IF 3.8 2区材料科学

Vacuum Pub Date : 2024-12-28 DOI: 10.1016/j.vacuum.2024.113995

Tobia Romano , Andris Ratkus , Samira Gruber , Matteo Pozzi , Hendrik Kos , Cedric Garion , Samuel Rorison , Elena López , Toms Torims , Maurizio Vedani

{"title":"Pure copper membranes manufactured by green laser powder bed fusion with varying wall-thickness and building orientation: microstructure, properties, and vacuum tightness performance","authors":"Tobia Romano , Andris Ratkus , Samira Gruber , Matteo Pozzi , Hendrik Kos , Cedric Garion , Samuel Rorison , Elena López , Toms Torims , Maurizio Vedani","doi":"10.1016/j.vacuum.2024.113995","DOIUrl":"10.1016/j.vacuum.2024.113995","url":null,"abstract":"<div><div>The design freedom offered by additive manufacturing opens up possibilities for developing novel vacuum electronic devices and radio-frequency components with integrated functionalities. High purity copper is often chosen for these applications because it combines excellent electrical and thermal conductivity. Laser powder bed fusion systems equipped with high-power green laser sources have been developed to enhance the processability of pure copper, which exhibits a low absorption rate for conventional infrared lasers. In this study, pure copper parts manufactured by green laser powder bed fusion were characterized in terms of density, impurity content, and mechanical and physical properties to assess their suitability for ultra-high vacuum applications. Additionally, vacuum membranes were produced with different wall-thicknesses and building orientations and tested for helium leakage with a detection limit of 10<sup>−10</sup> mbar l s<sup>−1</sup>. Further microstructural characterization analyses were conducted on the tested membranes to determine the critical parameters influencing their performance in ultra-high vacuum environments, such as effective wall thickness and laser scan length, and establish the current wall thickness limits for pure copper components manufactured by green laser powder bed fusion.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"233 ","pages":"Article 113995"},"PeriodicalIF":3.8,"publicationDate":"2024-12-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143158412","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

ALD grown undoped ZnO and Al-doped-ZnO thin-film heaters

IF 3.8 2区材料科学

Vacuum Pub Date : 2024-12-28 DOI: 10.1016/j.vacuum.2024.113942

Deniz Tugrul, Doga Doganay, Husnu Emrah Unalan, Bilge Imer

{"title":"ALD grown undoped ZnO and Al-doped-ZnO thin-film heaters","authors":"Deniz Tugrul, Doga Doganay, Husnu Emrah Unalan, Bilge Imer","doi":"10.1016/j.vacuum.2024.113942","DOIUrl":"10.1016/j.vacuum.2024.113942","url":null,"abstract":"<div><div>TTFHs require conductive thin-film materials with high transparency in the visible spectrum. Although, ITO is considered as the common material, and alternative materials, such as networks of carbon nanotubes, graphene, silver nanowires, hybrid structures and various oxide thin films, have been studied. Some of the application areas of TTFHs include touch screens and window defrosters. This study aims to demonstrate ALD grown simple binary compound ZnO as a cheap and simple to produce alternative material for TTFHs and compare ZnO and Al doped counterpart performances to each other. For the first time in literature, undoped ZnO thin films grown by ALD are successfully demonstrated as TTHF and record high performances are obtained for AZO TTFHs for 100 nm and below very thin films. The optimized ZnO and AZO thin films showed comparable input power density values in very small thicknesses (∼70–100 nm) with an average optical transmittance of ∼ 90 % in the visible spectra. At a 20 V bias, ZnO heaters reached 52 °C, while AZO heaters achieved 116 °C within 2 min. These temperatures were stabilized within 3 min, and the corresponding input power densities were calculated as 864 and 4276 W/m<sup>2</sup>, and the lowest resistivity values were achieved as 6.79 × 10<sup>−3</sup> and 3.30 × 10<sup>−3</sup> Ω cm for ZnO and AZO, respectively.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"233 ","pages":"Article 113942"},"PeriodicalIF":3.8,"publicationDate":"2024-12-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143158403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

The role of secondary electron yield in mitigating electrostatic charging in future gravitational waves detectors

IF 3.8 2区材料科学

Vacuum Pub Date : 2024-12-27 DOI: 10.1016/j.vacuum.2024.113969

L. Spallino, M. Angelucci, A. Liedl, R. Cimino

{"title":"The role of secondary electron yield in mitigating electrostatic charging in future gravitational waves detectors","authors":"L. Spallino, M. Angelucci, A. Liedl, R. Cimino","doi":"10.1016/j.vacuum.2024.113969","DOIUrl":"10.1016/j.vacuum.2024.113969","url":null,"abstract":"<div><div>Electrostatic charging is a known unwanted noise source that can limit measurement sensitivity of present and future gravitational wave detectors. A mitigation method has been proposed, studied and successfully applied at room temperature within the LIGO collaboration, consisting in mirrors’ exposures to N<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span> ions flux. If such a method is applied when mirrors are at cryogenic temperatures, a significantly thick condensed gas layer will form on the mirrors’ surface severely affecting the detectors’ performance. Here we report an experimental proof of an alternative solution that could be applied to neutralize electrostatic charges and be compatible with cryogenics. The method relays on the intrinsic materials’ attitude to respond to electron irradiation, that is on the Secondary Electron Yield (SEY). By performing electron irradiation at selected energies on three representative materials (metallic, semiconductor and thin insulator), basing on SEY of each specific surface, it is possible to remove or add electrons at will, up to charging neutralization.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"233 ","pages":"Article 113969"},"PeriodicalIF":3.8,"publicationDate":"2024-12-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143158052","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

The effect of Gd content on the microstructure and mechanical properties of AM50 magnesium alloy in pulsed laser welding

IF 3.8 2区材料科学

Vacuum Pub Date : 2024-12-26 DOI: 10.1016/j.vacuum.2024.113993

Xiaobin Zhang, Bangfu Zhang, Shuwang Bian, Wenlong Zhang, Kanglin Ke, Yunbo Qian, Xiaohui Zheng, Qiwei Yuan, Silin Li, Weifeng Xie, Ziqin Zhou

{"title":"The effect of Gd content on the microstructure and mechanical properties of AM50 magnesium alloy in pulsed laser welding","authors":"Xiaobin Zhang, Bangfu Zhang, Shuwang Bian, Wenlong Zhang, Kanglin Ke, Yunbo Qian, Xiaohui Zheng, Qiwei Yuan, Silin Li, Weifeng Xie, Ziqin Zhou","doi":"10.1016/j.vacuum.2024.113993","DOIUrl":"10.1016/j.vacuum.2024.113993","url":null,"abstract":"<div><div>The effect of AM50-xGd fillers (x = 0, 1, 2, 3 wt%) on the microstructure and mechanical properties of 1 mm thick AM50 magnesium alloy plates welded by pulsed laser are studied. Scanning electron microscope (SEM), energy dispersive spectrometer (EDS), X-ray diffraction (XRD), electron backscatter diffraction (EBSD), and transmission electron microscope (TEM) are used to observe the microstructure of the welded joints. The results showed that the microstructure of the joints is mainly composed of the α-Mg and β-Mg<sub>17</sub>Al<sub>12</sub> phases. After rare-earth (RE) element Gd is added, the newly generated Al<sub>2</sub>Gd phase and Al<sub>8</sub>Mn<sub>4</sub>Gd have a refining effect on the reticular β-Mg<sub>17</sub>Al<sub>12</sub> eutectic structure at the grain boundary (GB). The average grain size (AGS) decreased from 29.1 μm to 9.7 μm. A tensile testing machine and a microhardness tester are used to test the tensile properties and microhardness of the welded joints. The results show that as the Gd content increases, the content of the β-Mg<sub>17</sub>Al<sub>12</sub> phase decreases, and the hardness of the joints decreases accordingly. The ultimate tensile strength (UTS) of the joint initially increases and then decreases. At 2 % Gd, the UTS of the joint reaches a maximum of 224MPa, and the hardness is 65.5 HV.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"233 ","pages":"Article 113993"},"PeriodicalIF":3.8,"publicationDate":"2024-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143158399","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Effect of ultrasonic vibration aging treatment on dislocation evolution and precipitation behavior of 6082 aluminum alloy

IF 3.8 2区材料科学

Vacuum Pub Date : 2024-12-26 DOI: 10.1016/j.vacuum.2024.113990

Jianwei Chen , Huarong Qi , Zhongxue Feng , Xiaoqi Wang , Ziyi Li , Guangyu Zhang , Guangxu Liu

{"title":"Effect of ultrasonic vibration aging treatment on dislocation evolution and precipitation behavior of 6082 aluminum alloy","authors":"Jianwei Chen , Huarong Qi , Zhongxue Feng , Xiaoqi Wang , Ziyi Li , Guangyu Zhang , Guangxu Liu","doi":"10.1016/j.vacuum.2024.113990","DOIUrl":"10.1016/j.vacuum.2024.113990","url":null,"abstract":"<div><div>In this study, Conventional Aging Treatment (CAT) and Ultrasonic Vibration Aging Treatment (UVAT) experiments were conducted on solid-solution (SS) 6082 aluminum alloy rods using a self-made ultrasonic vibration aging device. The microstructure analysis revealed that ultrasonic vibrations enhance dislocation formation and mobility, affecting their accumulation and annihilation. With increased UVAT duration, dislocation density initially rises before declining. Investigation revealed that β\" phase precipitation was markedly greater in samples treated with UVAT for 3h compared to those treated with CAT over the same period, this suggested that UVAT could enhance precipitation kinetics and accelerate the β\" phase precipitation rate. The performance test results indicated that the sample treated with UVAT exhibited a peak aging time of 3h, while the ultimate tensile strength (UTS), yield strength (YS), and hardness were increased by 12 %, 45 %, and 14.9 %, respectively, compared to the samples treated with CAT for 3h.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"233 ","pages":"Article 113990"},"PeriodicalIF":3.8,"publicationDate":"2024-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143158405","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Surface feature of the substrate via key factor on adhesion of Cr/Cr2N multilayer and alloy substrate

IF 3.8 2区材料科学

Vacuum Pub Date : 2024-12-26 DOI: 10.1016/j.vacuum.2024.113991

Xiaoyun Ding , Menghui Cui , Jinchao Jiao , Yong Lian , Jinghan Yang , Yawen Wu , Jin Zhang , Yingchun Cheng , Xiubo Tian , Chunzhi Gong

{"title":"Surface feature of the substrate via key factor on adhesion of Cr/Cr2N multilayer and alloy substrate","authors":"Xiaoyun Ding , Menghui Cui , Jinchao Jiao , Yong Lian , Jinghan Yang , Yawen Wu , Jin Zhang , Yingchun Cheng , Xiubo Tian , Chunzhi Gong","doi":"10.1016/j.vacuum.2024.113991","DOIUrl":"10.1016/j.vacuum.2024.113991","url":null,"abstract":"<div><div>This study investigates the relationship between the surface characteristics of substrates and the performance of Cr/Cr<sub>2</sub>N multilayer coatings. The microstructure, mechanical properties, and adhesion of the coatings were investigated using SEM, HRTEM, XRD, hardness testing, indentation testing, and scratch testing. Despite exhibiting comparable hardness and fracture toughness, the adhesion of the coating decreases significantly with the elevation of substrate roughness due to the inheritance of surface undulations. Notably, even though the roughness achieved through plasma nitriding substrate exceeds that of grinding substrate, the plasma-nitrided surface maintains a coherent interface with the coating while effectively refining the grain size of the coating. This ultimately leads to an increase in the coating adhesion on the nitrided substrate by over 50 %. The bearing capacity and ability to promote crystallization of the substrate surface are more crucial factors than its roughness.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"233 ","pages":"Article 113991"},"PeriodicalIF":3.8,"publicationDate":"2024-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143158282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

DC vacuum arc deposition system with coiled anode for ta-C films achieving a high deposition rate

IF 3.8 2区材料科学

Vacuum Pub Date : 2024-12-26 DOI: 10.1016/j.vacuum.2024.113989

Seiya Watanabe , Jumpei Kito , Genki Sano , Mirano Oneda , Takahiro Bando , Hirofumi Takikawa , Hiroaki Sugita , Takahiro Hattori , Hiroki Gima

{"title":"DC vacuum arc deposition system with coiled anode for ta-C films achieving a high deposition rate","authors":"Seiya Watanabe , Jumpei Kito , Genki Sano , Mirano Oneda , Takahiro Bando , Hirofumi Takikawa , Hiroaki Sugita , Takahiro Hattori , Hiroki Gima","doi":"10.1016/j.vacuum.2024.113989","DOIUrl":"10.1016/j.vacuum.2024.113989","url":null,"abstract":"<div><div>Tetrahedral amorphous carbon (ta-C) film, which is one of diamond-like carbon (DLC) film, is widely used for cutting tools and sliding parts because of their high sliding properties, high wear resistance, and high thermal stability. The deposition of ta-C films by vacuum arc discharge requires a reduction in the amount of droplet adhesion, which causes film quality degradation. We have shown that TiN films with a low number of droplets can be formed by using a coiled anode to efficiently transport plasma. In the present study, we applied the same method to ta-C deposition, where the arc current is about 100 A for TiN deposition, but only about 30 A for ta-C deposition. Therefore, we decided to use a coiled anode with about three times as many coil windings as the 3.5 coil windings used for TiN deposition. Comparison of the deposition rate between a 0-winding coiled anode and a 10.5-winding coiled anode showed that the deposition rate increased by a factor of 2 or more with the 10.5-winding coiled anode, and the number of droplets per film thickness was reduced by a factor of 2. The effectiveness of this method was demonstrated. However, it was also found that the ta-C film softens after a long deposition time. This suggests that appropriate cooling is necessary to obtain a hard ta-C film.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"233 ","pages":"Article 113989"},"PeriodicalIF":3.8,"publicationDate":"2024-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143158051","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Effect of composition and structure of Sb sources on evaporation properties and thin films

IF 3.8 2区材料科学

Vacuum Pub Date : 2024-12-26 DOI: 10.1016/j.vacuum.2024.113992

Yankun Chen, Wenhuai Tian, Zhenhu Liu, Long Han, Junhao Feng

{"title":"Effect of composition and structure of Sb sources on evaporation properties and thin films","authors":"Yankun Chen, Wenhuai Tian, Zhenhu Liu, Long Han, Junhao Feng","doi":"10.1016/j.vacuum.2024.113992","DOIUrl":"10.1016/j.vacuum.2024.113992","url":null,"abstract":"<div><div>Antimony (Sb) thin films for photodetectors and phase-change materials were prepared using a vacuum-resistive thermal evaporation system. The evaporation properties were assessed by comparing the deposition rates of Sb sources with varying compositions and structures. The morphology and structure of Sb films formed from Sb beads, Sb powder, and Pt-Sb powder were characterized. Evaporation characteristics are more stable in Sb beads than in Sb powders. The evaporation properties of Sb sources can be modified by adjusting the properties of the powders. Pt-Sb alloys contain both Sb and PtSb<sub>2</sub> phases. Alloying significantly affects the evaporation characteristics of the Sb sources. All three Sb films were single-crystalline and composed of island-shaped Sb grains. The grain size and roughness of the films primarily depend on the deposition rate, with higher rates producing finer grains and lower roughness. In this study, the evaporation properties are modified by adjusting the composition and structure of the Sb source, thereby providing inspiration for related technological applications.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"233 ","pages":"Article 113992"},"PeriodicalIF":3.8,"publicationDate":"2024-12-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143158400","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

The enhancement of the infrared switching efficiency and laser protection performance of VO2 film with Ta gradient doping

IF 3.8 2区材料科学

Vacuum Pub Date : 2024-12-25 DOI: 10.1016/j.vacuum.2024.113984

Leran Zhao , Wei Ou , Junbai Ma , Huijuan Zhu , Min Feng , Juncheng Liu

{"title":"The enhancement of the infrared switching efficiency and laser protection performance of VO2 film with Ta gradient doping","authors":"Leran Zhao , Wei Ou , Junbai Ma , Huijuan Zhu , Min Feng , Juncheng Liu","doi":"10.1016/j.vacuum.2024.113984","DOIUrl":"10.1016/j.vacuum.2024.113984","url":null,"abstract":"<div><div>A low phase transition threshold (<em>T</em><sub>c</sub>) and high infrared switching efficiency (<em>r</em>) are essential for the practical application of VO<sub>2</sub> film in laser protection field. A Ta gradient-doped VO<sub>2</sub> film with low <em>T</em><sub>c</sub> and high <em>r</em> was fabricated successfully. The effect of the gradient doping method on the phase transition performance of VO<sub>2</sub> film was investigated. The film's <em>T</em><sub>c</sub> decreases to 34.6 °C as the Ta uniform doping concentration increases, but its <em>r</em> also decreases to 45.1 %. Fortunately, the gradient doping can restore the <em>r</em>, increasing it from 45.1 % to 56.2 %, while maintaining a low <em>T</em><sub>c</sub> of 37.2 °C. The total density of state and the band structure of the Ta doped VO<sub>2</sub> film were calculated with the first principles, and the action mechanism of the gradient doping to optimize the phase transition performance was investigated. The overall laser protection performance of the Ta gradient-doped film was superior to that of the uniform-doped film and the pure VO<sub>2</sub> film. Both an IMT quality factor and a laser protection quality factor were proposed for the comprehensive evaluation of the VO<sub>2</sub> film's phase transition performance.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"233 ","pages":"Article 113984"},"PeriodicalIF":3.8,"publicationDate":"2024-12-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143158401","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Enhanced wear and corrosion resistance of wire-arc additive manufactured Al-Cu alloy by friction stir processing

IF 3.8 2区材料科学

Vacuum Pub Date : 2024-12-25 DOI: 10.1016/j.vacuum.2024.113987

Guochun Ren , Yang Zheng , Pu Zhong , Tianqi Wang , Liangyu Li

{"title":"Enhanced wear and corrosion resistance of wire-arc additive manufactured Al-Cu alloy by friction stir processing","authors":"Guochun Ren , Yang Zheng , Pu Zhong , Tianqi Wang , Liangyu Li","doi":"10.1016/j.vacuum.2024.113987","DOIUrl":"10.1016/j.vacuum.2024.113987","url":null,"abstract":"<div><div>This study addresses the inferior wear and corrosion resistance caused by coarse grains and pores in Al-Cu alloy prepared by wire-arc additive manufacturing (WAAM). Friction stir processing (FSP), a solid-phase surface modification method, is employed to modify the microstructure of an Al-Cu alloy fabricated via WAAM. Microstructural characterization using scanning electron microscopy, energy-dispersive X-ray spectrometry, and electron backscatter diffraction shows that FSP forms a more favorable microstructure, with fragmented intergranular intermetallics and eliminated pore defects. After FSP, the grain size decreases from 28.5 to 4.98 μm. The wear behavior of the material is investigated under dry-sliding conditions. Following FSP, the friction coefficient and wear volume are reduced by 46.7 % and 48.9 %, respectively, indicating an improvement in anti-wear ability. The results of the electrochemical corrosion test indicate that a thicker and denser passivation film is formed on the FSPed sample than on the As-deposited sample, suggesting improved corrosion resistance after FSP.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"233 ","pages":"Article 113987"},"PeriodicalIF":3.8,"publicationDate":"2024-12-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143157716","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

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