{"title":"Fully-differential single resonator FM/whole angle gyroscope using CW/CCW mode separator","authors":"T. Tsukamoto, Shuji Tanaka","doi":"10.1109/MEMSYS.2017.7863610","DOIUrl":null,"url":null,"abstract":"This paper reports a fully-differential frequency modulated (FM) gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A CW/CCW mode separator was implemented with a mode-matched ring resonator, and FM gyroscope operation with excellent linearity between applied angular rate and frequency difference was demonstrated. The scale factor was as high as 0.724, and measured almost zero temperature coefficient including ±26 ppm uncertainty without any compensation. Whole angle mode operation was also demonstrated using the same system and excellent linear relationship between applied rotation angle and measured angle was observed.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"25","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2017.7863610","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 25
Abstract
This paper reports a fully-differential frequency modulated (FM) gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A CW/CCW mode separator was implemented with a mode-matched ring resonator, and FM gyroscope operation with excellent linearity between applied angular rate and frequency difference was demonstrated. The scale factor was as high as 0.724, and measured almost zero temperature coefficient including ±26 ppm uncertainty without any compensation. Whole angle mode operation was also demonstrated using the same system and excellent linear relationship between applied rotation angle and measured angle was observed.