Micro-finger articulation by pneumatic parylene balloons

Articulated micro-fingers have been developed as an important building block to construct micro-robotic end-effectors such as a micro-hand. This micro-finger features robust finger segments made from bulk silicon, pneumatically driven balloon joints made of Parylene thin film, and monolithic integration to minimize leakage. We present the device concept, joint mechanism, and fabrication processes, as well as test results. For the current specification, each finger is measured to exert over 0.15 mN at 120 psi.