VacuumPub Date : 2025-07-14DOI: 10.1016/j.vacuum.2025.114579
Philipp Alizadeh, Rainer Dahlmann
{"title":"Vacuum technical investigation of a novel reactor for the continuous coating of flexible web material","authors":"Philipp Alizadeh, Rainer Dahlmann","doi":"10.1016/j.vacuum.2025.114579","DOIUrl":"10.1016/j.vacuum.2025.114579","url":null,"abstract":"<div><div>This short communication presents the concept and validation of a vacuum reactor designed for Plasma-Enhanced Chemical Vapor Deposition (PECVD) inline coating of flexible web material. Three airlocks are utilized in order to ensure uninterrupted transportation of the film in and out of a consistently evacuated reactor. Four distinct pressure areas are monitored by respective sensors. Pressure differentials were achieved, which are a prerequisite for minimizing plasma excitation and coating deposition outside the process envelope.</div><div>The study highlights leakage flow dynamics, with approximately 70 % attributed to Pumping Unit I, 29 % to Pumping Unit II, and only 1 % to the coating module. The reactor's configuration effectively reduces pressure equalization between zones by \"throttled short-circuits\". Conductance values for the airlocks and process envelope are discussed, with geometric adjustments recommended for improved flow choking. A base pressure (without process gases) of 4.9 Pa in the process envelope was observed, enabling PECVD at pressures greater than 15 Pa.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114579"},"PeriodicalIF":3.8,"publicationDate":"2025-07-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144662353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
VacuumPub Date : 2025-07-13DOI: 10.1016/j.vacuum.2025.114532
Bowen Li , Zhenhua Xi , Huzhong Zhang , Gang Li , Yunjian Song , Wenjie Jia , Kun Liu , Detian Li
{"title":"Research on non-contact detection of the rotor dynamic posture in Spinning Rotor Gauge","authors":"Bowen Li , Zhenhua Xi , Huzhong Zhang , Gang Li , Yunjian Song , Wenjie Jia , Kun Liu , Detian Li","doi":"10.1016/j.vacuum.2025.114532","DOIUrl":"10.1016/j.vacuum.2025.114532","url":null,"abstract":"<div><div>This paper propose a non-contact spherical rotor posture detection method based on monocular vision and deep learning to enable high-precision monitoring of rotor motion in a Spinning Rotor Gauge (SRG). By integrating convolutional neural network (CNN) landmark detection with random sample consensus (RANSAC) trajectory fitting, real-time estimation of the rotor’s deflection angle and spin angle is achieved with an error of less than 0.5°. Experimental results demonstrate that, within the rotational speed range of 440–800<!--> <!-->Hz, increasing the rotational speed does not induce any significant change in the angle of the rotor’s spin axis, thereby validating the stability of the sensor. The rotor attitude experiments from 1 kHz to 10 kHz proved the correlation between the rotor deflection angle and its magnetic moment. This study provides the first vision-based dynamic monitoring solution for precise calibration of SRGs under high-vacuum conditions, offering a novel approach for vacuum calibration procedures and residual drag investigations in SRGs.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114532"},"PeriodicalIF":3.8,"publicationDate":"2025-07-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144614201","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
VacuumPub Date : 2025-07-12DOI: 10.1016/j.vacuum.2025.114578
Shengbin Li , Changfeng Song , Yuan Li , Jinyi Ge , Zhumin Li , Yuehong Zheng , Ling Li , Jiansheng Li
{"title":"Resistivity-temperature behavior of Cu-Ni-Al alloys strengthened by coherent precipitation within a wide composition range","authors":"Shengbin Li , Changfeng Song , Yuan Li , Jinyi Ge , Zhumin Li , Yuehong Zheng , Ling Li , Jiansheng Li","doi":"10.1016/j.vacuum.2025.114578","DOIUrl":"10.1016/j.vacuum.2025.114578","url":null,"abstract":"<div><div>The coherent precipitation-strengthened Cu-Ni-Al ternary alloy exhibits high strength, high elasticity, and good electrical conductivity. Clarifying its resistivity-temperature behavior is essential. In this study, the microstructure evolution and the mechanism of resistivity-temperature behavior of Cu-Ni-Al ternary alloys was systematically analyzed. The results indicate that the microstructure of these alloys comprises a γ matrix and a feather-like γ′ coherent precipitation phase. The variable-temperature resistivity of the Cu-Ni-Al ternary alloy is closely associated with the total amount of (Ni + Al) dissolved in the γ phase. Lower (Ni + Al) content reduces electron-electron scattering and phonon-electron scattering, thereby decreasing room-temperature resistivity. During the heating process, with the increase of Cu content, the slope of resistivity change with temperature gradually decreases, accompanied by a reduction in vacancy formation energy, which diminishes the thermal stability of the γ phase.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114578"},"PeriodicalIF":3.8,"publicationDate":"2025-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144631712","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
VacuumPub Date : 2025-07-12DOI: 10.1016/j.vacuum.2025.114577
Zhimin Gao , Zimo Ji , Tingwei Zhang , Adrian Kitai
{"title":"Ultra-near-surface gallium-activated 435 nm luminescence from donor-acceptor-pair recombination in ion-beam implanted 4H-SiC","authors":"Zhimin Gao , Zimo Ji , Tingwei Zhang , Adrian Kitai","doi":"10.1016/j.vacuum.2025.114577","DOIUrl":"10.1016/j.vacuum.2025.114577","url":null,"abstract":"<div><div>Nitrogen and gallium-doped SiC and its luminescence properties are investigated in detail. Spatially highly localized gallium doping is realized by ion implanting Ga into n-type 4H SiC using an ion milling tool for the first time. A nanoscale depth region of Ga-rich SiC is formed near the SiC surface, followed by 1600 °C activation annealing. An AlN capping layer is used to avoid the out-diffusion of Ga, stabilize the SiC surface, and serve as an additional source of N dopant. An emission spectrum with a peak wavelength of approximately 435 nm at room temperature is identified and confirmed to be due to Ga-N donor-acceptor-pair recombination. Photoluminescence, cathodoluminescence, SEM and TEM results are presented. It is thereby shown that the more conventional p-type dopant Al can be replaced by Ga, enabling high-intensity Taylor cone gallium ion sources to achieve highly spatially controlled donor-acceptor pair emission from SiC. Several aspects of the relevance of spatially localized donor-acceptor pair emission are described.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114577"},"PeriodicalIF":3.8,"publicationDate":"2025-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144611785","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
VacuumPub Date : 2025-07-11DOI: 10.1016/j.vacuum.2025.114576
Zhiwei Wu , Sirui Zhao , Tonglin Qian , Tao Zhou
{"title":"Microstructure and surface monitoring of ECG signals for CrTiN-Ni coatings as dry bioelectrodes","authors":"Zhiwei Wu , Sirui Zhao , Tonglin Qian , Tao Zhou","doi":"10.1016/j.vacuum.2025.114576","DOIUrl":"10.1016/j.vacuum.2025.114576","url":null,"abstract":"<div><div>The CrTiN-Ni coatings were fabricated using unbalanced magnetron sputtering. These coatings primarily consist of CrN and TiN crystalline phases, with a relatively high Ni content ranging from 52.4 at.% to 64.0 at.%. The coatings exhibit relatively low contact impedance with a Ni content of 58.9–61.0 at.%. The noise impedance (R<sub>n</sub>) of the CrTiN-Ni coating dry electrodes ranges from 1.11–1.90 × 10<sup>6</sup> Ω at a frequency of 1Hz, which is lower than that of the Ag/AgCl wet electrode (2.58 × 10<sup>6</sup> Ω). In the static testing of electrocardiogram (ECG) signals, the signal power of CrTiN-Ni coated dry electrodes was measured to be 1.1 × 10<sup>−3</sup> to 1.3 × 10<sup>−3</sup> W, which is approximately one order of magnitude higher than that of commercial wet electrodes (7.2× 10<sup>−4</sup> W). In dynamic measurements, the signal power of all coating dry electrodes consistently exceeded that of commercial wet electrode. Additionally, the coated dry electrodes exhibited a relatively high signal-to-noise ratio (SNR), ranging from 56.7 to 65.1 dB, which is comparable to that of commercial wet electrodes (63.3 dB). This suggests that coated dry electrodes have considerable potential for use as dry bioelectrodes in practice.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114576"},"PeriodicalIF":3.8,"publicationDate":"2025-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144605886","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Influence of fluorine on structural and electrical properties of VO2 thin films deposited by magnetron sputtering","authors":"Bora Akyurek , Ayten Cantas , Yasemin Demirhan , Lutfi Ozyuzer , Gulnur Aygun","doi":"10.1016/j.vacuum.2025.114572","DOIUrl":"10.1016/j.vacuum.2025.114572","url":null,"abstract":"<div><div>This study investigates whether fluorine-based thermal gel used during electrical measurements of vanadium oxide (VO<sub>2</sub>) films influences the structural, morphological, or compositional integrity of the films. High-quality VO<sub>2</sub> films with a resistance ratio change of about 10<sup>4</sup> for metal–insulator transition were deposited by magnetron sputtering. During electrical characterization, VO<sub>2</sub> film was heated from room temperature to ∼370 K with a fluorine-based thermal gel usage to achieve better heat contact between the film and substrate holder. Structural and chemical properties were assessed through XRD, Raman, XPS, SEM, and energy dispersive spectroscopy imaging. XRD revealed diffraction peaks consistent with monoclinic VO<sub>2</sub> confirming that the crystal lattice remains the same although fluorine based thermal gel was used. Raman spectra exhibited vibrational modes indicating that the phonon structure of VO<sub>2</sub> was preserved despite fluorine gel usage. XPS results showed only a minor F <em>1s</em> signal (2.8%) limited only to the film surface. SEM and EDS analyses further confirmed that surface morphology and elemental composition remained belonging to VO<sub>2</sub> film. These findings demonstrate that the usage of fluorine-based thermal gel results in only a minimal surface interaction, thereby preserving intrinsic material properties of VO<sub>2</sub> and supporting a potential usage for future device fabrication applications.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114572"},"PeriodicalIF":3.8,"publicationDate":"2025-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144614299","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
VacuumPub Date : 2025-07-11DOI: 10.1016/j.vacuum.2025.114571
Lifan Xu, Yan Liu, Muye Niu, Kuihan Zhu, Xinghua Zhang
{"title":"The influence of synergistic effect on the mechanical and tribological properties of SiC/7055Al composites reinforced with carbon nanotubes","authors":"Lifan Xu, Yan Liu, Muye Niu, Kuihan Zhu, Xinghua Zhang","doi":"10.1016/j.vacuum.2025.114571","DOIUrl":"10.1016/j.vacuum.2025.114571","url":null,"abstract":"<div><div>SiC/7055Al composites with enhanced interface bonding were successfully fabricated by incorporating carbon nanotubes (CNT) through the powder metallurgy method. SiC particles are distributed within the grain boundaries and form a network structure, while CNTs are situated at the interface between the SiC particles and the matrix alloy. The network structure of SiC in the composites effectively enhances the load-bearing capacity. The incorporation of CNTs with a high aspect ratio plays a crucial role in inhibiting both the initiation and propagation of cracks, while also minimizing the spalling of SiC particles during the friction processes. The synergistic effect significantly enhanced the mechanical properties and tribological properties of the composites. The composite containing 5 % SiC and 0.05 % CNT demonstrates the optimal tribological properties, and the wear mechanism is mild abrasive wear and fatigue wear, whereas other composites exhibit fatigue wear.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114571"},"PeriodicalIF":3.8,"publicationDate":"2025-07-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144605802","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
VacuumPub Date : 2025-07-10DOI: 10.1016/j.vacuum.2025.114573
Shuwei Guo, Lintao Liu, Shaopeng Wang, Fei He
{"title":"Compatibility of Cr2N protective coatings on 316H stainless steel in liquid sodium containing dissolved oxygen","authors":"Shuwei Guo, Lintao Liu, Shaopeng Wang, Fei He","doi":"10.1016/j.vacuum.2025.114573","DOIUrl":"10.1016/j.vacuum.2025.114573","url":null,"abstract":"<div><div>Liquid metal corrosion is one of the key factors that have to be considered in Sodium-Cooled Fast Reactor (SFR), which is a physical or physical–chemical process, involving species dissolution and transport, chemical reactions and new phase formation. Cr<sub>2</sub>N coatings were prepared on 316H stainless steel, one of the most important structural materials used in SFRs, via pack chromizing and gas nitriding, and immersed in liquid sodium containing 200 ppm of oxygen at 470 °C. Sodium and dissolved oxygen were contact with the nitride layer directly and diffused toward into it of nanoscale, while Cr, which is compatible with sodium, diffused outward to form a Na-affected scale composed of Na<sub>2</sub>O/Na<sub>2</sub>O<sub>2</sub>, Cr<sub>2</sub>N and chromium oxides/oxynitrides that slow down the corrosion of sodium. Na exposure induced two main microstructural changes in Cr<sub>2</sub>N coatings, including the formation of a surface oxide scale with lower mechanical properties than the intrinsic coating, and a reduced grain size. Sodium had a very limited influence on the Cr<sub>2</sub>N coatings microstructure, the coatings showed little degradation in liquid sodium and remained chemically inert and structurally intact, proving to be highly compatible with liquid sodium.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114573"},"PeriodicalIF":3.8,"publicationDate":"2025-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144605885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Vacuum system design and simulation for Siam Photon Source II: Towards Thailand's fourth-generation synchrotron light source","authors":"Thanapong Phimsen, Sireegorn Sumklang, Narongsak Sonsuphap, Orayanee Seegauncha, Supan Boonsuya, Sarawut Chitthaisong, Supachai Prawanta, Prapaiwan Sunwong, Porntip Sudmuang, Prapong Klysubun","doi":"10.1016/j.vacuum.2025.114569","DOIUrl":"10.1016/j.vacuum.2025.114569","url":null,"abstract":"<div><div>The design of vacuum systems for fourth-generation synchrotron light sources is challenged by extreme spatial constraints imposed by low-emittance lattices. This paper presents the integrated vacuum system for the 3.0 GeV Siam Photon Source II (SPS-II), which features a compact Double Triple Bend Achromat (DTBA) lattice. The design is based on a localized pumping philosophy that concentrates high-capacity pumps near photon absorbers, combined with advanced fabrication of the aluminum vacuum chambers using oil-less CNC machining. Finite element analysis validates the mechanical design, demonstrating that an optimized support system maintains deformation at critical beam position monitors below 0.3 μm under thermal loads. Thermal analysis of the discrete copper absorbers confirms that an optimized cooling design keeps peak temperatures below 148 °C. Three-dimensional Molflow + simulations predict an operational average pressure of 1.1 × 10<sup>−9</sup> mbar after 100 Ah of beam conditioning. This work demonstrates that a localized pumping strategy, supported by precision manufacturing, provides a robust and viable vacuum solution for fourth-generation light sources.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114569"},"PeriodicalIF":3.8,"publicationDate":"2025-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144605887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
VacuumPub Date : 2025-07-08DOI: 10.1016/j.vacuum.2025.114567
Mingyao Xiong , Zhihao Zhuo , Yang Xue , Changqing Lin , Dan Huang
{"title":"Sr3SbN and Sr3BiN: two anti-perovskite thermoelectric materials with low lattice thermal conductivity","authors":"Mingyao Xiong , Zhihao Zhuo , Yang Xue , Changqing Lin , Dan Huang","doi":"10.1016/j.vacuum.2025.114567","DOIUrl":"10.1016/j.vacuum.2025.114567","url":null,"abstract":"<div><div>This study comprehensively investigates the thermoelectric properties of anti-perovskite compounds Sr<sub>3</sub>SbN and Sr<sub>3</sub>BiN by combining first-principles calculations with the semi-classical Boltzmann theory framework, while incorporating the electron-phonon averaging (EPA) method. The results demonstrate that Sr<sub>3</sub>SbN and Sr<sub>3</sub>BiN exhibit excellent dynamical and mechanical stability, providing a solid theoretical foundation for their experimental synthesis. The calculated band gap values of Sr<sub>3</sub>SbN and Sr<sub>3</sub>BiN are 1.03 eV and 1.05 eV, respectively. Their conduction and valence band degeneracies (N<sub>v</sub>) are 2 and 3, respectively, which facilitates the optimization of carrier transport properties. At 300 K, the lattice thermal conductivities (κ<sub>L</sub>) of Sr<sub>3</sub>SbN and Sr<sub>3</sub>BiN are 2.28 and 2.67 W m<sup>−1</sup> K<sup>−1</sup>, respectively, values comparable to that of the classical thermoelectric material PbTe (2.3 W m<sup>−1</sup> K<sup>−1</sup>). At 400 K, the maximum ZT values for p-type doped Sr<sub>3</sub>SbN and Sr<sub>3</sub>BiN reach 0.63 and 0.71, respectively, providing valuable theoretical insights for the development of next-generation clean energy conversion devices.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114567"},"PeriodicalIF":3.8,"publicationDate":"2025-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144614200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}