微燃烧-热离子发电:可行性、设计和初步结果

TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Pub Date : 2003-06-08 DOI:10.1109/SENSOR.2003.1215248

Chunbo Zhang, K. Najafi, L. Bernal, P. Washabaugh

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引用次数: 24

摘要

本文首次报道了一种基于燃烧热离子发射的微型发电机的设计、研制和初步结果。取得了几个主要成果。将BaO薄膜与Si集成，形成TI变换器的发射极和集电极。用该变换器成功地测量了场发射电流和钛发射电流。形成厚SiO/sub 2/环，以实现出色的热隔离。开发了一种微机械TI发电机的集成制造工艺。在微机械燃烧室中实现了燃烧。并在发射集电极分系统测试中测得/spl sim/1 /spl mu/W的发电量。为了实现系统级的燃烧发电，需要对装置和测试进行改进。

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Micro combustion-thermionic power generation: feasibility, design and initial results

This paper reports for the first time the design, development and initial results from a micro power generator based on thermionic (TI) emission using combustion. Several major results are achieved. Thin-films of BaO are integrated with Si to form the emitter and collector of a TI converter. Field emission and TI emission currents are successfully measured from this converter. Thick SiO/sub 2/ rings are formed to achieve excellent thermal isolation. An integrated process to fabricate micromachined TI power generators is developed. Combustion has been achieved in the micromachined combustor. And power generation of /spl sim/1 /spl mu/W has been measured in emitter-collector subsystem testing. Improvement of the device and testing is needed for achieving system-level power generation from combustion.

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TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)

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