Wide bandgap β-Ga2O3 nanomechanical resonators for detection of middle-ultraviolet (MUV) photon radiation

Abstract

This digest paper reports on the first demonstration of suspended β-Ga2O3 nanostructures and nanomechanical resonators made from single-crystal β-Ga2O3 nanosheets or nanomembranes grown via low pressure chemical vapor deposition (LPCVD) on 3C-SiC epi-layer on Si substrate. These single-crystal β-Ga2O3 drumhead nanomechanical resonators offer robust multimode resonances at frequencies in the range of ∼10 to 70MHz. The resonators exposed to middle ultraviolet (MUV) radiation exhibit shifts in resonant frequency with a responsivity of −3.8Hz/pW.