Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)最新文献_第9页

Development of high performance immunoassay system using multichannel microchip 多通道微芯片高效免疫分析系统的研制

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984049

M. Yamanaka, K. Sato, M. Tokeshi, H. Katou, H. Kimura, T. Kitamori

引用次数: 0

Synthesis of microcrystalline silicon thin films using a low-pressure microwave plasma 用低压微波等离子体合成微晶硅薄膜

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984116

D. Kikukawa, K. Honma, M. Hori, T. Goto

{"title":"Synthesis of microcrystalline silicon thin films using a low-pressure microwave plasma","authors":"D. Kikukawa, K. Honma, M. Hori, T. Goto","doi":"10.1109/IMNC.2001.984116","DOIUrl":"https://doi.org/10.1109/IMNC.2001.984116","url":null,"abstract":"Microwave plasma (MWP) has been used for the formation of microcrystalline silicon (/spl mu/c-Si:H) thin films since MWP has low electron temperatures, -2.4 eV, and high electron densities, /spl sim/10/sup 10/ cm/sup -3/ (Shirai et al, Jpn. J. Appl. Phys. vol. 37, p. L1078, 1998). Generally in the MWP system, the plasma is not generated stably at a low pressure. In this study, we have developed a new MWP source operating at low pressure. The low pressure MWP will enable us to form the /spl mu/c-Si:H film over a large area. We have investigated the growth of /spl mu/c-Si:H thin films and the effect of dilution gases such as Ar and Xe on film properties at low pressure in SiH/sub 4/-H/sub 2/ MWP. The crystallinity of films was investigated by Raman spectroscopy and X-ray diffraction (XRD). The absolute density of H atoms was evaluated by vacuum ultraviolet absorption spectroscopy (VUVAS). The time-evolution spectra of chemical bonds in the initial film were obtained by in-situ Fourier transform infrared spectroscopy attenuated total reflection (FT-IR ATR).","PeriodicalId":202620,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124420392","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Structure and resonant characteristics of amorphous carbon pillars grown by FIB-CVD FIB-CVD生长非晶碳柱的结构和谐振特性

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984200

J. Fujita, M. Ishida, T. Ichihashi, T. Sakamoto, Y. Ochiai, T. Kaito, S. Matsui

{"title":"Structure and resonant characteristics of amorphous carbon pillars grown by FIB-CVD","authors":"J. Fujita, M. Ishida, T. Ichihashi, T. Sakamoto, Y. Ochiai, T. Kaito, S. Matsui","doi":"10.1109/IMNC.2001.984200","DOIUrl":"https://doi.org/10.1109/IMNC.2001.984200","url":null,"abstract":"Beam induced deposition is a superior technique for nano-fabrication and nano-mechanics that allows many degrees of freedom, so that any shape can be grown at any position with nanometer accuracy. We have already reported the three-dimensional growth of amorphous carbon, having a nanostructure of wineglass, coils, and bellows, using precursor of phenanthrene gas and a focused Ga+ ion beam (FIB) induced chemical vapor deposition (CVD). High-precision Ga-ion beams controlled by highly stabilized ion optics in an FIB system (SM15020, SEIKO Instruments) enabled not only normal growth of carbon nano-pillars on substrate, but also lateral growth. In this paper, we report an evaluation of the Young's modulus of such amorphous carbon pillars by measuring the resonant frequency of pillars Many improvements are needed in our experimental conditions to clearly define the growth condition. However, the very large Young's modulus and the flexibility of the nano-structure fabrication in FIB-CVD holds great possibility for future applications of these DLC pillars grown by FIB-CVD.","PeriodicalId":202620,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)","volume":"474 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2001-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114893429","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Fourier analysis of line-edge roughness in calixarene fine patterns 杯芳烃精细图案线边缘粗糙度的傅立叶分析

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI: 10.1109/IMNC.2001.984196

M. Ishida, J. Fujita, Y. Ochiai, H. Yamamoto, S. Touno

引用次数: 2

"Actinic-only" defects in EUVL mask blanks-native defects, barely detectable by visible-light inspection EUVL掩模衬布中的“仅光化”缺陷——原生缺陷，几乎无法通过可见光检查检测到

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-01 DOI: 10.1109/IMNC.2001.984102

M. Yi, T. Haga, C. Walton, J. Bokor

引用次数: 0

Electrical transport properties of poly(G)-poly(C) DNA molecules 聚(G)-聚(C) DNA分子的电输运性质

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 1900-01-01 DOI: 10.1109/IMNC.2001.984207

J. Hwang, G.S. Lee, K. J. Kong, D. Ahn, S. Hwang, D. Ahn

引用次数: 0

Effects of LDD spacer etches on spacer widths, subsequent oxide growths and yield enhancement LDD间隔片蚀刻对间隔片宽度、随后的氧化物生长和收率提高的影响

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 1900-01-01 DOI: 10.1109/IMNC.2001.984164

K. Rho

引用次数: 1

Microfabricated electrical connector for AFM probes with integrated sensor/actuator 用于集成传感器/执行器的AFM探针的微制造电连接器

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 1900-01-01 DOI: 10.1109/IMNC.2001.984064

T. Akiyama, U. Staufer, N. D. de Rooij

引用次数: 0

Low dielectric constant SILK films as bottom antireflective coating layers for both KrF and ArF lithography 低介电常数SILK薄膜作为KrF和ArF光刻的底部抗反射涂层

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 1900-01-01 DOI: 10.1109/IMNC.2001.984124

H. Chen, F. Ko, T. Chu, H.C. Cheng, T. Huang

引用次数: 0

Microbubble actuators - an introduction to microscale thermal fluid engineering 微泡致动器-微尺度热流体工程导论

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 1900-01-01 DOI: 10.1109/IMNC.2001.984063

K. Takahashi

{"title":"Microbubble actuators - an introduction to microscale thermal fluid engineering","authors":"K. Takahashi","doi":"10.1109/IMNC.2001.984063","DOIUrl":"https://doi.org/10.1109/IMNC.2001.984063","url":null,"abstract":"Liquid-gas interface often appears in the microfluidic systems due to dissolved and residual gas or thermally generated vapor. Thermal expansion of bubble is the most famous way to control this interface and is used as the micro pumping engine in the thermal ink-jet printer. On the other hand, thermocapillary force of droplet is successfully applied in the micro optical switch. This force is based on the controllability of surface tension that depends on temperature. In thermal fluid engineering, a similar phenomena appears on bubbles and liquid surfaces in temperature or concentration gradient and is known generally as Marangoni effect. The contemporary microfabrication technique enables us to fabricate a microheater tiny enough to control temperature quickly and precisely in micro length scale. Consequently the Marangoni effect or thermocapillary force on microbubbles can be managed artificially and the microbubble of the order of hundreds micrometers can be driven without any movable part. Novel actuators using microbubble and their microfluidic mechanisms are explained.","PeriodicalId":202620,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115131149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3