TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)最新文献_第8页

Novel on-chip microfluidic transport system with electrochemically controlled bubble formation 具有电化学控制气泡形成的新型片上微流控传输系统

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215551

H. Suzuki, R. Yoneyama

引用次数: 1

Symmetry transitions of compressively prestressed long membranes under pressure 压力下压缩预应力长膜的对称转变

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215346

O. Paul, T. Kramer

{"title":"Symmetry transitions of compressively prestressed long membranes under pressure","authors":"O. Paul, T. Kramer","doi":"10.1109/SENSOR.2003.1215346","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1215346","url":null,"abstract":"This paper reports on the mechanical response of long postbuckled membranes to differential pressure. In the absence of pressure, membranes with Poisson's ratio /spl nu/=0.25 and prestrain /spl epsiv//sub 0/ more compressive than the critical value -17.3 t/sup 2//a/sup 2/, with the membrane thickness t and width a, show a meander-shaped postbuckling profile. With increasing pressure load, the structures undergo a second-order transition to a ripple-shaped profile at a critical pressure p/sub cr1/(/spl epsiv//sub 0/), and to a ripple-free profile at a higher critical pressure p/sub cr2/(/spl epsiv//sub 0/). At each transition, the structures gain additional symmetries. These phenomena were experimentally studied on micromachined PECVD silicon nitride thin film membranes. A variational calculus approach enabled p/sub cr1/(/spl epsiv//sub 0/), p/sub cr2/(/spl epsiv//sub 0/), /spl epsiv//sub 0,cr2/, and the symmetry contributions to the membrane profiles to be computed. Based on the numerical results, the prestrain and elastic modulus of a PECVD silicon nitride thin film were extracted as /spl epsiv//sub 0/=-1.78/spl times/10/sup -3/ and E=160 GPa, respectively.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"433 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122474371","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Nickel nano-composite film for MEMS applications 用于MEMS的镍纳米复合薄膜

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217070

K. Teh, Yu-Ting Cheng, Liwei Lin

引用次数: 13

Development of the smart board using metal core piezoelectric complex fibers 金属芯压电复合纤维智能板的研制

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215366

H. Sato, Yoshiro Shimojo, Tadashi Sekiya Smart

引用次数: 18

Lateral thinking: the challenge of microsystems 横向思维:微系统的挑战

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215238

B. Murari

引用次数: 7

A thermophotovoltaic micro-generator for portable power applications 一种用于便携式电源的热光伏微型发电机

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215573

O. M. Nielsen, L. R. Arana, C. D. Baertsch, K. Jensen, M. Schmidt

引用次数: 57

Electronic compass using two-axis micro fluxgate sensing element 采用双轴微磁通门传感元件的电子罗盘

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1217091

J. Hwang, H.-S. Park, D. Shim, K. Na, Wonseo Choi, S. Choi

{"title":"Electronic compass using two-axis micro fluxgate sensing element","authors":"J. Hwang, H.-S. Park, D. Shim, K. Na, Wonseo Choi, S. Choi","doi":"10.1109/SENSOR.2003.1217091","DOIUrl":"https://doi.org/10.1109/SENSOR.2003.1217091","url":null,"abstract":"This paper presents a micro fluxgate sensor fabricated by Si-based Micro Electro Mechanical Systems (MEMS). To measure X- and Y-axis magnetic fields, two fluxgate sensing elements were perpendicularly aligned. The fluxgate sensor was composed of rectangular-ring shaped magnetic core, solenoid excitation and pick-up coils. The 2 /spl mu/m thick Ni/sub 0.8/Fe/sub 0.2/ (permalloy) magnetic core layer was electroplated with photoresist frame using sputtered Ni/sub 0.8/Fe/sub 0.2/ seed layer. The fabricated fluxgate chip size was 4.5/spl times/2.7 mm/sup 2/. Excellent linear response over the range of -100 /spl mu/T to +100 /spl mu/T was obtained with 210 V/T sensitivity at excitation square wave of 2.8 V/sub p-p/ and 1.2 MHz. When two-axis fluxgate sensing element was rotated in terrestrial field, induced second harmonic voltages from X-and Y-axis were sine and cosine wave without distortion, respectively. It is very useful to commercialize the portable navigation system including north-up and map matching, military research, medical research, and space research.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"93 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132747897","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 8

Piezoelectric microactuators in polymer-composite technology 聚合物复合材料技术中的压电微致动器

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1216938

C. Friese, F. Goldschmidtboing, P. Woias

引用次数: 15

A novel micro optical system employing inclined polymer mirrors and Fresnel lens for monolithic integration of optical disk pickup heads 一种采用倾斜聚合物反射镜和菲涅耳透镜的新型光盘拾取头单片集成微光学系统

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215544

F. Tseng, Heng-Tsang Hu

引用次数: 13

A reliable test key for thin film mechanical properties characterization 薄膜机械性能表征的可靠测试关键

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI: 10.1109/SENSOR.2003.1215351

Hsin-Chang Tsai, J. Tsai, Heng-Chung Chang, W. Fang

引用次数: 7