径向体环形谐振器:面向50/spl ω / RF MEMS滤波器

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI:10.1109/SENSOR.2003.1215614

B. Bircumshaw, G. Liu, H. Takeuchi, T. King, R. Howe, O. O'Reilly, A. Pisano

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引用次数: 45

摘要

本文提出了一种新的静电射频MEMS谐振器设计方案:径向体环形谐振器(RBAR)。RBAR利用环空的整体径向共振模式。理论背后的RBAR，和它的前身体纵向谐振器(BLR)，将发展和讨论。研究发现，RBAR能够在增加平均环半径的代价下实现任意低的运动阻力，以达到任何期望的谐振频率。这一特性使得RBAR对于最小化带通滤波器中的插入损耗具有吸引力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The radial bulk annular resonator: towards a 50/spl Omega/ RF MEMS filter

This paper presents a new electrostatic RF MEMS resonator design: the radial bulk annular resonator (RBAR). The RBAR utilizes the bulk radial resonant modes of an annulus. The theory behind the RBAR, and its predecessor the bulk longitudinal resonator (BLR), will be developed and discussed. It is found that the RBAR is capable of achieving an arbitrarily low motional resistance for any desired resonant frequency at the cost of increased average annular radius. This feature makes the RBAR attractive for minimizing insertion loss in bandpass filters.

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TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)

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