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2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)最新文献

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A low-cost flexible electrochemical accelerometer using graphene-integrated microchannel 采用石墨烯集成微通道的低成本柔性电化学加速度计
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863648
Yangxi Zhang, Ze Li, Kaisi Xu, Chencheng Gao, Y. Hao, Fanrui Meng, Yiming Gui
{"title":"A low-cost flexible electrochemical accelerometer using graphene-integrated microchannel","authors":"Yangxi Zhang, Ze Li, Kaisi Xu, Chencheng Gao, Y. Hao, Fanrui Meng, Yiming Gui","doi":"10.1109/MEMSYS.2017.7863648","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863648","url":null,"abstract":"This paper reports a novel electrochemical accelerometer for applications of wearable systems and smart skins. An original flexible accelerometer based on graphene electrodes and a PDMS microchannel on polyimide flexible print circuit (FPC) has been achieved by low-cost fabrication process. Instead of expensive platinum electrodes, a graphene layer was transferred to FPC to function as chemical inertness sensitive electrodes. To simplify process steps and reduce fabrication cost, the microchannel on FPC was obtained without lithography process by using screen printing PDMS lines. In shock exciter experiment, the accelerometer was tested under 20g shock acceleration, providing 39.5mv/g (0.40μA/g) sensitivity. This microchannel electrochemical device can not only be used for acceleration sensing, but also provide more possibilities in flexible multi-sensor system, for example pressure, temperature and tactile sensing applications.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"31 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120925993","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
An improved-sensitivity resonant accelerometer with fishbone-shaped resonators of higher vibration modes 一种具有高振型鱼骨谐振器的改进灵敏度谐振加速度计
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863605
Hong Ding, Jin Xie
{"title":"An improved-sensitivity resonant accelerometer with fishbone-shaped resonators of higher vibration modes","authors":"Hong Ding, Jin Xie","doi":"10.1109/MEMSYS.2017.7863605","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863605","url":null,"abstract":"This paper reports an improved-sensitivity resonant accelerometer with fishbone-shaped resonators of higher vibration modes. Different from conventional resonant accelerometer integrating with low-order vibrating resonators, our prototype utilizes higher-mode fishbone-shaped resonators based on the principle that higher vibration modes have a higher frequency sensitivity. The proposed fishbone-shaped resonator can realize the mode selection and frequency-tuning function according to the configuration of sensing and driving electrodes. So this resonant accelerometer has sensitivity improvable and adjustable function compared to state of the art. Experimental results demonstrate the average differential sensitivities spanning from 12.44Hz/g to 61.00Hz/g (Mode 1: 12.44Hz/g; Mode 2: 36.94Hz/g; Mode 3: 61.00Hz/g) and the average resonant frequencies are 116.47KHz at mode 1, 299.87KHz at mode 2 and 548.35KHz at mode 3. Moreover, the tilt experiment verifies that this device has potential usage in tilt measurement.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114535266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Extracted natural silk fibroin as a dual-tone protein resist for eco-friendly electron beam lithography 提取天然丝素蛋白作为环保电子束光刻的双色蛋白抗蚀剂
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863510
Shaoqing Zhang, N. Qin, T. Tao
{"title":"Extracted natural silk fibroin as a dual-tone protein resist for eco-friendly electron beam lithography","authors":"Shaoqing Zhang, N. Qin, T. Tao","doi":"10.1109/MEMSYS.2017.7863510","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863510","url":null,"abstract":"We report on the ability to reshape extracted natural silk fibroin with energetic electrons and on the application of advanced spectroscopic imaging for nanoscale structural analysis. Silk fibroin films under electron irradiation at various exposure dosages have been investigated using infrared scattering near-field optical microscopy (s-SNOM) for the first time to decipher the electron-regulated structural transitions of silk fibroin, which determines its solubility in water. Our work provides important guidelines for utilizing silk fibroin as a dual-tone protein resist for all-water-based eco-friendly electron beam lithography (EBL), with no hazardous chemicals used or generated in this process.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128093681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Composite materials with controllable macromechanical properties based on MEMS-assisted structural manipulation of low-dimensional subcomponents 基于mems辅助低维子部件结构操纵的宏观力学性能可控复合材料
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863506
Minsoo P. Kim, Jooncheol Kim, M. Allen
{"title":"Composite materials with controllable macromechanical properties based on MEMS-assisted structural manipulation of low-dimensional subcomponents","authors":"Minsoo P. Kim, Jooncheol Kim, M. Allen","doi":"10.1109/MEMSYS.2017.7863506","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863506","url":null,"abstract":"We report an approach to achieve composite materials with wide-ranging macroscale mechanical properties through the three-dimensional structural manipulation of low-dimensional subcomponents. Such composites could be useful in MEMS actuators based on highly compliant mechanisms, or in mechanical metamaterials with highly anisotropic mechanical properties (e.g., negative Poisson ratio). The presented composites possess a multilayer structure comprising alternating high modulus and low modulus subcomponent materials (i.e., permalloy (Ni80Fe20) and polydimethylsiloxane (PDMS) elastomer), within which lithographically-patterned pores are present. By controlling the pore geometries/orientations and the individual metal/elastomer layer thicknesses in the microscale, in-plane and out-of-plane mechanical properties (i.e., tensile and bending moduli) are substantially tailored.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128169508","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Microfluidic chip having multi fluorescence microsensors for spatiotemporal sensing of culture environment 具有多荧光微传感器的微流控芯片，用于培养环境的时空传感
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863422
H. Maruyama, Keisuke Takagi, T. Masuda, O. Suzuki, F. Arai
{"title":"Microfluidic chip having multi fluorescence microsensors for spatiotemporal sensing of culture environment","authors":"H. Maruyama, Keisuke Takagi, T. Masuda, O. Suzuki, F. Arai","doi":"10.1109/MEMSYS.2017.7863422","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863422","url":null,"abstract":"We proposed on-chip spatiotemporal sensing for monitoring interactions between cells and environment using fluorescence multi-microsensors. The microfluidic chip integrating fluorescence multi-microsensor is used to construct the harmonious environment like in vivo to reconstruct high-quality organs ex vivo. Fluorescence sensing is suitable for spatiotemporal sensing with high spatial resolution because wiring to many microsensors limits the number of sensors. First, we classify optical sensing method. Fluorescence and polarization sensing are suitable for spatiotemporal sensing such as physiological and mechanical parameters in culture environment. As a demonstration of spatiotemporal sensing of culture environment, Spatiotemporal variation of pH, Ca2+ was measured and during transformation of octacalcium phosphate (OCP) to hydroxyl apatite (HA) inside the microfluidic chip using fluorescence multi-microsensors.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122012313","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Light controlled integratable single cell micro rotary vane pump 光控可集成单细胞微旋转叶片泵
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863486
Yaxiaer Yalikun, N. Tanaka, Aishan Yusufu, Y. Tanaka
{"title":"Light controlled integratable single cell micro rotary vane pump","authors":"Yaxiaer Yalikun, N. Tanaka, Aishan Yusufu, Y. Tanaka","doi":"10.1109/MEMSYS.2017.7863486","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863486","url":null,"abstract":"This paper reports a light controllable single cell driven micro rotary vane pump for transport fluid in small space based on a new type of bio-actuator: Euglena. Different from other types of bio-actuators, Euglena has features of both animals and plants, which will allow, for the first time, bio-actuator functioned in fresh and salt water and take nourishment through photosynthesis. To demonstrate the potential of Euglena actuator, we fabricated a simple chamber as a pump structure, and let the Euglena swim through the chamber. Then, by irradiating the Euglena with light in a range from 400 to 420 nm, the Euglena started a fixed location-rotation, which generated a flow. The particles flow by the generated flow was confirmed.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127970817","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Shoaling vibration amplifier with flattened transfer function and suppressed spurious modes 具有平坦传递函数和抑制杂散模式的浅滩振动放大器
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863619
V. Maiwald, M. Müller, Christian Ritz, C. Roman, C. Hierold
{"title":"Shoaling vibration amplifier with flattened transfer function and suppressed spurious modes","authors":"V. Maiwald, M. Müller, Christian Ritz, C. Roman, C. Hierold","doi":"10.1109/MEMSYS.2017.7863619","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863619","url":null,"abstract":"An in-plane vibration sensor with off-resonant band-pass displacement amplification and a differential capacitive readout is presented. The minimum mechanical amplification of 16 dB (i.e. a factor of 6.6) within the designed frequency band from 3–13 kHz is independent of pressure in the range of 6.3 to 64 mbar with a less than 10% change. For a flattened transfer-function a pressure close to 30 mbar is preferred in order to damp the mechanical resonance peaks. The device can be used for low power detection of broadband vibration signals e.g. in monitoring of infrastructure such as bridges and pipelines.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121786557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Wafer-scale high-resolution patterning of biostructures using silk light chain protein photolithography 利用丝轻链蛋白光刻技术进行生物结构的晶圆级高分辨率图像化
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863443
Wanpeng Liu, Shaoqing Zhang, Woonsoo Lee, T. Tao
{"title":"Wafer-scale high-resolution patterning of biostructures using silk light chain protein photolithography","authors":"Wanpeng Liu, Shaoqing Zhang, Woonsoo Lee, T. Tao","doi":"10.1109/MEMSYS.2017.7863443","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863443","url":null,"abstract":"We report on wafer-scale high resolution patterning of bio-microstructures using silk fibroin light chain (L-fibroin) as the photoresist material. The L-fibroin fragments with the well-defined molecular weight have been successfully isolated from the integral silk fibroins consisting both heavy and light chains. Under facile biochemical modification, the L-fibroin photoresist can be synthesized via conjugating commercial photocrosslinkers as crosslinking sites in the presence of ultraviolet light. The enhanced patterning resolution, the improved etching selectivity and the inherent biocompatibility of such protein-based photoresist provide opportunities in large scale biocompatible functional microstructures manufacturing.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132081280","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
CW-powered squegging micromechanical clock generator cw供电的挤压微机械时钟发生器
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863555
Ruonan Liu, J. Nilchi, C. Nguyen
{"title":"CW-powered squegging micromechanical clock generator","authors":"Ruonan Liu, J. Nilchi, C. Nguyen","doi":"10.1109/MEMSYS.2017.7863555","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863555","url":null,"abstract":"A mechanical circuit has been demonstrated that harnesses squegging to convert −50dBm of input continuous-wave (CW) energy into a local 1-kHz clock output while consuming three orders less local battery power than a typical real-time clock (RTC). Unlike a previous clock receiver that relied on a modulated RF input, this clock generator converts a CW input — no modulation needed — to a clock output via squegging of an impacting micromechanical resonant switch (“resoswitch”). Here, impact-induced disruption compels the device's resonating element to lose oscillation amplitude (hence stop impacting), then recover to impact again, only to again lose amplitude, in a periodic and repeatable fashion. The resulting time domain waveform, with periodic peaks and valleys, then provides a stable frequency that serves as a local on-board clock for low data rate applications. By dispensing with the need for a positive feedback sustaining amplifier, this CW-powered mechanical clock generator operates with only 0.8nW of battery power when outputting a triangle-wave into 0.8pF, which is 1250× lower than the μW of a typical RTC.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130006628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
A practical single cell analysis method for mechanical characterization of cancer cells 一个实用的单细胞分析方法的机械特性的癌细胞
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 1900-01-01 DOI: 10.1109/MEMSYS.2017.7863481
Tiffany Baëtens, G. Perret, Y. Takayama, M. Kumemura, L. Jalabert, S. Meignan, Chann Lagadec, Fujita Hiroyuki, D. Collard, M. Tarhan
{"title":"A practical single cell analysis method for mechanical characterization of cancer cells","authors":"Tiffany Baëtens, G. Perret, Y. Takayama, M. Kumemura, L. Jalabert, S. Meignan, Chann Lagadec, Fujita Hiroyuki, D. Collard, M. Tarhan","doi":"10.1109/MEMSYS.2017.7863481","DOIUrl":"https://doi.org/10.1109/MEMSYS.2017.7863481","url":null,"abstract":"This study presents a practical method to perform mechanical characterization of cells using Silicon Nano Tweezers (SNT). Integrated with a microfluidic device, SNT tips were inserted in a channel via a side opening. Cells to be characterized were injected to an inlet of the microfluidic channel and withdrawn by a vacuum pump connected to an outlet. Mechanical properties of a cell, e.g. diameter, stiffness and viscous losses, were analyzed after capturing between the SNT tips (a sensing tip and a compressing tip). After characterization, the captured cell was released to capture another cell. Repeated capturing and characterization steps allow us to test several cells and distinguish fixed and live SUM-159-PT cancer cells based on their mechanical properties.","PeriodicalId":257460,"journal":{"name":"2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130128069","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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