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2005 International Conference on MEMS,NANO and Smart Systems最新文献

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An Investigation of Femtosecond Laser Micromachining 飞秒激光微加工技术研究
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.24
Ming Xia, Y. Tu
{"title":"An Investigation of Femtosecond Laser Micromachining","authors":"Ming Xia, Y. Tu","doi":"10.1109/ICMENS.2005.24","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.24","url":null,"abstract":"Femtosecond laser micromachining is a new approach emerging in MEMS area in recent years. Although some applications have been reported, this technology is still not matured and not understood very well. Femtosecond lasers currently show much promise as potential effective tools in micromachining or micro-system applications, which include industrial material processing, biomedicine, photonics and semiconductors. In this paper, the status of micromachining with femtosecond pulses is reviewed. Some of advantages and applications are presented. Finally, we propose a \"free force\" 3D micromachining concept using laser including femtosecond laser to create micro and nanostructures.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132218669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Fabrication processes for packaged optical MEMS devices 封装光学MEMS器件的制造工艺
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.50
S. Samson, R. Agarwal, S. Kedia, Weidong Wang, S. Onishi, J. Bumgarner
{"title":"Fabrication processes for packaged optical MEMS devices","authors":"S. Samson, R. Agarwal, S. Kedia, Weidong Wang, S. Onishi, J. Bumgarner","doi":"10.1109/ICMENS.2005.50","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.50","url":null,"abstract":"Processes for the fabrication of packaged optical MEMS devices are presented. A single structural layer surface micromachining process for creating MEMS actuators and sensors is discussed. A base metal layer allows electrical routing. The structural layer is made of a stack of metal, dielectric, and metal to allow electrostatic actuation of parts, stiffness, and high optical reflectivity. All three structural layers are patterned using a single mask. The lower structural metal can be additionally patterned to allow isolated areas for electrical switching applications. Toward the goal of packaged optical devices, a new scheme for creating optically-transparent package lids, which are subsequently thermo compression bonded onto the surface micromachined parts, is also introduced. The fabrication technique allows creation of extremely vertical through-wafer surfaces in silicon, with minimal surface damage to the co-bonded glass lid. An optical corner cube retroreflector (CCR) communication device is presented as one application.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133542456","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Cyclo-Olefin polymer direct bonding using low temperature plasma activation bonding 环烯烃聚合物的低温等离子体活化直接键合
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.37
J. Mizuno, S. Farrens, V. Dragoi, T. Glinsner, H. Ishida, H. Shinohara, Takafumi Suzuki, M. Ishizuka, S. Shoji
{"title":"Cyclo-Olefin polymer direct bonding using low temperature plasma activation bonding","authors":"J. Mizuno, S. Farrens, V. Dragoi, T. Glinsner, H. Ishida, H. Shinohara, Takafumi Suzuki, M. Ishizuka, S. Shoji","doi":"10.1109/ICMENS.2005.37","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.37","url":null,"abstract":"Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm /spl times/ 40 mm /spl times/ 2.0 mm) has been developed employing surface plasma treatment with various gases such as N/sub 2/, O/sub 2/, and 10%-H/sub 2//Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle measurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133302300","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 31
Stick-slip actuation of electrostatic stepper micropositioners for data storage-the /spl mu/walker 用于数据存储的静电步进微定位器的粘滑驱动- /spl μ /步行者
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.112
M. Patrascu, S. Stramigioli
{"title":"Stick-slip actuation of electrostatic stepper micropositioners for data storage-the /spl mu/walker","authors":"M. Patrascu, S. Stramigioli","doi":"10.1109/ICMENS.2005.112","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.112","url":null,"abstract":"This paper is about the /spl mu/Walker, an electrostatic stepper motor mainly intended for positioning the data probes with respect to the storage medium in a data storage device. It can deliver forces up to 1.7 mN for ranges as large as 140 /spl mu/m. Controlling the stick-slip effects at the sliding surfaces is of central importance for reliable operation. A model is introduced to estimate the operating voltage of the actuator plate, which is an essential part of the /spl mu/Walker. Several methods to obtain displacements smaller than one nominal step (/spl ap/ 50 nm) are discussed, as well as how to increase the step repeatability and accuracy.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133368063","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
The development of a cryogenic optical delay line for DARWIN DARWIN低温光延迟线的研制
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.118
T. V. D. Dool, F. Kamphues
{"title":"The development of a cryogenic optical delay line for DARWIN","authors":"T. V. D. Dool, F. Kamphues","doi":"10.1109/ICMENS.2005.118","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.118","url":null,"abstract":"The assembly and integration of the breadboard cryogenic optical delay line has been completed. The measured optical path difference stability is 1.3 nm rms on a test bench with 23 /spl mu/m rms vibration level (the test bench has a much higher disturbance spectrum than the DARWIN spacecraft). A full verification test program is currently being carried out by Alcatel Space and SAGEIS-CSO, including thermal vacuum testing at 40 K.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"104 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116404660","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Generation and recovery of sub-micron diameter fibrous aerosols 亚微米直径纤维气溶胶的生成和回收
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.4
Andrew R. Martin, W. Finlay, M. Brett, D. Vick
{"title":"Generation and recovery of sub-micron diameter fibrous aerosols","authors":"Andrew R. Martin, W. Finlay, M. Brett, D. Vick","doi":"10.1109/ICMENS.2005.4","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.4","url":null,"abstract":"In toxicology and industrial hygiene, fibrous aerosols have long been associated with health risks. Aerodynamic alignment with inhaled air streamlines allows long, cylindrical fibers to penetrate deep into the lung, whereas compact particles of similar mass are filtered out in the upper respiratory tract. For drug delivery applications, fibrous aerosols may thus enable a relatively large drug mass to be delivered to the distal regions of the lung. At present, the aerodynamic behaviors of fibers that influence deposition in the respiratory tract are discussed. Methods for generating monodisperse (in both diameter and length) fibrous aerosols and of tagging these aerosols with a UV absorbent material, both by physical vapor deposition, are outlined.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114532224","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
III-V compound semiconductor nanotechnology for smart systems 用于智能系统的III-V化合物半导体纳米技术
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.57
H. Hasegawa, S. Kasai
{"title":"III-V compound semiconductor nanotechnology for smart systems","authors":"H. Hasegawa, S. Kasai","doi":"10.1109/ICMENS.2005.57","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.57","url":null,"abstract":"Presents and discusses a new smart chip called an \"intelligent quantum (IQ) chip\". III-V semiconductor chips with sizes of millimeter square and memories are integrated on chip with capabilities of wireless communication, wireless power supply and various sensing functions. It is an attempt to endow \"more intelligence\" than simple identification (ID) like in RFID chips to semiconductor chips. A key issue to realize IQ chips is the power consumption of processor/memory parts which increases as one tries to endow more intelligence. The power density of the current Si CMOS technology is too high. Thus, use of quantum devices should lead to large reduction of power density.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123964526","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Towards a mechanism for nanocrystalline silver efficacy in the wound environment: structure versus size 纳米晶银在伤口环境中的作用机制:结构与尺寸
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.127
J. Shrum, P. Taylor, N. Christensen, W. McCaffrey, R. Burrell
{"title":"Towards a mechanism for nanocrystalline silver efficacy in the wound environment: structure versus size","authors":"J. Shrum, P. Taylor, N. Christensen, W. McCaffrey, R. Burrell","doi":"10.1109/ICMENS.2005.127","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.127","url":null,"abstract":"Nanocrystalline silver, first introduced as a commercial wound dressing for burns, demonstrates excellent antimicrobial, antifungal, and anti-inflammatory activity. The purpose of this study was to determine if nanocrystalline silver dressings' antimicrobial efficacy is due to the crystallite size (<30 nm) or its polycrystallinity, through the assessment of bactericidal activity of several materials with varying degrees of polycrystallinity.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115689205","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
RF MEMs tunable inductor using bimorph microactuators 采用双晶片微致动器的射频MEMs可调谐电感器
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.105
I. Zine-El-Abidine, M. Okoniewski, J. McRory
{"title":"RF MEMs tunable inductor using bimorph microactuators","authors":"I. Zine-El-Abidine, M. Okoniewski, J. McRory","doi":"10.1109/ICMENS.2005.105","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.105","url":null,"abstract":"Inductors play an important role in wireless front-end circuitry. Tunable inductors can provide more flexibility in optimizing RF devices such as filters and VCOs. A tunable inductor using a process fully compatible with CMOS has been constructed. The tuning range achieved was 30%.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127396739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Efficient spin injection using tunnel injectors 采用隧道式喷射器进行高效自旋注入
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.46
Xin Jiang
{"title":"Efficient spin injection using tunnel injectors","authors":"Xin Jiang","doi":"10.1109/ICMENS.2005.46","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.46","url":null,"abstract":"Summary form only given, as follows. Semiconductor spintronics aims to develop novel sensor, memory and logic devices by manipulating the spin states of carriers in semiconducting materials. This talk will focus on electrical spin injection into semiconductors, which is a prerequisite for spintronics and, in particular, on tunnel based spin injectors that are potentially operable above room temperature. The spin polarization of the electron current within the semiconductor is detected by measuring the circular polarization of the electroluminescence from a quantum well light emitting diode structure. The temperature and bias dependence of the electroluminescence polarization provides insight into the spin relaxation mechanisms within the semiconductor heterostructure.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126280078","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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