L. Que, C. Wilson, J.-A.E. de La Rode, Y. Gianchandani
{"title":"A water spectroscopy microsystem with integrated discharge source, dispersion optics, and sample delivery","authors":"L. Que, C. Wilson, J.-A.E. de La Rode, Y. Gianchandani","doi":"10.1109/SENSOR.2003.1215246","DOIUrl":null,"url":null,"abstract":"This paper reports a microsystem integrating the fluidic, electrical and optical elements required for field-portable water-chemistry testing by electric discharge spectroscopy. The device utilizes a DC microdischarge as a spectroscopic source. The discharge is created by applying a DC voltage between a metal anode and uses the water sample as the cathode. Impurities are sputtered from the water sample into the microdischarge. A blazed grating is used as the dispersion element, along with an aperture fabricated on a glass substrate. The microsystem is assembled and used with a CCD sensing element to distinguish atomic spectra. Two versions of the microsystem have been implemented: planar and a capillary tube-based device. Detection of Cr and other chemicals in water samples has been successfully demonstrated with both devices.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2003.1215246","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
This paper reports a microsystem integrating the fluidic, electrical and optical elements required for field-portable water-chemistry testing by electric discharge spectroscopy. The device utilizes a DC microdischarge as a spectroscopic source. The discharge is created by applying a DC voltage between a metal anode and uses the water sample as the cathode. Impurities are sputtered from the water sample into the microdischarge. A blazed grating is used as the dispersion element, along with an aperture fabricated on a glass substrate. The microsystem is assembled and used with a CCD sensing element to distinguish atomic spectra. Two versions of the microsystem have been implemented: planar and a capillary tube-based device. Detection of Cr and other chemicals in water samples has been successfully demonstrated with both devices.