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2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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Code-division multiplexed resistive pulse sensor networks for spatio-temporal detection of particles in microfluidic devices 用于微流控装置中粒子时空检测的码分多路电阻脉冲传感器网络
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2018-08-10 DOI: 10.1109/MEMSYS.2017.7863416
Ningquan Wang, Ruxiu Liu, R. Khodambashi, Norh Asmare, A. F. Sarioglu
{"title":"Code-division multiplexed resistive pulse sensor networks for spatio-temporal detection of particles in microfluidic devices","authors":"Ningquan Wang, Ruxiu Liu, R. Khodambashi, Norh Asmare, A. F. Sarioglu","doi":"10.1109/MEMSYS.2017.7863416","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863416","url":null,"abstract":"Spatial separation of suspended particles based on contrast in their physical or chemical properties forms the basis of various biological assays performed on lab-on-a-chip devices. To electronically acquire this information, we have recently introduced a microfluidic sensing platform, called Microfluidic CODES, which combines the resistive pulse sensing with the code division multiple access in multiplexing a network of integrated electrical sensors. In this paper, we enhance the multiplexing capacity of the Microfluidic CODES by employing sensors that generate non-orthogonal code waveforms and a new decoding algorithm that combines machine learning techniques with minimum mean-squared error estimation. As a proof of principle, we fabricated a microfluidic device with a network of 10 code-multiplexed sensors and characterized it using cells suspended in phosphate buffer saline solution.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-08-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129374241","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Transparent piezoelectric transducers for large area ultrasonic actuators 用于大面积超声执行器的透明压电换能器
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-07-01 DOI: 10.1109/MEMSYS.2017.7863527
D. Sette, S. Girod, Nicolas Godard, Noureddine Adjeroud, Jean-Baptiste Chemin, R. Leturcq, E. Defay
{"title":"Transparent piezoelectric transducers for large area ultrasonic actuators","authors":"D. Sette, S. Girod, Nicolas Godard, Noureddine Adjeroud, Jean-Baptiste Chemin, R. Leturcq, E. Defay","doi":"10.1109/MEMSYS.2017.7863527","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863527","url":null,"abstract":"This work focuses on the fabrication of transparent piezoelectric transducers on glass substrates for ultrasonic actuation. Transparent Lead Titanate Zirconate (PZT) thin films are grown on glass following a sol-gel route and InterDigital Electrodes (IDE) patterned by photolithography. The electrodes design aims to optimize the volume of active piezoelectric material together with the transparency of the actuator stack. The actuator is used in d33 mode offering high transduction capabilities, while the IDE design allows for increasing the area of the actuator in the cm2 range. The results demonstrate that fully transparent actuators with ultrasonic range resonant frequency (∼100kHz) can be fabricated on glass substrates. Direct applications of these actuators are haptic devices for tactile sensation of surface roughness.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123976524","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Transparent ZNO/glass surface acoustic wave devices with aluminum doped ZNO electrode 铝掺杂ZNO电极的透明ZNO/玻璃表面声波器件
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-28 DOI: 10.1109/MEMSYS.2017.7863502
Jian Zhou, Xuezhong Wu, D. Xiao, Hao Jin, S. Dong, Y. Fu, Jikui Luo
{"title":"Transparent ZNO/glass surface acoustic wave devices with aluminum doped ZNO electrode","authors":"Jian Zhou, Xuezhong Wu, D. Xiao, Hao Jin, S. Dong, Y. Fu, Jikui Luo","doi":"10.1109/MEMSYS.2017.7863502","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863502","url":null,"abstract":"This paper reports the fabrication of transparent SAW resonators using AZO as the transparent electrodes. Transparent SAW resonators exhibited two types of wave modes: Rayleigh and Sezawa waves, and signal amplitudes up to 25 dB were obtained with the transparency above 80%. The series resistance effect of the AZO film electrode on the performance of transparent SAW devices have been systematically investigated and results show that the series resistance should be lower than 10 Ω/sq. Temperature sensing showed the transparent SAW device has a temperature coefficient of frequency of ∼45 ppm/K. The transparent devices have also demonstrated their ability to induce a strong acoustic streaming with a streaming velocity up to 2.27 cm/s. This research opened a door for further exploration of the SAW devices in transparent electronics such as transparent microfluidics and sensors.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121050361","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Broadband rotational energy harvesting using bistable mechanism and frequency up-conversion 采用双稳机制和频率上转换的宽带旋转能量收集
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-28 DOI: 10.1109/MEMSYS.2017.7863542
Hailing Fu, E. Yeatman
{"title":"Broadband rotational energy harvesting using bistable mechanism and frequency up-conversion","authors":"Hailing Fu, E. Yeatman","doi":"10.1109/MEMSYS.2017.7863542","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863542","url":null,"abstract":"This paper presents the electromechanical dynamics of a broadband rotational piezoelectric energy harvester using bi-stability and frequency up-conversion. Bi-stability is achieved by the repulsive force between the tip magnet on a piezoelectric cantilever and a fixed magnet above the tip magnet. Frequency up-conversion is realized by the plucking force generated between the tip magnet and a rotating driving magnet below the tip magnet. A numerical model based on the distributed-parameter model was built in Matlab/Simulink. The power extraction capability of different modes of oscillation was analyzed theoretically. The keys to maintain harvester operation in high energy orbit (inter-well vibration) were investigated. The rotational piezoelectric energy harvester was implemented experimentally, showing a significant improvement in output power over a wide bandwidth compared to a harvester without bi-stability.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121818452","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A novel sub-picoliter monodispersed droplet generation device based on liquid dielectrophoresis 一种新型的基于液体介质电泳的亚皮升单分散液滴生成装置
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863346
Krishnadas Narayanan Nampoothiri, V. Srinivasan, M. Bobji, P. Sen
{"title":"A novel sub-picoliter monodispersed droplet generation device based on liquid dielectrophoresis","authors":"Krishnadas Narayanan Nampoothiri, V. Srinivasan, M. Bobji, P. Sen","doi":"10.1109/MEMSYS.2017.7863346","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863346","url":null,"abstract":"This paper reports a new phenomenon for jetting of droplets and demonstrates its use for generation and transfer of monodispersed droplets in sub-picoliter volumes. This technique obtains jetting at lower voltages (combination of 470Vac and −250Vdc), even for high surface tension liquids. The reported technique is fast in achieving a dense transfer of micro-droplets (14,000/mm2) in less than 10s. Compared to other microfluidic techniques, the new technique uses simpler fabrication and does not require bulky components (e.g. pumps). The technique is extremely easy and economical to scale making it suitable for portable applications.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114608072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Stretchable electronic device with repeat self-healing ability of metal wire 具有金属线重复自愈能力的可拉伸电子装置
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863391
T. Koshi, E. Iwase
{"title":"Stretchable electronic device with repeat self-healing ability of metal wire","authors":"T. Koshi, E. Iwase","doi":"10.1109/MEMSYS.2017.7863391","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863391","url":null,"abstract":"This paper reports a stretchable electronic device with repeat self-healing ability of a wire crack caused by stretching deformation. The crack of metal wire is healed with assembled metal nanoparticles by dielectrophoresis, when a voltage is applied to the cracked wire covered with the nanoparticle solution. By designing a circuit, we controlled the applied voltage and current for the self-healing to be avoid excessive Joule heating in the assembled nanoparticles. This consideration enables us to heal a crack of tens of micrometers in width and to practically achieve a stretchable electronic device.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130657762","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
An SH0 Lithium Niobate dispersive delay line for chirp compression-enabled low power radios 用于啁啾压缩的低功率无线电的SH0铌酸锂色散延迟线
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863364
T. Manzaneque, Ruochen Lu, Yansong Yang, S. Gong
{"title":"An SH0 Lithium Niobate dispersive delay line for chirp compression-enabled low power radios","authors":"T. Manzaneque, Ruochen Lu, Yansong Yang, S. Gong","doi":"10.1109/MEMSYS.2017.7863364","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863364","url":null,"abstract":"This paper presents the first demonstration of a shear-horizontal mode Lithium Niobate dispersive delay line, featuring a center frequency of 250 MHz, a delay-bandwidth (TB) product of 100, an electromechanical coupling (k2) in excess of 35%, and a low insertion loss of 10 dB. The high compression is attained via a large bandwidth of 125 MHz, centered at 250 MHz, and an extensive delay of 0.8 μS. The device shown herein has greatly outperformed the state of the art, namely surface acoustic wave delay lines which typically have an insertion loss over 25 dB for a comparable compression ratio. The attained performance can be attributed to the excellent piezoelectric coupling of lamb waves in a suspended Lithium Niobate X-cut thin film. A voltage gain of 3 has been demonstrated for instantaneously amplifying chirp-coded signals, a feature that can be harnessed to enhance signal to noise ratio in low power wake-up radios for Internet of Things (IoT) applications.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114350521","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Ultra high aspect-ratio and thick deep silicon etching (UDRIE) 超高宽高比和厚深硅蚀刻(UDRIE)
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863504
Y. Tang, A. Sandoughsaz, K. Najafi
{"title":"Ultra high aspect-ratio and thick deep silicon etching (UDRIE)","authors":"Y. Tang, A. Sandoughsaz, K. Najafi","doi":"10.1109/MEMSYS.2017.7863504","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863504","url":null,"abstract":"We report an advanced deep-reactive-ion-etching (DRIE) process developed specifically for etching ultra-deep structures in thick (>500μΉ) silicon wafers with high aspect-ratio and straight sidewalls across a wide range of feature sizes and patterns. This is achieved by ramping critical process parameters throughout the etching duration. 600–800μm deep trenches with widths as small as 20–40μm are etched in 1mm-thick silicon wafer, and are expected to be etched through a 1mm wafer with thicker and/or higher selectivity masking materials. We have produced holes >500μm deep with hole diameters as small as 25μm, and potentially with 10–15μm diameter holes. This ultra-deep silicon etching process will benefit both IC integration and emerging MEMS applications at micrometer and millimeter scale that demand high-resolution deep DRIE.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121568193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Stress-free stretchable electronic device using folding deformation 利用折叠变形的无应力可拉伸电子装置
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863383
Y. Iwata, E. Iwase
{"title":"Stress-free stretchable electronic device using folding deformation","authors":"Y. Iwata, E. Iwase","doi":"10.1109/MEMSYS.2017.7863383","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863383","url":null,"abstract":"We developed a two-dimensionally (2-D) stretchable electronic device with stress-free region by applying origami folding. The key idea is to achieve “a stretching deformation of whole device” by “a local bending deformation”. Because our device has stress-free region, we can use a rigid chip (such as LED chips and MEMS sensors) and a metal wire without mechanical fracture or metal fatigue. In this paper, first, we proposed a 2-D stretchable structure by developing “miura-ori” folding. Next, we fabricated a 2-D stretchable electronic device, and confirmed that wire fatigue or cracks are not generated by repeated deformation. Finally, we demonstrated 2-D stretchability and bendability using the device with inorganic LED chips.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127884150","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A biologically-inspired electro-chemical reference electrode 一种生物启发的电化学参比电极
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2017-02-23 DOI: 10.1109/MEMSYS.2017.7863414
Hao Ren, César I. Torres, Zhaofeng Zhang, J. Chae
{"title":"A biologically-inspired electro-chemical reference electrode","authors":"Hao Ren, César I. Torres, Zhaofeng Zhang, J. Chae","doi":"10.1109/MEMSYS.2017.7863414","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863414","url":null,"abstract":"The paper report a unique biologically inspired electro-chemical reference electrode based on regulating the breathing of bacteria. Some species of bacteria, named exoelectrogen, have the capability of extracellular electron transfer, which is the transfer of electrons to a solid electron acceptor outside their membrane. We find that it sets the solid electron acceptor at a stable electrochemical potential, which can be used as reference electrode. We pattern thin film platinum as electron acceptor and grow exoelectrogenic biofilm on it. By performing colorimetric analysis of the individual ions in the anolyte solution, we confirmed that the potential of the reference electrode, ∼ −0.5 V versus the Ag/AgCl in 3M NaCl, arises from the electrochemical potential of the reaction. The biologically-inspired reference electrode demonstrates a stability of ±4.2 mV/day for two days. It is integrated in a MEMS microbial fuel cell (MFC) to characterize its electrochemical characteristics.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"120 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-02-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115557530","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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