采用双晶片微致动器的射频MEMs可调谐电感器

2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI:10.1109/ICMENS.2005.105

I. Zine-El-Abidine, M. Okoniewski, J. McRory

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引用次数: 15

摘要

电感器在无线前端电路中起着重要的作用。可调谐电感可以为优化RF器件(如滤波器和压控振荡器)提供更大的灵活性。本文构造了一种完全兼容CMOS工艺的可调谐电感器。实现的调谐范围为30%。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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RF MEMs tunable inductor using bimorph microactuators

Inductors play an important role in wireless front-end circuitry. Tunable inductors can provide more flexibility in optimizing RF devices such as filters and VCOs. A tunable inductor using a process fully compatible with CMOS has been constructed. The tuning range achieved was 30%.

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2005 International Conference on MEMS,NANO and Smart Systems

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