水光谱微系统集成放电源，色散光学，和样品输送

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI:10.1109/SENSOR.2003.1215246

L. Que, C. Wilson, J.-A.E. de La Rode, Y. Gianchandani

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引用次数: 5

摘要

本文报道了一种集流体、电气和光学元件于一体的现场便携式放电光谱水化学测试微系统。该装置利用直流微放电作为光谱源。放电是通过在金属阳极和水样作为阴极之间施加直流电压而产生的。杂质从水样中溅射到微放电中。燃烧光栅用作色散元件，以及在玻璃基板上制造的孔径。该微系统与CCD传感元件组装在一起，用于分辨原子光谱。两个版本的微系统已经实现:平面和毛细管为基础的设备。用这两种装置成功地检测了水样中的铬和其他化学物质。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A water spectroscopy microsystem with integrated discharge source, dispersion optics, and sample delivery

This paper reports a microsystem integrating the fluidic, electrical and optical elements required for field-portable water-chemistry testing by electric discharge spectroscopy. The device utilizes a DC microdischarge as a spectroscopic source. The discharge is created by applying a DC voltage between a metal anode and uses the water sample as the cathode. Impurities are sputtered from the water sample into the microdischarge. A blazed grating is used as the dispersion element, along with an aperture fabricated on a glass substrate. The microsystem is assembled and used with a CCD sensing element to distinguish atomic spectra. Two versions of the microsystem have been implemented: planar and a capillary tube-based device. Detection of Cr and other chemicals in water samples has been successfully demonstrated with both devices.

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TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)

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