TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)最新文献_第10页

Investigation of energy loss mechanisms in micromechanical resonators 微机械谐振器中能量损失机制的研究

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215320

R. Candler, H. Li, M. Lutz, W. Park, A. Partridge, G. Yama, T. Kenny

引用次数: 62

Design and fabrication of a flow sensor detecting flow direction and velocity 一种检测流向和流速的流量传感器的设计与制造

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217169

Seunghyun Kim, Sunghyun Kim, Yongduk Kim, Sie-Young Choi, Sekwang Park

引用次数: 8

High modulus polycrystalline 3C-SiC technology for RF MEMS 射频MEMS高模量多晶3C-SiC技术

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216977

D. Gao, M. Wijesundara, C. Carraro, C. W. Low, R. Howe, R. Maboudian

引用次数: 26

Single molecule nano-bioscience 单分子纳米生物科学

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1007/11613022_3

T. Yanagida

引用次数: 9

Micro combustion-thermionic power generation: feasibility, design and initial results 微燃烧-热离子发电:可行性、设计和初步结果

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215248

Chunbo Zhang, K. Najafi, L. Bernal, P. Washabaugh

引用次数: 24

Scalable microfabricated multiphase reactors for direct fluorination reactions 用于直接氟化反应的可伸缩微制造多相反应器

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215558

N. de Mas, A. Gunther, M. Schmidt, K. Jensen

{"title":"Scalable microfabricated multiphase reactors for direct fluorination reactions","authors":"N. de Mas, A. Gunther, M. Schmidt, K. Jensen","doi":"10.1109/SENSOR.2003.1215558","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215558","url":null,"abstract":"We report a stacked multichannel microfabricated gas-liquid reactor to carry out direct fluorination reactions with a volumetric liquid throughput of 81 ml/hr, which translates to grams per hour of fluorinated product. Fluorinated compounds are rarely synthesized by direct fluorination in conventional macroscale reactors due to the difficulties in controlling the large heat of reaction and the poor selectivity of the process. The substantial throughput and inherent safety of our microreactor makes it a promising drug discovery tool. We use pressure drop gas and liquid inlet channels to ensure uniform gas-liquid flow distribution over a large number of reaction channels operating in parallel with single gas and liquid inlet and outlet ports. Microfluidic channels are formed in a (100) silicon substrate using standard photolithographic techniques and nested potassium hydroxide etching. Twenty reaction channels are formed in each silicon layer. Gas and liquid are introduced to all layers through vertical fluidic connections. Alternate layers of drilled Pyrex are anodically bonded to the silicon to provide the vertical fluidic connections. Fluorescence microscopy of the gas-liquid flow regimes obtained in individual reaction channels indicates uniform flow distribution within one reaction layer and across different layers.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129697248","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

High-resolution, high-speed microscanner in single-crystalline silicon actuated by self-aligned dual-mode vertical electrostatic combdrive with capability for phased array operation 高分辨率、高速的单晶硅微扫描仪，由自对准双模垂直静电组合驱动器驱动，具有相控阵操作能力

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215382

D. Lee, U. Krishnamoorthy, K. Yu, O. Solgaard

引用次数: 17

Field-effect flow control in polymer microchannel networks 聚合物微通道网络中的场效应流动控制

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215565

N. Sniadecki, C.S. Lee, M. Beamesderfer, D. DeVoe

{"title":"Field-effect flow control in polymer microchannel networks","authors":"N. Sniadecki, C.S. Lee, M. Beamesderfer, D. DeVoe","doi":"10.1109/SENSOR.2003.1215565","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215565","url":null,"abstract":"A new method for dynamic modulation of electro-osmotic flow (EOF) in plastic microchannel networks has been developed. The method employs field-effect flow control (FEFC) to adjust the zeta potential at the microchannel wall simply by biasing a gate electrode separated from the flow channel by a dielectric Parylene C film. The utility of this method is demonstrated by generating induced pressure-driven flow created by a differential EOF pumping rate. By varying the voltages applied to the FEFC gate electrodes in two microchannels at a T-intersection, the induced pressure at the intersection generates pumping in the connected third, field-free microchannel. The FEFC gate electrodes are able to change the magnitude and direction of the pressure pumping by inducing either a negative or positive pressure at the intersection. The flow velocity is tracked by neutralized fluorescent microbeads in the microchannels. The method described here provides an elegant mechanism for flow control in complex plastic microchannel networks. Furthermore, the ability to induce pumping by differential EOF provides important benefits for applications where zero electric fields must be maintained in the main flow channel, for example for example in the presence of high ionic mobility solutions.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"360 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124541062","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

A novel microneedle array integrated with a PDMS biochip for microfluid systems 一种集成PDMS生物芯片的新型微针阵列，用于微流体系统

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217048

S. Paik, Jung-Min Lim, Il-Woo Jung, Yonghwa Park, Sangwon Byun, S. Chung, K. Chun, J. Chang, Dongil Cho

引用次数: 22

Integrated 5.7 GH size antenna for wireless sensor networks 集成5.7 GH尺寸的无线传感器网络天线

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215250

P. Mendes, A. Polyakov, M. Bartek, J. Burghartz, J. Correia

引用次数: 22