Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)最新文献

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Direct patterning on low dielectric constant materials with electron beam lithography 低介电常数材料的电子束光刻直接图案化

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 1900-01-01 DOI: 10.1109/IMNC.2001.984143

Ben-Chang Chen, Yee-Kai Lai, F. Ko, C. Chou, Hsuen‐Li Chen

引用次数: 0

Room temperature nanoimprint technology 室温纳米压印技术

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 1900-01-01 DOI: 10.1109/IMNC.2001.984111

Y. Igaku, S. Matsui, H. Ishigaki, J. Fujita, M. Ishida, Y. Ochiai, M. Komuro, H. Hiroshima, H. Namatsu

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引用次数: 0

Development of bio-MEMS devices for single cell expression analysis 用于单细胞表达分析的生物mems器件的开发

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 1900-01-01 DOI: 10.1109/IMNC.2001.984154

T. Ichiki, T. Hara, T. Ujiie, Y. Horiike, K. Yasuda

引用次数: 1

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