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TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)最新文献

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Continuous paramagnetophoretic microseparator for blood cells 连续顺磁电泳血细胞微分离器
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-08-04 DOI: 10.1109/SENSOR.2003.1216994
Ki-Ho Han, J. Landers, A. B. Frazier
{"title":"Continuous paramagnetophoretic microseparator for blood cells","authors":"Ki-Ho Han, J. Landers, A. B. Frazier","doi":"10.1109/SENSOR.2003.1216994","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1216994","url":null,"abstract":"This paper presents a continuous paramagnetophoretic (PMP) microseparator for directly separating blood cells from whole blood by using a high gradient magnetic separation (HGMS) method. For high magnetic separation force, the present PMP separator is fabricated by microfabrication technology, and directly separates red and white blood cells from whole blood based on their magnetic properties. The theoretical model of the PMP microseparator is derived, and simulated values are compared with calculated values. A quantitative analysis using a hemocytometer shows that 92% of red blood cells are separated from whole blood by the present PMP microseparator.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-08-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122542454","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Analog micromirror arrays with orthogonal scanning directions for wavelength-selective 1XN/sup 2/ switches 用于波长选择性1XN/sup /开关的正交扫描方向模拟微镜阵列
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217130
J. Tsai, S. Huang, D. Hah, M. Wu
{"title":"Analog micromirror arrays with orthogonal scanning directions for wavelength-selective 1XN/sup 2/ switches","authors":"J. Tsai, S. Huang, D. Hah, M. Wu","doi":"10.1109/SENSOR.2003.1217130","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217130","url":null,"abstract":"A new high-port-count wavelength selective switch has been realized using two cross-scanning 1-axis analog micromirror arrays in a 4-f optical system. The number of output ports is increased from N to N/sup 2/, where N is the maximum linear port count limited by optical diffraction. Using surface-micromachined micromirrors with hidden vertical combdrives, large scan angles (>/spl plusmn/5/spl deg/ mechanical), low drive voltages (7 V), and high fill factors (>96.25%) are achieved for both scanning mirrors. Experimental results of our 1/spl times/8 (3/spl times/3 collimator array) wavelength-selective switch are also reported. A fiber-to-fiber insertion loss of 6 dB and a switching time of < 700 /spl mu/sec have been achieved.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"301 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115285863","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Capillary filling of micro-reservoirs with various cross sections 不同截面微储层的毛细充填
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217158
F. Goldschmidtboing, R. Schlosser, S. Schonhardt, P. Woias
{"title":"Capillary filling of micro-reservoirs with various cross sections","authors":"F. Goldschmidtboing, R. Schlosser, S. Schonhardt, P. Woias","doi":"10.1109/SENSOR.2003.1217158","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217158","url":null,"abstract":"Any microfluidic device depends on a proper and complete filling with liquid. In many cases entrapped air bubbles will drastically alter device performance and thus have to be avoided. Especially the dosing of liquids with micropumps or free jet dispensers is heavily influenced by the existence of gas bubbles. Also optical detection in microfluidic systems may fail due to light reflection at entrapped gas bubbles. In consequence a reliable liquid filling is a key design issue in microfluidics. Although the importance of this attribute is commonly accepted there is no established set of design rules for the geometry of \"filling-friendly\" microfluidic structures. We have therefore examined the filling of fluidic reservoirs and channels with arbitrary cross-sections to provide design rules for self-priming.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124467662","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Micro-finger articulation by pneumatic parylene balloons 用气动聚对二甲苯气球实现微型手指关节
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215306
Yipeng Lu, C. Kim
{"title":"Micro-finger articulation by pneumatic parylene balloons","authors":"Yipeng Lu, C. Kim","doi":"10.1109/SENSOR.2003.1215306","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215306","url":null,"abstract":"Articulated micro-fingers have been developed as an important building block to construct micro-robotic end-effectors such as a micro-hand. This micro-finger features robust finger segments made from bulk silicon, pneumatically driven balloon joints made of Parylene thin film, and monolithic integration to minimize leakage. We present the device concept, joint mechanism, and fabrication processes, as well as test results. For the current specification, each finger is measured to exert over 0.15 mN at 120 psi.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116953642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 35
An electromagnetically actuated bi-stable MEMS optical microswitch 一种电磁驱动双稳态MEMS光微动开关
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217065
H. Gatzen, E. Obermeier, T. Kohlmeier, T. Budde, Ha Duong Ngao, B. Mukhopadhyay, M. Farr
{"title":"An electromagnetically actuated bi-stable MEMS optical microswitch","authors":"H. Gatzen, E. Obermeier, T. Kohlmeier, T. Budde, Ha Duong Ngao, B. Mukhopadhyay, M. Farr","doi":"10.1109/SENSOR.2003.1217065","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217065","url":null,"abstract":"An optical microswitch with electromagnetic actuation was developed and tested. The system consists of a micromachined mirror fabricated on one silicon wafer and a magnetic actuation system fabricated on a second. A spacer defines the appropriate distance between the wafers. The bottom wafer carries the magnetic active part consisting of two pairs of coil systems and flux guides. The top wafer contains the poly silicon mirror suspended on a pair of torsional beams as well as a magnetic ring for flux closure. Exciting one of the coil systems exerts a force on the corresponding flux closure pulling it downwards to the actuator system and tilting the mirror in the respective direction. Bumps on top of the magnetic pole surface restrict the mirror's movement. The optical switch a designed for a total rotational angle of /spl plusmn/5 degrees.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124724470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
A cellular motor driven microfluidic system 一种细胞马达驱动的微流体系统
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215564
Steve Tung, Jin-Woo Kimb, Ajay Malshea, Chuen Cheak Leea, R. Pooran
{"title":"A cellular motor driven microfluidic system","authors":"Steve Tung, Jin-Woo Kimb, Ajay Malshea, Chuen Cheak Leea, R. Pooran","doi":"10.1109/SENSOR.2003.1215564","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215564","url":null,"abstract":"We are designing and fabricating a microfluidic pump that is controlled and driven by biological cellular motors. This novel pump is realized through the integration of a harmless strain of Escherichia coli cells with a MEMS-based microfluidic channel. In a free-moving state, each E. coli cell 'swims' by rotating its flagella, driven at the base by a rotary motor. When the cell is attached to a surface through a single shortened flagellar filament, the motor turns the whole cell body at a high rotational speed. Our micro pump utilizes this mechanism to transport liquid in a microfluidic channel through viscous pumping. This paper describes our effort in two critical areas in the pump development process: microfluidic flow simulations and cell tethering experiments in a micro channel.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124885934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 20
Culture-based microfluidic device for environmental monitoring 基于培养的环境监测微流控装置
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216997
G. Jing, A. Polaczyk, D. B. Oerther, I. Papautsky
{"title":"Culture-based microfluidic device for environmental monitoring","authors":"G. Jing, A. Polaczyk, D. B. Oerther, I. Papautsky","doi":"10.1109/SENSOR.2003.1216997","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1216997","url":null,"abstract":"In this paper, we describe a culture-based microfluidic device for detecting nocardioforms in environmental samples in an improved, timesaving, and cost-efficient manner. Our device uses paraffinophilic nature of nocardioforms and mycobacteria to selectively culture and detect these microorganisms. Our goal is to improve screening for mycobacteria to protect public health as well as screening for nocardioforms to reduce the costs associated with treating nocardiafoam at sewage treatment plants.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126617072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Molecule cascades: nanometer-scale molecular architectures that compute 分子级联:计算的纳米级分子结构
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215239
C. P. Lutz, Andreas J. Heinrich, Jay Gupta, D. Eigler
{"title":"Molecule cascades: nanometer-scale molecular architectures that compute","authors":"C. P. Lutz, Andreas J. Heinrich, Jay Gupta, D. Eigler","doi":"10.1109/SENSOR.2003.1215239","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215239","url":null,"abstract":"We present a nanometer-scale computation scheme in which all of the devices and interconnects required for the one-time computation of an arbitrary logic function are implemented by atomically-precise arrangements of molecules bound to a surface. The motion of one CO molecule on a Cu (111) surface causes a nearby molecule to hop to a new site, which in turn moves another molecule, and so on in a cascade of motion similar to a row of toppling dominoes. This cascade communicates one bit of information across the surface. Logic gates and other devices are implemented by engineered arrangements of molecules at the intersections of these cascades. We use a low-temperature scanning tunnelling microscope to assemble and demonstrate a 3-input sorter that uses several AND gates and OR gates, and the crossover and fan-out units needed to connect them.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122836683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Thin film nano thermocouple sensors for applications in laser and electron beam irradiation 薄膜纳米热电偶传感器在激光和电子束辐照中的应用
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216964
Dachen Chu, D. T. Bilir, R. F. Pease, K. Goodson
{"title":"Thin film nano thermocouple sensors for applications in laser and electron beam irradiation","authors":"Dachen Chu, D. T. Bilir, R. F. Pease, K. Goodson","doi":"10.1109/SENSOR.2003.1216964","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1216964","url":null,"abstract":"The continuous shrinking of transistors in VLSI circuits requires thermometry with high spatial, temporal and thermal resolution. Thin film thermocouple sensors have the potential to achieve small sensing volumes and junction areas. Gold/nickel thin film thermocouples with minimum junction size of (100 nm)/sup 2/ have been fabricated and characterized. While the smaller sensors improve spatial and temporal resolution, the data show reductions in the Seebeck coefficient (temperature sensitivity) and a larger influence of noise. These thin film thermocouples are used to determine the temperature profile of solid-state structures subjected to laser and electron beam irradiation.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122929071","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 21
Parylene neuro-cages for live neural networks study 用于实时神经网络研究的聚对二甲苯神经笼
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216935
Qing He, E. Meng, Y. Tai, C. Rutherglen, J. Erickson, J. Pine
{"title":"Parylene neuro-cages for live neural networks study","authors":"Qing He, E. Meng, Y. Tai, C. Rutherglen, J. Erickson, J. Pine","doi":"10.1109/SENSOR.2003.1216935","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1216935","url":null,"abstract":"Here we present a surface-micromachined Parylene neuro-cage array for the in vitro study of live neural networks. Various types of neuro-cages have been fabricated and several adhesion promotion techniques have been explored. The biocompatibility and mechanical robustness of Parylene neuro-cages have been demonstrated through cell culture experiments. Dissociated neuronal cell bodies have been inserted one to a cage and cultured, allowing neurites to grow out through Parylene channels and form live neural networks. In addition, there is no observable difference between neural growth on Parylene and on oxide surfaces. It is possible to use the same or slightly modified cage structures to accommodate different cells, leading to possible applications of this technology in cell study and drug discovery.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122955256","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 28
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