Nanostructure-dictated bonding strength: thermal transfer & diffusion barrier in palladium coatings on copper wires

IF 3.9 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
Shaolin Li , Jiyuan Li , Kexing Song , Yanjun Zhou , Jun Cao , Fei Cao , Hui Su , Zhichao Wang
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引用次数: 0

Abstract

The redistribution of the palladium coating on the surface of palladium-coated copper wires during the bonding process is a critical factor influencing the bond connections of chips and wires. In this paper, a micro-area coating technique was used to obtain palladium-coated copper wires with varying characteristics by controlling the heating temperature. Ball formation and ball bonding experiments were conducted to investigate the evolution process of the palladium coating and its impact on bonding strength. The results indicate that at 400 °C, the thickness distribution of the palladium coating on the coated copper wire is uniform, with larger nanocrystal sizes and narrower amorphous band widths, forming larger free air ball (FAB) sizes and thicker redistribution coatings. The bonding interface exhibits a continuous and uniformly distributed palladium coating, with higher bond connection strength. For copper wires subjected to secondary heating at 300 °C, there is a significant fluctuation in coating thickness with a wider range of nanocrystal sizes and a broader width of the amorphous band. At this juncture, thinner and discontinuous coatings form at the bonding interface alongside Al2Cu intermetallic compounds emerging, which leads to reduced bonding connection strength. The distribution of nanocrystals and amorphous regions within the coating influences the melting behavior and redistribution dynamics of coatings by changing thermal transfer behavior. The strength of the bonding interface is modified by the palladium coating at the interface due to blocking the diffusion between copper and aluminum.
纳米结构决定键合强度:铜线上钯涂层的热传递和扩散屏障
在键合过程中,镀钯铜线表面钯涂层的重新分布是影响芯片与导线键合的关键因素。本文采用微区涂覆技术,通过控制加热温度,获得了具有不同特性的镀钯铜线。通过球的形成和球键合实验,研究了钯涂层的演化过程及其对结合强度的影响。结果表明:在400℃时,镀覆铜线表面的钯膜厚度分布均匀,纳米晶尺寸较大,非晶带宽度较窄,形成较大的自由空气球(FAB)尺寸和较厚的重分布涂层;结合界面呈现连续均匀分布的钯镀层,具有较高的结合强度。对于300℃二次加热的铜线,涂层厚度波动明显,纳米晶尺寸范围更大,非晶带宽度更宽。此时,在键合界面形成较薄且不连续的涂层,同时出现Al2Cu金属间化合物,导致键合强度降低。涂层内纳米晶和非晶区的分布通过改变热传递行为影响涂层的熔化行为和重分布动力学。界面处的钯涂层阻止了铜和铝之间的扩散,从而提高了界面的强度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Vacuum
Vacuum 工程技术-材料科学:综合
CiteScore
6.80
自引率
17.50%
发文量
0
审稿时长
34 days
期刊介绍: Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
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