensors. The Fabry-Perot filter is equipped with the NDIR system, and the principle of this gas sensing method has been confirmed.

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IEEE/LEOS International Conference on Optical MEMs

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