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2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Artificial insect wings with biomimetic morphology and stiffness 具有仿生形态和刚度的人工昆虫翅膀
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863393
Zhiwei Liu, Xiaojun Yan, Mingjing Qi, Yangsheng Zhu, Xiaoyong Zhang, Liwei Lin
{"title":"Artificial insect wings with biomimetic morphology and stiffness","authors":"Zhiwei Liu, Xiaojun Yan, Mingjing Qi, Yangsheng Zhu, Xiaoyong Zhang, Liwei Lin","doi":"10.1109/MEMSYS.2017.7863393","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863393","url":null,"abstract":"Wing morphology and stiffness are crucial in lift force generation during flapping flight. In this investigation, we present both fabrication and characterization methodologies for artificial insect wings with biomimetic morphology and stiffness using laser cutting and bonding of multilayer materials. Two distinctive achievements have been accomplished: (1) simple and versatile fabrication for the wing shape and venation pattern; and (2) good matches of mass, fundamental natural frequency and stiffness to the real biological insect wings. As such, these works provide a new class of biomimetic artificial insect wings in the field of Flapping-wing Micro Aerial Vehicles (FMAVs).","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"148 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134288086","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
First thrust from a microfabricated atmospheric ion engine 微型大气离子发动机的第一次推力
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863412
Daniel S. Drew, D. Contreras, K. Pister
{"title":"First thrust from a microfabricated atmospheric ion engine","authors":"Daniel S. Drew, D. Contreras, K. Pister","doi":"10.1109/MEMSYS.2017.7863412","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863412","url":null,"abstract":"The bulk of current research in the realm of pico air vehicles has focused on biologically inspired propulsion mechanisms. In this work we investigate the use of electrohydrodynamic thrust produced by a microfabricated corona discharge device as a mechanism to create flying microrobots with no moving parts. Electrodes of various geometries are fabricated from a silicon-on-insulator wafer with a two mask process. Electrical characterization is performed to analyze the effect of inter-electrode gap and emitter electrode width on corona discharge and compare findings to simulation. Outlet air velocity and thrust are directly measured to analyze the effects of collector electrode geometry on performance. A roughly 100 cubic millimeter, 2.5mg thruster is assembled with a thrust to weight ratio exceeding 20.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132604181","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
2D and 3D functional nanostructures of genetically engineered spider silk using focused ION beam 利用聚焦离子束研究基因工程蜘蛛丝的二维和三维功能纳米结构
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863389
Jianjuan Jiang, Shaoqing Zhang, N. Qin, Zhitao Zhou, Xiaoxia Xia, H. Tao, Keyin Liu
{"title":"2D and 3D functional nanostructures of genetically engineered spider silk using focused ION beam","authors":"Jianjuan Jiang, Shaoqing Zhang, N. Qin, Zhitao Zhou, Xiaoxia Xia, H. Tao, Keyin Liu","doi":"10.1109/MEMSYS.2017.7863389","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863389","url":null,"abstract":"We report a new bionanomanufacturing technique for both 2d and 3d protein nano structuring using focus ion beam (FIB) as the fabrication tool and genetically engineered recombinant spider silk as the resist material. Recombinant spider silk is mechanically strong, biocompatible, biodegradable and biofunctionalizable. Precise control of genetically engineered spider silk at the nanoscale offers new route to protein-based functional nanostructures.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127622528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
High sensitivity and high S/N microphone achieved by PZT film with central-circle electrode design 采用中心圆电极设计的PZT薄膜实现了高灵敏度和高信噪比传声器
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863628
J.-L. Huang, Sung-Cheng Lo, J. Wang, C.-E. Lu, Shih-Hsiung Tseng, Min-Chian Wu, W. Fang
{"title":"High sensitivity and high S/N microphone achieved by PZT film with central-circle electrode design","authors":"J.-L. Huang, Sung-Cheng Lo, J. Wang, C.-E. Lu, Shih-Hsiung Tseng, Min-Chian Wu, W. Fang","doi":"10.1109/MEMSYS.2017.7863628","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863628","url":null,"abstract":"This study based on piezo-electric sensing principle to develop a high S/N ratio MEMS microphone. The patterned PZT and electrodes designed implemented above the clamped diaphragm to generate high stress concentration on PZT and Si bimorph diaphragm. The proposed central-circle electrode design can induce more charge than the edge-surrounded electrode design (served as the reference design). The proposed design also provides a smooth stress distribution across electrode to tolerate more process variation such as offset from double-side alignment and boundary change by DRIE undercut. The measured results demonstrate the S/N is about 64dB (reference design: 53dB) for the piezo-electric microphone.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114317718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection 面向面内多轴磁场检测的压电/磁致伸缩MEMS谐振传感器阵列
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863352
Hoe-Joon Kim, Sibo Wang, Changting Xu, D. Laughlin, Jingxi Zhu, G. Piazza
{"title":"Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection","authors":"Hoe-Joon Kim, Sibo Wang, Changting Xu, D. Laughlin, Jingxi Zhu, G. Piazza","doi":"10.1109/MEMSYS.2017.7863352","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863352","url":null,"abstract":"This paper reports the demonstration of an array of piezoelectric/magnetostrictive micro electromechanical system (MEMS) magnetic resonant sensors (PM-MRS) for multi-axis magnetic field (H-field) detection. An array of 43 MHz aluminum nitride (AlN) piezoelectric resonators vibrating along different in-plane directions (θ) but coated with a magnetostrictive layer (Fe65.6Co9.4B25) with the same easy axis (EZ) exhibit unique mechanical/ electrical responses as a function of the applied H-field and its direction, enabling a high resolution multi-axis H-field detection. The sensor design yields resonators with a high quality factor (Q ∼ 1500) and electromechanical coupling coefficient (kt2 ∼ 2%) — the highest value ever reported for an AlN PM-MRS. This sensor system paves the way for low power magnetometers that enables single-chip multi-axis H-field detection.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115020041","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
A pH-sensitive hydrogel-based smart switch for GI-tract payload release 一种基于ph敏感水凝胶的gi通道有效载荷释放智能开关
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863455
Hongjie Jiang, Wuyang Yu, Jiawei Zhou, B. Ziaie
{"title":"A pH-sensitive hydrogel-based smart switch for GI-tract payload release","authors":"Hongjie Jiang, Wuyang Yu, Jiawei Zhou, B. Ziaie","doi":"10.1109/MEMSYS.2017.7863455","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863455","url":null,"abstract":"In this paper, we demonstrate a low-cost and tunable pH-triggered smart switch which is based on the deflection of a conductive elastic membrane induced by the swelling of a pH-responsive hydrogel. The described switch comprises of a porous plate, a gel chamber, a deflectable conductive membrane, and an electrical isolation cell. The switching action is initiated through a sudden pH change (e.g., transition from acidic stomach to basic small intestine) which in turn results in diffusion/time controlled hydrogel swelling, making it suitable for ingestible capsules targeted for pH-controlled localized drug release in the gastrointestinal (GI) tract. A typical prototype (9 mm in diameter and 3.2 mm in thickness) responds to pH changes from 2 to 7 (transition from stomach to small intestine) with a response time of one hour.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"104 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114992222","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fully-differential single resonator FM/whole angle gyroscope using CW/CCW mode separator 采用CW/CCW模式分离器的全差分单腔调频/全角陀螺仪
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863610
T. Tsukamoto, Shuji Tanaka
{"title":"Fully-differential single resonator FM/whole angle gyroscope using CW/CCW mode separator","authors":"T. Tsukamoto, Shuji Tanaka","doi":"10.1109/MEMSYS.2017.7863610","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863610","url":null,"abstract":"This paper reports a fully-differential frequency modulated (FM) gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A CW/CCW mode separator was implemented with a mode-matched ring resonator, and FM gyroscope operation with excellent linearity between applied angular rate and frequency difference was demonstrated. The scale factor was as high as 0.724, and measured almost zero temperature coefficient including ±26 ppm uncertainty without any compensation. Whole angle mode operation was also demonstrated using the same system and excellent linear relationship between applied rotation angle and measured angle was observed.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121963872","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 25
A saliva-powered paper biobattery for disposable biodevices 用于一次性生物设备的唾液驱动的纸质生物电池
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863355
M. Mohammadifar, K. Zhang, S. Choi
{"title":"A saliva-powered paper biobattery for disposable biodevices","authors":"M. Mohammadifar, K. Zhang, S. Choi","doi":"10.1109/MEMSYS.2017.7863355","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863355","url":null,"abstract":"We created a paper-based microbial fuel cell (MFC) which generated power from human saliva. Upon adding one drop of saliva, the dried exoelectrogens, pre-inoculated in a conductive paper reservoir of the MFC, activated their respiration by oxidizing organic substrates (e.g. glucose) in the saliva and transferring electrons to the anode. The device generated the maximum current density of 10.5μΑ/cm2 and power density of 1.1μW/cm2 with the glucose concentration of 19.4mg/dl in the saliva, which is enough to be directly used as an energy harvester in portable point-of-care (POC) devices. The biobattery fuses the art of paper microfluidics and the technology of biofuel cells and has the potential to shift the paradigm for disposable POC diagnostic tools by providing a practical power supply readily accessible everywhere. Furthermore, its electron harvesting capability as a quantitative indicator for the presence of organic substances (e.g. glucose) in saliva can potentially be utilized as a self-powered biosensor for monitoring the matter levels.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123993037","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy 中红外吸收光谱分析烃类气体的光子微系统
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863593
N. P. Ayerden, J. Mandon, M. Ghaderi, F. Harren, R. Wolffenbuttel
{"title":"A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy","authors":"N. P. Ayerden, J. Mandon, M. Ghaderi, F. Harren, R. Wolffenbuttel","doi":"10.1109/MEMSYS.2017.7863593","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863593","url":null,"abstract":"This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125750638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A 0.5 mm2 7-mhz capacitive bulk acoustic wave gyroscope in (100) silicon with large dynamic range 0.5 mm2 7-mhz电容体声波陀螺仪在(100)硅具有大动态范围
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863330
A. Rahafrooz, D. Serrano, Duane Younkin, Shin Nagpal, I. Jafri, F. Ayazi
{"title":"A 0.5 mm2 7-mhz capacitive bulk acoustic wave gyroscope in (100) silicon with large dynamic range","authors":"A. Rahafrooz, D. Serrano, Duane Younkin, Shin Nagpal, I. Jafri, F. Ayazi","doi":"10.1109/MEMSYS.2017.7863330","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863330","url":null,"abstract":"This paper presents, what is to the authors' knowledge, the smallest MEMS gyroscope reported to date. With a footprint of only 0.5 mm2, the device consists of a high frequency bulk acoustic wave (BAW) disk resonator (408 um diameter) with robust performance to environmental disturbances, and a large dynamic range of more than 6,000 °/s. The device utilizes nano-transduction capacitive gaps provided by the HARPS S process, which enable an extremely small footprint without sacrificing other specifications, such as sensitivity and noise. Moreover, due to the inherently stiff structure, the presented BAW gyro has a significantly reduced sensitivity to shock and vibration [1]. The device exhibits a measured angle-random walk (ARW) of 1 °/√h and a bias instability of 15 °/h, which are dominated by the thermal and flicker noise of the interface electronics. The gyro element itself is capable of reaching 5–10X lower noise levels.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125850679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
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