TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)最新文献_第6页

Design and fabrication of an electrostatically actuated MEMS probe card 静电驱动MEMS探针卡的设计与制造

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217067

K. Shingo, K. Kataoka, T. Itoh, T. Suga

{"title":"Design and fabrication of an electrostatically actuated MEMS probe card","authors":"K. Shingo, K. Kataoka, T. Itoh, T. Suga","doi":"10.1109/SENSOR.2003.1217067","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217067","url":null,"abstract":"We have designed and fabricated a new type of MEMS probe card consisting of electrostatically-driven microprobes, which can be used for a next generation wafer probe card with the fritting-contact method. MEMS probe cards are requisite to higher pad-density and smaller pad-pitch chips, and are effective in high frequency testing. If a probe card consists of an array of actuator-integrated microprobes, it has some further advantages. Since the deflection of each probe can individually be controlled, probe-pad contact force can be uniform by compensating the probe-pad distance deviation with probe deflection. Furthermore, since contacts can directly be switched on and off, it could be suitable for a wafer-level test/burn-in probe card. To obtain a design guideline of actuator-integrated probes, we investigated the characteristics of fritting contact between electroplated Ni probes and Al electrodes. As a result, it has been found that both the contact and disconnection forces of Ni probes in fritting contact process could be as small as 10 /spl mu/N. We proposed a MEMS probe card that is composed of an array of Ni microcantilevers with a rolling-contact touch-mode electrostatic actuator and developed a micromachining process which includes electroplating deposition of two layers having different internal stress and etching of Cu sacrifice layer.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123681508","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 10

Thermally driven microactuator containing thermal isolation structure with polyimide and its application to microvalve 聚酰亚胺隔热结构热驱动微执行器及其在微阀上的应用

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217171

H. Kawada, H. Yoshida, M. Kamakura, K. Yoshida, M. Saitou, K. Kawahito, S. Tomonari

引用次数: 5

A single crystal SiC plug-and-play high temperature drag force transducer 单晶SiC即插即用高温阻力传感器

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215338

R. Okojie, G. Fralick, G. Saad, C. Blaha, J. Adamczyk, J. Feiereisen

{"title":"A single crystal SiC plug-and-play high temperature drag force transducer","authors":"R. Okojie, G. Fralick, G. Saad, C. Blaha, J. Adamczyk, J. Feiereisen","doi":"10.1109/SENSOR.2003.1215338","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215338","url":null,"abstract":"A novel fully packaged single crystal piezoresistive 6H-silicon carbide (6H-SiC) drag force transducer based on cantilever beam deflection was demonstrated for the first time in a hot (/spl sim/600/spl deg/C) section of a gas turbine engine to study turbulence. The beam deflection was directly proportional to the force induced by the flow stream. The induced strain was transferred to the piezoresistors etched into the 6H-SiC epilayer, which changes in resistance and read out externally as the output of the Wheatstone bridge circuit. The transducer natural frequency was measured to be 35 kHz and was in good agreement with the calculated value of 35.7 kHz. The presumed turbulence was extracted by subtracting the ensemble mean waveform signal and averaging the results. The post engine test at lower temperature and up to Mach 0.8 indicated the typical second order, /spl nu//sup 2/, where /spl nu/ is the average flow velocity. This result confirmed that the transducer survived the high temperature test. The result provided further confirmation of the potential application of semiconductor SiC as a piezoresistive sensor in temperatures that are beyond the functional capability of conventional silicon based sensors.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125953179","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 11

Silicon MEMS micro-switch with charge-induced retention 带有电荷诱导保留的硅MEMS微开关

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217116

K. Suzuki, Y. Neav

引用次数: 4

Silicon-carbide Schottky diodes with sputtered and laser-ablated thin-Pt gate as NO gas sensors in high temperature 具有溅射和激光烧蚀薄铂栅极的碳化硅肖特基二极管作为高温NO气体传感器

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215370

S. A. Khan, G. Wei, E. A. de Vasconcelos, H. Uchida, T. Katsube

引用次数: 0

Piezolectric 2D micro scanner for minimally invasive therapy fabricated using femtosecond laser ablation 用飞秒激光消融制造的用于微创治疗的压电二维微扫描仪

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215545

N. Kikuchi, Y. Haga, M. Maeda, W. Makishi, M. Esashi

引用次数: 10

Surface magnetic flux imager using CMOS three-phase lock-in camera 表面磁通成像仪采用CMOS三相锁相相机

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215314

S. Ando

引用次数: 0

Si-based micro probe card with sharp knife-edged tips combined metal deposition 硅基微探针卡与锋利的刀尖结合金属沉积

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215588

Younghak Cho, T. Kuki, Y. Fukuta, H. Fujita, B. Kim

引用次数: 3

A poly-Si thermoelectric cooling device fabricated by surface micromachining technology 一种表面微加工技术制备的多晶硅热电冷却装置

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216957

J. Lin, H.J.H. Chen, I. Huang, S.R.S. Huang

引用次数: 3

Experimental investigation of electrokinetically generated in-plane vorticity in a microchannel 微通道内电动涡量的实验研究

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215557

W. Hau, L. Lee, Y.-K. Lee, M. Wong, Y. Zohar

引用次数: 13