Analog micromirror arrays with orthogonal scanning directions for wavelength-selective 1XN/sup 2/ switches

Abstract

A new high-port-count wavelength selective switch has been realized using two cross-scanning 1-axis analog micromirror arrays in a 4-f optical system. The number of output ports is increased from N to N/sup 2/, where N is the maximum linear port count limited by optical diffraction. Using surface-micromachined micromirrors with hidden vertical combdrives, large scan angles (>/spl plusmn/5/spl deg/ mechanical), low drive voltages (7 V), and high fill factors (>96.25%) are achieved for both scanning mirrors. Experimental results of our 1/spl times/8 (3/spl times/3 collimator array) wavelength-selective switch are also reported. A fiber-to-fiber insertion loss of 6 dB and a switching time of < 700 /spl mu/sec have been achieved.