Shaolin Li , Jiyuan Li , Kexing Song , Yanjun Zhou , Jun Cao , Fei Cao , Hui Su , Zhichao Wang
{"title":"纳米结构决定键合强度:铜线上钯涂层的热传递和扩散屏障","authors":"Shaolin Li , Jiyuan Li , Kexing Song , Yanjun Zhou , Jun Cao , Fei Cao , Hui Su , Zhichao Wang","doi":"10.1016/j.vacuum.2025.114728","DOIUrl":null,"url":null,"abstract":"<div><div>The redistribution of the palladium coating on the surface of palladium-coated copper wires during the bonding process is a critical factor influencing the bond connections of chips and wires. In this paper, a micro-area coating technique was used to obtain palladium-coated copper wires with varying characteristics by controlling the heating temperature. Ball formation and ball bonding experiments were conducted to investigate the evolution process of the palladium coating and its impact on bonding strength. The results indicate that at 400 °C, the thickness distribution of the palladium coating on the coated copper wire is uniform, with larger nanocrystal sizes and narrower amorphous band widths, forming larger free air ball (FAB) sizes and thicker redistribution coatings. The bonding interface exhibits a continuous and uniformly distributed palladium coating, with higher bond connection strength. For copper wires subjected to secondary heating at 300 °C, there is a significant fluctuation in coating thickness with a wider range of nanocrystal sizes and a broader width of the amorphous band. At this juncture, thinner and discontinuous coatings form at the bonding interface alongside Al<sub>2</sub>Cu intermetallic compounds emerging, which leads to reduced bonding connection strength. The distribution of nanocrystals and amorphous regions within the coating influences the melting behavior and redistribution dynamics of coatings by changing thermal transfer behavior. The strength of the bonding interface is modified by the palladium coating at the interface due to blocking the diffusion between copper and aluminum.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"242 ","pages":"Article 114728"},"PeriodicalIF":3.9000,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanostructure-dictated bonding strength: thermal transfer & diffusion barrier in palladium coatings on copper wires\",\"authors\":\"Shaolin Li , Jiyuan Li , Kexing Song , Yanjun Zhou , Jun Cao , Fei Cao , Hui Su , Zhichao Wang\",\"doi\":\"10.1016/j.vacuum.2025.114728\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>The redistribution of the palladium coating on the surface of palladium-coated copper wires during the bonding process is a critical factor influencing the bond connections of chips and wires. In this paper, a micro-area coating technique was used to obtain palladium-coated copper wires with varying characteristics by controlling the heating temperature. Ball formation and ball bonding experiments were conducted to investigate the evolution process of the palladium coating and its impact on bonding strength. The results indicate that at 400 °C, the thickness distribution of the palladium coating on the coated copper wire is uniform, with larger nanocrystal sizes and narrower amorphous band widths, forming larger free air ball (FAB) sizes and thicker redistribution coatings. The bonding interface exhibits a continuous and uniformly distributed palladium coating, with higher bond connection strength. For copper wires subjected to secondary heating at 300 °C, there is a significant fluctuation in coating thickness with a wider range of nanocrystal sizes and a broader width of the amorphous band. At this juncture, thinner and discontinuous coatings form at the bonding interface alongside Al<sub>2</sub>Cu intermetallic compounds emerging, which leads to reduced bonding connection strength. The distribution of nanocrystals and amorphous regions within the coating influences the melting behavior and redistribution dynamics of coatings by changing thermal transfer behavior. The strength of the bonding interface is modified by the palladium coating at the interface due to blocking the diffusion between copper and aluminum.</div></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":\"242 \",\"pages\":\"Article 114728\"},\"PeriodicalIF\":3.9000,\"publicationDate\":\"2025-09-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X25007183\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25007183","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Nanostructure-dictated bonding strength: thermal transfer & diffusion barrier in palladium coatings on copper wires
The redistribution of the palladium coating on the surface of palladium-coated copper wires during the bonding process is a critical factor influencing the bond connections of chips and wires. In this paper, a micro-area coating technique was used to obtain palladium-coated copper wires with varying characteristics by controlling the heating temperature. Ball formation and ball bonding experiments were conducted to investigate the evolution process of the palladium coating and its impact on bonding strength. The results indicate that at 400 °C, the thickness distribution of the palladium coating on the coated copper wire is uniform, with larger nanocrystal sizes and narrower amorphous band widths, forming larger free air ball (FAB) sizes and thicker redistribution coatings. The bonding interface exhibits a continuous and uniformly distributed palladium coating, with higher bond connection strength. For copper wires subjected to secondary heating at 300 °C, there is a significant fluctuation in coating thickness with a wider range of nanocrystal sizes and a broader width of the amorphous band. At this juncture, thinner and discontinuous coatings form at the bonding interface alongside Al2Cu intermetallic compounds emerging, which leads to reduced bonding connection strength. The distribution of nanocrystals and amorphous regions within the coating influences the melting behavior and redistribution dynamics of coatings by changing thermal transfer behavior. The strength of the bonding interface is modified by the palladium coating at the interface due to blocking the diffusion between copper and aluminum.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.