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2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Ultrahigh-Q silica-ALN hybrid disk optomechanical modulator 超高q硅- aln混合磁盘光机械调制器
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863401
Donggyu B. Sohn, JunHwan Kim, G. Bahl
{"title":"Ultrahigh-Q silica-ALN hybrid disk optomechanical modulator","authors":"Donggyu B. Sohn, JunHwan Kim, G. Bahl","doi":"10.1109/MEMSYS.2017.7863401","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863401","url":null,"abstract":"We present a hybrid silica (SiO2) and aluminum nitride (AlN) optomechanical disk resonator capable of efficient optical modulation over a wide range of wavelengths. Light from a waveguide is coupled to modes of the high-Q wedge-disk optical resonator while the AlN piezoelectric layer actuates mechanical vibrations in response to an RF stimulus, resulting in light modulation via dispersive and dissipative coupling. We experimentally demonstrate modulation at both 1550 nm and 780 nm wavelengths.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"192 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124267748","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An artificial cilia based micromixer for superior zebrafish sperm activation 一种基于人工纤毛的微型混合器，用于卓越的斑马鱼精子激活
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863641
Chia‐Yuan Chen, Pin Y. Huang, Bivas Panigrahi
{"title":"An artificial cilia based micromixer for superior zebrafish sperm activation","authors":"Chia‐Yuan Chen, Pin Y. Huang, Bivas Panigrahi","doi":"10.1109/MEMSYS.2017.7863641","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863641","url":null,"abstract":"The objective of this study is to propose an artificial cilia based microfluidic device for efficient activation of zebrafish sperm by controlling the hydro-dynamics induced on the zebrafish sperm from the artificial cilia beating. The magnitude of fluid shear which has significant effect on the success of sperm activation was precisely controlled through this proposed device. A superior sperm activation of an absolute value of 70% with an average value of 65 % was achieved with a statistical significance (p-value < 0.05). The present design will advance the practice of the sperm activation significantly through the microfluidic platform.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116493014","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A micro lung chip to assess air pollutant effects 用于评估空气污染影响的微型肺芯片
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863452
S. Noh, Hanseup Kim
{"title":"A micro lung chip to assess air pollutant effects","authors":"S. Noh, Hanseup Kim","doi":"10.1109/MEMSYS.2017.7863452","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863452","url":null,"abstract":"This paper reports the fabrication and initial testing results of a dynamic micro lung chip to first time monitor the air pollutant effects on the lung epithelial cells. On the micro lung chip, it was demonstrated to culture lung epithelial cells (A549) on an inserted porous membrane; to real-time monitor the cell growth over time by measuring Trans-Endothelial-Electrical-Resistance (TEER) values with integrated micro electrodes; and to allow preliminary evaluation of cell responses and tracer permeation to the exposure to an air pollutant. After 24-hour exposure of the lung cells to an air pollutant (Na2SO3), the fabricated chip produced higher permeability by +908%. It also showed a lower TEER by 27% under the exposure to a simulant of 100 μΜ FITC-4k dextrans.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126582691","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Wide bandgap β-Ga2O3 nanomechanical resonators for detection of middle-ultraviolet (MUV) photon radiation 用于中紫外(MUV)光子辐射探测的宽带隙β-Ga2O3纳米机械谐振器
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863377
Xu-Qian Zheng, Jaesung Lee, S. Rafique, Lu Han, C. Zorman, Hongping Zhao, P. Feng
{"title":"Wide bandgap β-Ga2O3 nanomechanical resonators for detection of middle-ultraviolet (MUV) photon radiation","authors":"Xu-Qian Zheng, Jaesung Lee, S. Rafique, Lu Han, C. Zorman, Hongping Zhao, P. Feng","doi":"10.1109/MEMSYS.2017.7863377","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863377","url":null,"abstract":"This digest paper reports on the first demonstration of suspended β-Ga<inf>2</inf>O<inf>3</inf> nanostructures and nanomechanical resonators made from single-crystal β-Ga<inf>2</inf>O<inf>3</inf> nanosheets or nanomembranes grown via low pressure chemical vapor deposition (LPCVD) on 3C-SiC epi-layer on Si substrate. These single-crystal β-Ga<inf>2</inf>O<inf>3</inf> drumhead nanomechanical resonators offer robust multimode resonances at frequencies in the range of ∼10 to 70MHz. The resonators exposed to middle ultraviolet (MUV) radiation exhibit shifts in resonant frequency with a responsivity of −3.8Hz/pW.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116074353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Aerosol particle size spectrometer using a micromachined cascade impactor 使用微机械级联撞击器的气溶胶粒径谱仪
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863345
Hong-Lae Kim, Jangseop Han, Sang-Myun Lee, Hong-Bum Gown, Jungho Hwang, Yong-Jun Kim
{"title":"Aerosol particle size spectrometer using a micromachined cascade impactor","authors":"Hong-Lae Kim, Jangseop Han, Sang-Myun Lee, Hong-Bum Gown, Jungho Hwang, Yong-Jun Kim","doi":"10.1109/MEMSYS.2017.7863345","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863345","url":null,"abstract":"This paper reports a MEMS-based particle size spectrometer using a micromachined cascade impactor. While a MEMS-based particle counter presented in our previous research was developed for measuring the total number concentration of particles within certain size range, the proposed particle size spectrometer is developed for measuring airborne particle size distribution. To the best of our knowledge, MEMS device for measuring aerodynamic particle size distribution is a first attempt. The overall performance of the MEMS-based particle size spectrometer was evaluated by comparing size distribution measurements with commercial instrument.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133326404","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Wireless valving for centrifugal microfluidic platform using field frequency modulation 基于场调频的离心式微流控平台无线阀控
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863671
M. A. Zainal, P. Chee, Mohamed Sultan Mohamed Ali
{"title":"Wireless valving for centrifugal microfluidic platform using field frequency modulation","authors":"M. A. Zainal, P. Chee, Mohamed Sultan Mohamed Ali","doi":"10.1109/MEMSYS.2017.7863671","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863671","url":null,"abstract":"This paper reports a selective wireless active valve mechanism for a centrifugal microfluidic compact disk operated using field frequency modulation techniques. The reported technique offers a further advancement in the centrifugal microfluidic field by enabling full control on the liquid flow. The localized and selective RF wireless heating of paraffin wax active valves was utilized to control the liquid flow in centrifugal CD. Vacuum/compression valve (VCV) and mixing applications are also demonstrated in this work. Experimental characterization shows valve operational is within ∼100 s of activation using a radio frequency power of 1 W, at a speed of 200 rpm. The reported technique offers a further advancement in the centrifugal microfluidic area by enabling full control on liquid flow.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133333810","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Dynamic manipulation and patterning of breast cancer cells in biosolution 生物溶液中乳腺癌细胞的动态操作和模式
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863470
H. Jia, Hao Tang, Anika Rede, Xia Liu, Huiping Liu, P. Feng
{"title":"Dynamic manipulation and patterning of breast cancer cells in biosolution","authors":"H. Jia, Hao Tang, Anika Rede, Xia Liu, Huiping Liu, P. Feng","doi":"10.1109/MEMSYS.2017.7863470","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863470","url":null,"abstract":"This paper reports the first experimental exploration of non-invasive and fast manipulation of breast cancer cells by harnessing multimode micromechanical resonators operating in biosolution. We demonstrate, for the first time, that groups of breast cancer cells are spatially manipulated into controlled microscale patterns, facilitated by the spatially abundant and diverse multimode resonances of vibrating thin micro-diaphragms. We further show that these cell patterns can be dynamically switched within 30s via programmed excitation frequencies, exhibiting a cell manipulation speed at ∼4μm/s. The results demonstrate a versatile platform for cell manipulation and patterning at microscale, which may facilitate breast cancer related studies at cellular level.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130302683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An inkjet printed piezoresistive back-to-back graphene tactile sensor for endosurgical palpation applications 一种用于内窥镜触诊的喷墨印刷压阻式背靠背石墨烯触觉传感器
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863482
Yu-Min Fu, Meng-Chuin Chou, Yu-Ting Cheng, E. Secor, M. Hersam
{"title":"An inkjet printed piezoresistive back-to-back graphene tactile sensor for endosurgical palpation applications","authors":"Yu-Min Fu, Meng-Chuin Chou, Yu-Ting Cheng, E. Secor, M. Hersam","doi":"10.1109/MEMSYS.2017.7863482","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863482","url":null,"abstract":"The paper presents a tactile sensor design mimicking human finger touch to differentiate tissue hardness for endosurgical palpation applications. The sensor comprises two inkjet-printed piezoresistive graphene-based sensing elements linked back-to-back for force and displacement detection, respectively. Experimental results indicate the sensor registers 2.1 and 5.3 mN force feedback from the fat and muscle tissues of pig, respectively, when pressed to the tissues with the same 100 μm displacement. This difference of ∼2.5 times in force feedback provides a compelling method by which doctors can more intuitively perceive hardness and tissue differences during endosurgery in comparison with the prior arts.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"301 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122813130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Engineering miniaturized hair cell sensors for auditory system 用于听觉系统的微型化毛细胞传感器
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863624
M. Asadnia, A. Kottapalli, M. Warkiani, J. Miao, M. Triantafyllou
{"title":"Engineering miniaturized hair cell sensors for auditory system","authors":"M. Asadnia, A. Kottapalli, M. Warkiani, J. Miao, M. Triantafyllou","doi":"10.1109/MEMSYS.2017.7863624","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863624","url":null,"abstract":"Mechanosensory haircells are well-evolved biological sensors found in nature. In this paper, we present a novel artificial NEMS stereovilli sensor developed through novel fabrication techniques. The NEMS stereovilli sensor fabrication combines soft-polymer material synthesis methods and nanofiber generation techniques with conventional microfabrication methods to form novel flow sensors. The sensor fabrication mainly consists of three major steps which are 1) fabrication of artificial stereovilli of varying aspect ratios, 2) formation of nanofiber tip-links through electrospinning of PVDF material and 3) development of biomimetic HA-MA hydrogel cupula. These artificial sensors closely mimic stereovilli and achieve ultrahigh sensitivities through a biomimetic design. The sensors achieve a sensitivity and threshold detection limit of 300 mV/(m/s) and 8 μm/s, respectively.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129512015","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Silicon nanowire arrays thermoelectric power harvester 硅纳米线阵列热电能量采集器
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863511
A. A. Tahrim, Anita Ahmad, Mohamed Sultan Mohamed Ali
{"title":"Silicon nanowire arrays thermoelectric power harvester","authors":"A. A. Tahrim, Anita Ahmad, Mohamed Sultan Mohamed Ali","doi":"10.1109/MEMSYS.2017.7863511","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863511","url":null,"abstract":"This study aims to investigate the performance of Silicon Nanowire Arrays (SiNWAs) and bulk Si material as thermoelectric power harvesters. SiNWAs were developed using a two-step metal-assisted chemical etching technique. The fabricated thermoelectric devices of 1 × 1 cm p- and n-type SiNWAs each have a diameter of 70–100 nm, and an approximate nanowire length of 6 μm. Bulk Si devices were also tested as a benchmark for the SiNWAs thermoelectric devices. The heat flow across the SiNWAs devices exhibits a higher temperature difference, ΔT, between hot and cold junctions, compared to bulk silicon devices. This reveals that the heat capacity, C, of silicon is reduced significantly by the presence of nanowires. Consequently, a reduction in C also reduces the thermal conductivity of silicon, which is favourable for a good thermoelectric material. Compared to bulk silicon, SiNWAs thermoelectric devices also demonstrate higher Seebeck voltage, Voc, and Seebeck coefficient, S. The voltage rises as the ΔT between two junctions increases. An increase in Voc and S in the SiNWAs thermoelectric device aids to improve the figure-of-merit and the efficiency of the thermoelectric device. Experimental characterization of all fabricated thermoelectric devices suggest that the p-SiNWAs device possesses the highest ΔT of 17°C at 40 sec; Voc = ∼35 mV and S = ∼8 mV/K.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128918863","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
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