{"title":"The use of microelectromechanical systems for surge detection in gas turbine engines","authors":"S. Andronenko, I. Stiharu, M. Packirisamy","doi":"10.1109/ICMENS.2005.122","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.122","url":null,"abstract":"Compressor surge results from the instability of highly undesirable oscillations occurring at specific frequencies and at low compressor flow rates in the system. Research has shown that by stabilizing the small-perturbation dynamics, the large-amplitude surge event can be prevented in these systems. In order to completely avoid the initiations of conditions that will lead to surge or stall, engine designs conservatively determine operational stability margins that are far from the stability limit of the compression system. Advanced turbine engines operate with reduced stability margins to increase performance. This reduction in stability margin must be limited to such an extent that does not compromise the operational capability of the engine. Pressure probes equipped with fast-response transducers have been successfully used in axial-flow compressors and turbines but have been rarely used in centrifugal compressors. The harsh thermal environment of operation has limited the use of pressure transducers to operational ranges below 250/spl deg/C effectively precluding measurement at the final stage exit where temperatures are typically in excess 280/spl deg/C depending on the turbine. This paper proposes a hybrid processing method in which a piezoresistive chromium strain gauge is embedded between two thin film silicon carbide (SiC-MEMS) or silicon carbon nitride microelectromechanical (SiCN-MEMS) membranes as an enhanced technique for the design of high temperature pressure transducers. The hybrid process technology, which enables fabrication of such structure, along with the novel packaging principles represents the main contribution of the present report.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124113660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
R. Kruzelecky, Jing Zou, B. Wong, E. Haddad, W. Jamroz, Wanping Zheng, L. Phong
{"title":"Advanced microphotonic and MEMS technologies for the MEOS microsatellite Earth observation mission","authors":"R. Kruzelecky, Jing Zou, B. Wong, E. Haddad, W. Jamroz, Wanping Zheng, L. Phong","doi":"10.1109/ICMENS.2005.22","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.22","url":null,"abstract":"Infrared spectroscopy is a vital component of various Earth observation and planetary exploration space missions. It probes the characteristic vibrational modes of chemical bonds in molecules to provide information about not only the chemical composition but also the local bonding configuration and environment of the chemical bond. In particular, infrared spectroscopy has been employed to study atmospheric processes and various gas distributions. To date, mainly large bulk-optic Fourier transform (FT-IR) spectrometers employing variations of the Michelson interferometer, and massive high-order dispersive spectrometers have been employed in space for atmospheric studies on large and costly satellite platforms. In the following paper, we discuss the use of advanced optical coding and signal processing techniques to enable high-performance infrared spectral measurements of atmospheric components using MPB's miniature IR waveguide spectrometer. The miniature size of the spectrometer enables several dedicated spectrometers to be accommodated on a single microsatellite to extend the measurements that are feasible. In particular, these advanced technologies are being employed as the basis for the development of the use of the MEOS micro Earth observation mission.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125902679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Novel one dimensional nanostructures","authors":"M. Meyyappan","doi":"10.1109/ICMENS.2005.91","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.91","url":null,"abstract":"Summary form only given, as follows. The combination of remarkable mechanical properties and unique electronic properties of carbon nanotubes (CNTs) offers significant potential for revolutionary applications in electronics devices, computing and data storage technology, chemical and biosensors, composites, nanoelectromechanical systems (NEMS), and as tip in scanning probe microscopy (SPM) for imaging and nanolithography, most of-which are the subject areas of ICMENS2005. The ability to grow inorganic nanowires with controlled properties and orientation provides another competitive avenue for some of the applications mentioned above particularly in sensors and electronics. In this talk growth and characterization of both CNTs and inorganic nanowires such as germanium and high temperature oxides will be discussed with a focus on the applications.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131577202","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Compositional dependence of wetting and contact angles in solid-liquid-liquid systems under realistic environments","authors":"Wei Xu, S. Ayirala, D. Rao","doi":"10.1109/ICMENS.2005.35","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.35","url":null,"abstract":"The wetting and contact angles in porous media are important for the characterization of multi-phase flow behavior. The polar components such as asphaltenes in the oil-phase, which have been widely believed to be a major source of oil-wetting characteristics. The effect of light gaseous ends in crude oil on wetting is studied by depleting the pressure at regular intervals. The variation of contact angles observed with the pressure during the pressure depletion clearly showed the influence of light ends on wetting. The water-advancing contact angle of live crude oil gradually increased from 55/spl deg/ at bubble point pressure to 154/spl deg/ at ambient pressure. The de-asphaltened and the deresined crude oils showed strong oil-wet characteristics as stocktank crude oil. The light gaseous ends in oil phase appear to peptize the asphaltene molecules by surrounding them, thereby preventing their agglomeration and migration to the interface. The differences observed in the behavior of dynamic interfacial tensions between live and stocktank crude oils further substantiates the influence of light gaseous ends on the activity of polar components in live oil. The influence of solid surface roughness, mineralogy of rock substrates as well as the brine composition on wetting and contact angles have also been investigated. For highly smooth substrates, carbonate and silica showed relatively similar high water-advancing contact angles, while for rough substrates, the advancing contact angles on silica were much lower compared to the carbonates.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116168238","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Microtubule stability studied by integral equation theory","authors":"P. Drabik, A. Kovalenko","doi":"10.1109/ICMENS.2005.73","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.73","url":null,"abstract":"Microtubules, polymers of tubulin dimers, are important components of cytoskeleton, performing multiple tasks, being important targets in pharmacology and having possible applications as bionanotechnology tools. Dimers assemble into polar, linear protofilaments that form a closed tube. In the process of looking for most favorable energy configurations of protofilaments, we obtain, via integral equation theory, a series of potential of mean force profiles for many cases differing in chemical composition, tubulin conformation, offset value, and a number of protofilaments in a single microtubule.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"175 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123283031","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A new method of electrostatic force modeling for MEMS sensors and actuators","authors":"S. Chowdhury, M. Ahmadi, W. Miller","doi":"10.1109/ICMENS.2005.16","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.16","url":null,"abstract":"A new highly accurate method to determine the electrostatic forces associated with fixed-fixed beam geometry electrostatic sensors and actuators has been presented. Meijs and Fokkema's highly accurate empirical formula for the capacitance of a rectangular cross-section VLSI on-chip interconnect has been used to determine the electrostatic forces that includes the fringing field effects. The method has been verified by developing a pull-in voltage expression based on the new method and the results are compared with published experimentally verified 3-D electromechanical finite element analysis (FEA) results. The new method determined pull-in voltages are in excellent agreement with FEA results verifying the method's accuracy.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122389226","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Modeling of the behavior of random carbon nanotubes during field emission","authors":"N. Sinha, J. Yeow","doi":"10.1109/ICMENS.2005.75","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.75","url":null,"abstract":"Carbon nanotubes (CNTs) have emerged as promising electron emitters in recent years because of their low threshold electric field for emission and a high emission current density. These features make them attractive for many technological applications such as cold cathode electron sources for a variety of vacuum electronic devices. In this paper, we model the behavior of randomly oriented CNTs during field emission under the influence of external electric field.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126157807","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Integration of silicon circuit components onto plastic substrates using fluidic self-assembly","authors":"S.A. Stauth, B. Parviz","doi":"10.1109/ICMENS.2005.63","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.63","url":null,"abstract":"We demonstrate the use of fluidic self-assembly for the integration of microfabricated silicon components, including diffusion resistors and single crystal silicon field effect transistors, onto a clear, flexible plastic substrate. Preferential self-assembly of parts on a template is achieved with complementary shape recognition. The self-assembly process is driven in part by capillary forces resultant from a low melting point alloy re-flow. Our method allows for the integration of parts made via incompatible microfabrication processes onto a single platform. The self-assembly is performed in a single step providing both mechanical and electrical connection between substrate and silicon component.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127402570","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Non-linear elastic deformations of multi-phase fluid systems","authors":"J. Gaydos","doi":"10.1109/ICMENS.2005.86","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.86","url":null,"abstract":"Summary form only given, as follows. Cross-linked, surface-active compounds will create an interfacial, elastic zone and alter the mechanical state and deformation behaviour of any multi-phase fluid system where this occurs. The properties of the constitutive laws for both Cauchy and Green elastic materials will be examined as models for this zone. One significant consequence is that the usual Laplace and Neumann equations of capillarity, applicable as boundary conditions for immiscible fluid phases, must be altered to reflect the presence of this elastic zone. Several examples will be considered.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"307 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116754026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Pulse-actuated micromechanical resonator using digital Kalman observer","authors":"É. Colinet, D. Galayko, J. Juillard","doi":"10.1109/ICMENS.2005.101","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.101","url":null,"abstract":"The paper presents a digital oscillating loop for a MEMS resonator in which the instantaneous resonator position is estimated on-line with a Kalman observer. The approach is applied to an oscillating loop with a pulse-actuated /spl mu/mechanical resonator, where the predicted resonator position can be used for oscillation amplitude control or resonator parameters measurement. We demonstrate the very good immunity of the method toward internal system and measurement noises.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131062106","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}