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TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)最新文献

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A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high-temperature gas microreactors 一种在高温气体微反应器深流道中精确沉积催化剂薄膜的新技术
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215581
R. Tiggelaar, J. Berenschot, R. E. Oosterbroek, P. van Male, M. de Croon, J. Schouten, A. van den Berg, M. Elwenspoek
{"title":"A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high-temperature gas microreactors","authors":"R. Tiggelaar, J. Berenschot, R. E. Oosterbroek, P. van Male, M. de Croon, J. Schouten, A. van den Berg, M. Elwenspoek","doi":"10.1109/SENSOR.2003.1215581","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215581","url":null,"abstract":"By using microreactors fabricated with silicon microtechnology, heterogeneous catalyzed gas-phase reactions can be studied which are difficult to control because of their exothermic nature, are explosive or use toxic/hazardous gases. In this type of microreactors, catalytic materials like rhodium or platinum are deposited on a thin membrane in deep trenches. Conventional techniques, like lift-off lithography, cannot be used in deep trenches and deposition through flat shadow masks does not yield well-defined regions of catalyst. For well-controlled deposition of a catalytic thin film on a membrane located in a deep trench, a technique is developed using sputter deposition with a 3-dimensionally shaped 'self-aligning' shadow mask.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114855384","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Smart single-chip CMOS microhotplate array for metal-oxide-based gas sensors 用于金属氧化物气体传感器的智能单芯片CMOS微热板阵列
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215268
M. Graf, D. Barrettino, P. Kaser, J. Cerdà, A. Hierlemann, H. Baltes
{"title":"Smart single-chip CMOS microhotplate array for metal-oxide-based gas sensors","authors":"M. Graf, D. Barrettino, P. Kaser, J. Cerdà, A. Hierlemann, H. Baltes","doi":"10.1109/SENSOR.2003.1215268","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215268","url":null,"abstract":"A monolithic gas sensor system is presented, which includes on a single chip an array of three metal-oxide covered microhotplates, each of which is individually addressable and can be operated at a defined temperature. The monolithically co-integrated circuitry consists of three independent temperature control loops for the microhotplates and an on-chip temperature sensor. An innovative design of a circular-shape microhotplate has been realized. Temperature homogeneity and thermal efficiency of the membrane were optimized for use with thick films of nanocrystalline metal oxides as sensitive layers. A SnO/sub 2/-based sensing material with noble metal doping was operated at different temperatures as well as in temperature pulsing mode. Chemical sensor measurements have been conducted with, e.g., CO to show the system performance.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117108907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Temperature gradient gel electrophoresis in an integrated polycarbonate microsystem 温度梯度凝胶电泳集成聚碳酸酯微系统
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215244
C. Kimball, J. Buch, C. Lee, D. DeVoe
{"title":"Temperature gradient gel electrophoresis in an integrated polycarbonate microsystem","authors":"C. Kimball, J. Buch, C. Lee, D. DeVoe","doi":"10.1109/SENSOR.2003.1215244","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215244","url":null,"abstract":"We have demonstrated for the first time temperature gradient gel electrophoresis (TGGE) in an integrated polycarbonate microfluidic system. The temperature gradient was controlled by sensors and heaters lithographically patterned directly on the polycarbonate substrate. Integrating micro heaters and sensors on the substrate requires significantly less power and allows faster response times compared with previously demonstrated macro-scale heaters, providing for highly efficient control of the temperature gradient. The ability of this platform to perform DNA mutational analyses by TGGE using a spatial temperature gradient is demonstrated.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116065466","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A water spectroscopy microsystem with integrated discharge source, dispersion optics, and sample delivery 水光谱微系统集成放电源，色散光学，和样品输送
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215246
L. Que, C. Wilson, J.-A.E. de La Rode, Y. Gianchandani
{"title":"A water spectroscopy microsystem with integrated discharge source, dispersion optics, and sample delivery","authors":"L. Que, C. Wilson, J.-A.E. de La Rode, Y. Gianchandani","doi":"10.1109/SENSOR.2003.1215246","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215246","url":null,"abstract":"This paper reports a microsystem integrating the fluidic, electrical and optical elements required for field-portable water-chemistry testing by electric discharge spectroscopy. The device utilizes a DC microdischarge as a spectroscopic source. The discharge is created by applying a DC voltage between a metal anode and uses the water sample as the cathode. Impurities are sputtered from the water sample into the microdischarge. A blazed grating is used as the dispersion element, along with an aperture fabricated on a glass substrate. The microsystem is assembled and used with a CCD sensing element to distinguish atomic spectra. Two versions of the microsystem have been implemented: planar and a capillary tube-based device. Detection of Cr and other chemicals in water samples has been successfully demonstrated with both devices.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115274081","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Microfabricated electrode arrays for restoring lost sensory and motor functions 用于恢复失去的感觉和运动功能的微制造电极阵列
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216926
R. Normann
{"title":"Microfabricated electrode arrays for restoring lost sensory and motor functions","authors":"R. Normann","doi":"10.1109/SENSOR.2003.1216926","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1216926","url":null,"abstract":"The possibility of communicating directly to large numbers of neurons in the central and peripheral nervous system using new types of microelectrode arrays has motivated the exploration of this technology as a means to restore sensory and/or motor function in those who have lost these functions due to disease or trauma. This paper describes one such microelectrode array, the 'Utah Electrode Array', and its application in 1) the restoration of sight and 2) in enabling patients with severe neuromuscular disease to more effectively interact with their environment. Although these devices have not reached the clinical stage, ongoing animal experimentation is providing proof-of-concept.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123738548","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 18
Dispensing well plate (DWP): a highly integrated nanoliter dispensing system 点胶孔板(DWP):高度集成的纳升点胶系统
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215242
P. Koltay, B. Bohl, S. Taoufik, R. Steger, S. Messner, H. Sandmaier, R. Zengerle
{"title":"Dispensing well plate (DWP): a highly integrated nanoliter dispensing system","authors":"P. Koltay, B. Bohl, S. Taoufik, R. Steger, S. Messner, H. Sandmaier, R. Zengerle","doi":"10.1109/SENSOR.2003.1215242","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215242","url":null,"abstract":"This paper reports on the analysis of the Dispensing Well Plate (DWP) micro dispenser. The DWP device is able to deliver simultaneously hundreds to thousands of different liquids in the range of 10 to 100 nL at a very high level of system integration. The presented prototype with 96 parallel dispensing channels comprising a fixed dosage volume of 50 nL each has been manufactured using a new low cost production process based on SU-8. The dispensing dynamics of the DWP prototype is studied on basis of computational fluid dynamic (CFD) simulations and experimental data. Critical parameters for fabrication and design rules for performance optimisation are identified and quantified, such as the nozzle shape and the fluidic resistance of the capillary channel.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"208 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123009947","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Composite photopolymer microstructures: from planar to 3D devices 复合光聚合物微结构:从平面到3D器件
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216934
P. Renaud, S. Metz, S. Jiguet, A. Bertsch
{"title":"Composite photopolymer microstructures: from planar to 3D devices","authors":"P. Renaud, S. Metz, S. Jiguet, A. Bertsch","doi":"10.1109/SENSOR.2003.1216934","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1216934","url":null,"abstract":"In this paper, a survey is made of some technologies in which the photo-definable polymer is used as structural material and where physical properties of polymers are modified to change porosity, mechanical or electrical properties. The paper is organized in three sections: (a) 2D, multilayer photopolymers, (b) High aspect ratio and (c) 3D micro-stereolithography technologies. In addition the authors mention some development in which photo-polymerization is used to locally create special structures.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"84 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123526037","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter 径向体环形谐振器:面向50/spl ω / RF MEMS滤波器
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215614
B. Bircumshaw, G. Liu, H. Takeuchi, T. King, R. Howe, O. O'Reilly, A. Pisano
{"title":"The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter","authors":"B. Bircumshaw, G. Liu, H. Takeuchi, T. King, R. Howe, O. O'Reilly, A. Pisano","doi":"10.1109/SENSOR.2003.1215614","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215614","url":null,"abstract":"This paper presents a new electrostatic RF MEMS resonator design: the radial bulk annular resonator (RBAR). The RBAR utilizes the bulk radial resonant modes of an annulus. The theory behind the RBAR, and its predecessor the bulk longitudinal resonator (BLR), will be developed and discussed. It is found that the RBAR is capable of achieving an arbitrarily low motional resistance for any desired resonant frequency at the cost of increased average annular radius. This feature makes the RBAR attractive for minimizing insertion loss in bandpass filters.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121711314","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 45
Computational fluid dynamic model and dimensional analysis of diffusion, convection and migration processes in electrochemical sensors 电化学传感器中扩散、对流和迁移过程的计算流体动力学模型及量纲分析
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217078
D. Barak-Shinar, M. Rosenfeld, S. Abboud
{"title":"Computational fluid dynamic model and dimensional analysis of diffusion, convection and migration processes in electrochemical sensors","authors":"D. Barak-Shinar, M. Rosenfeld, S. Abboud","doi":"10.1109/SENSOR.2003.1217078","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217078","url":null,"abstract":"Electrochemical amperometric transducers monitor the electric current through the electrochemical cell and measure the concentration of biological or chemical available species. Experimental work in the field of electrochemical biosensors is extremely interesting, yet the support of these results by theoretical modeling is not well investigated. Using theoretical modeling to understand the physical complex phenomena seems to be challenging and might have significant implications on the optimal design of electrochemical sensors. The present study presents a unique approach for investigating the three processes of mass transfer (diffusion, convection and migration) in the vicinity of an electrochemical sensor and the adjacent layer of the electrode. A 3-D model of the electrochemical cylindrical flow cell with computational fluid dynamic simulations of time dependent diffusion, convection and migration are used. The representation of the physical phenomena by the numerical models makes it possible to predict the time-dependent behavior of the system.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122037232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An electret-based electrostatic /spl mu/-generator 一种基于驻极体的静电发生器
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217009
T. Sterken, P. Fiorini, K. Baert, R. Puers, G. Borghs
{"title":"An electret-based electrostatic /spl mu/-generator","authors":"T. Sterken, P. Fiorini, K. Baert, R. Puers, G. Borghs","doi":"10.1109/SENSOR.2003.1217009","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217009","url":null,"abstract":"This paper proposes a new approach towards mechanical waste energy scavenging, using a micromachined electrostatic converter. The device consists of a vibration sensitive variable capacitor polarized by an electret. The variation of the capacitance results in a current through a load circuit. A physical model of the device is described; in order to obtain a closed form expression for the converted power a linear model is presented. This model shows that 50 /spl mu/W can be generated with a 5 /spl mu/m vibration. A first prototype design based on SOI MPW-service is proposed.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122119516","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 84
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