Structure and resonant characteristics of amorphous carbon pillars grown by FIB-CVD

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI:10.1109/IMNC.2001.984200

J. Fujita, M. Ishida, T. Ichihashi, T. Sakamoto, Y. Ochiai, T. Kaito, S. Matsui

{"title":"Structure and resonant characteristics of amorphous carbon pillars grown by FIB-CVD","authors":"J. Fujita, M. Ishida, T. Ichihashi, T. Sakamoto, Y. Ochiai, T. Kaito, S. Matsui","doi":"10.1109/IMNC.2001.984200","DOIUrl":null,"url":null,"abstract":"Beam induced deposition is a superior technique for nano-fabrication and nano-mechanics that allows many degrees of freedom, so that any shape can be grown at any position with nanometer accuracy. We have already reported the three-dimensional growth of amorphous carbon, having a nanostructure of wineglass, coils, and bellows, using precursor of phenanthrene gas and a focused Ga+ ion beam (FIB) induced chemical vapor deposition (CVD). High-precision Ga-ion beams controlled by highly stabilized ion optics in an FIB system (SM15020, SEIKO Instruments) enabled not only normal growth of carbon nano-pillars on substrate, but also lateral growth. In this paper, we report an evaluation of the Young's modulus of such amorphous carbon pillars by measuring the resonant frequency of pillars Many improvements are needed in our experimental conditions to clearly define the growth condition. However, the very large Young's modulus and the flexibility of the nano-structure fabrication in FIB-CVD holds great possibility for future applications of these DLC pillars grown by FIB-CVD.","PeriodicalId":202620,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)","volume":"474 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.2001.984200","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

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Abstract

Beam induced deposition is a superior technique for nano-fabrication and nano-mechanics that allows many degrees of freedom, so that any shape can be grown at any position with nanometer accuracy. We have already reported the three-dimensional growth of amorphous carbon, having a nanostructure of wineglass, coils, and bellows, using precursor of phenanthrene gas and a focused Ga+ ion beam (FIB) induced chemical vapor deposition (CVD). High-precision Ga-ion beams controlled by highly stabilized ion optics in an FIB system (SM15020, SEIKO Instruments) enabled not only normal growth of carbon nano-pillars on substrate, but also lateral growth. In this paper, we report an evaluation of the Young's modulus of such amorphous carbon pillars by measuring the resonant frequency of pillars Many improvements are needed in our experimental conditions to clearly define the growth condition. However, the very large Young's modulus and the flexibility of the nano-structure fabrication in FIB-CVD holds great possibility for future applications of these DLC pillars grown by FIB-CVD.

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FIB-CVD生长非晶碳柱的结构和谐振特性

光束诱导沉积是纳米制造和纳米力学的一种优越技术，它允许许多自由度，因此可以在任何位置以纳米精度生长任何形状。我们已经报道了使用菲气体前驱体和聚焦Ga+离子束(FIB)诱导化学气相沉积(CVD)制备非晶碳的三维生长，具有葡萄酒杯、线圈和波纹管的纳米结构。在FIB系统(SM15020, SEIKO Instruments)中，由高度稳定的离子光学元件控制的高精度ga离子束不仅可以实现碳纳米柱在衬底上的正常生长，而且可以实现横向生长。本文通过测量非晶碳柱的谐振频率来评估这种非晶碳柱的杨氏模量，我们的实验条件需要进行许多改进，以明确地定义生长条件。然而，FIB-CVD纳米结构制造的巨大杨氏模量和灵活性为FIB-CVD生长的DLC柱的未来应用提供了很大的可能性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)

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