Microbubble actuators - an introduction to microscale thermal fluid engineering

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 1900-01-01 DOI:10.1109/IMNC.2001.984063

K. Takahashi

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引用次数: 3

Abstract

Liquid-gas interface often appears in the microfluidic systems due to dissolved and residual gas or thermally generated vapor. Thermal expansion of bubble is the most famous way to control this interface and is used as the micro pumping engine in the thermal ink-jet printer. On the other hand, thermocapillary force of droplet is successfully applied in the micro optical switch. This force is based on the controllability of surface tension that depends on temperature. In thermal fluid engineering, a similar phenomena appears on bubbles and liquid surfaces in temperature or concentration gradient and is known generally as Marangoni effect. The contemporary microfabrication technique enables us to fabricate a microheater tiny enough to control temperature quickly and precisely in micro length scale. Consequently the Marangoni effect or thermocapillary force on microbubbles can be managed artificially and the microbubble of the order of hundreds micrometers can be driven without any movable part. Novel actuators using microbubble and their microfluidic mechanisms are explained.

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微泡致动器-微尺度热流体工程导论

在微流控系统中，由于溶解气体和残余气体或热生成蒸汽的存在，经常出现液气界面。气泡热膨胀是控制该界面的最著名的方法，在热敏喷墨打印机中被用作微泵发动机。另一方面，将液滴的热毛细力成功地应用于微光开关。这种力是基于表面张力的可控性，而这种可控性取决于温度。在热流体工程中，气泡和液体表面在温度或浓度梯度上也会出现类似的现象，通常称为马兰戈尼效应。现代微加工技术使我们能够制造出足够小的微加热器，以便在微长度尺度上快速精确地控制温度。因此，可以人为地控制微泡上的马兰戈尼效应或热毛细力，并且可以在没有任何可动部件的情况下驱动数百微米量级的微泡。介绍了新型微气泡致动器及其微流控机理。

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Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)

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