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2005 International Conference on MEMS,NANO and Smart Systems最新文献

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MEMS design for fabrication MEMS设计制造
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.67
K. Sadek, W. Moussa
{"title":"MEMS design for fabrication","authors":"K. Sadek, W. Moussa","doi":"10.1109/ICMENS.2005.67","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.67","url":null,"abstract":"Process expertise and material characterization uncertainties are identified as the major obstacles for microelectromechanical systems (MEMS) commercialization. In this paper, a modeling framework to design MEMS for fabrication is presented. The main focus is to simulate the variations generated at different stages of the microfabrication process and to study its effect on the future performance of the device. The framework is applied on a micro gas sensor. Different alternatives for sensor fabrication were studied in terms of the generated uncertainties with different process parameters. An automated substructuring code has been generated to reduce the computational cost of the parametric analysis. The main affecting design parameters as well as the necessary variation limits have been identified.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122102731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Advanced MEMS for high power integrated distribution systems 用于大功率综合配电系统的先进MEMS
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.21
R. Kasim, Bruce C. Kim, J. Drobnik
{"title":"Advanced MEMS for high power integrated distribution systems","authors":"R. Kasim, Bruce C. Kim, J. Drobnik","doi":"10.1109/ICMENS.2005.21","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.21","url":null,"abstract":"This paper presents a design and fabrication of advanced MEMS in high power applications. The developed MEMS is used as a circuit breaker for high power distribution systems. We designed and fabricated MxN array of low power MEMS switches to handle high power which are mass actuated by an external magnetic field.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"194 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114736884","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A disjoining pressure isotherm for curved, interfacial boundaries 弯曲界面边界的分离压力等温线
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.14
J. Gaydos
{"title":"A disjoining pressure isotherm for curved, interfacial boundaries","authors":"J. Gaydos","doi":"10.1109/ICMENS.2005.14","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.14","url":null,"abstract":"Summary form only given, as follows. The disjoining pressure (DP) concept was introduced as an explanation for the excess pressure that must be applied to offset the tendency of the film phase to separate or disjoin from the confining bulk phases. It is considered to be a function of the separation distance between the confining phases with expressions for dispersion, electrostatic, structural and steric components. These component expressions permit DP isotherms, as a function of separation, to be calculated. In this paper an alternative approach is adopted whereby the energy of the film is allowed to possess a greater functional dependence (i.e. both separation and radial distance dependence). A variational approach to obtain an Euler-Lagrange equation for the DP isotherm and its local and global equilibrium structure shows that the isotherm has specific functional forms that are limited when subjected to geometric constraints (i.e. solid boundary).","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127941692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The intrinsic spin Hall effect 本征自旋霍尔效应
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.120
Shoucheng Zhang
{"title":"The intrinsic spin Hall effect","authors":"Shoucheng Zhang","doi":"10.1109/ICMENS.2005.120","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.120","url":null,"abstract":"Summary form only given, as follows. A recent theory predicts that dissipationless spin currents can be induced purely by an electric field in conventional semiconductors. The dissipationless spin current is derived from a novel topological structure in momentum space, is independent of the sample disorder and leads to the intrinsic spin Hall effect. In hole doped semiconductors, with or without inversion symmetry breaking, there are no vertex corrections due to impurities scattering, and there are no extrinsic contributions to the spin Hall effect in the clean limit. The author analyzes a recent experiment on the spin Hall effect, and shows that it is consistent with the intrinsic nature of the effect. The author also shows that the spin Hall effect can be quantized in semiconductors with appropriate strain gradients, but in the absence of any external magnetic fields or the associated time reversal symmetry breaking.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"96 9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127997065","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Non-invasive mapping of fluid temperature and flow in microsystems 微系统中流体温度和流动的无创测绘
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.85
M. Cyca, S. Spiewak, R. Hugo
{"title":"Non-invasive mapping of fluid temperature and flow in microsystems","authors":"M. Cyca, S. Spiewak, R. Hugo","doi":"10.1109/ICMENS.2005.85","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.85","url":null,"abstract":"Currently available temperature and fluid flow measurement methods have shown limitations in microscale systems. This research concerns the development of a non-invasive optical measurement technique and sensor for mapping two-dimensional temperature fields and, ultimately fluid flows. The system is based on the Shack-Hartmann wave-front sensor. Analytical considerations underlying the mapping technique and preliminary experimental results are presented. Two experimental rigs involved in this study are also discussed.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130135754","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
High-speed dense channel fiber Bragg grating sensor array for structural health monitoring 用于结构健康监测的高速密通道光纤光栅传感器阵列
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.55
L. Cheng
{"title":"High-speed dense channel fiber Bragg grating sensor array for structural health monitoring","authors":"L. Cheng","doi":"10.1109/ICMENS.2005.55","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.55","url":null,"abstract":"Sensors for strain measurement are indispensable for structure monitoring. Fiber optic sensors based on Fiber Bragg Grating (PEG) technology are found to be suitable for strain sensing and have a number of advantages compared to conventional strain gauges. TNO has developed a high-speed detection system for FBG sensor array. The maximum sampling frequency of about 20 kHz is essential for modal analysis, noise reduction, impact detection and dynamic load measurement. In particular the latter is of importance for Structural Health Monitoring of composite structure. Different types of test are performed using this system.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133840794","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Thermal stability of IrO/sub 2/ nanowires IrO/sub /纳米线的热稳定性
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.125
Fengyan Zhang, R. Barrowcliff, S. Hsu
{"title":"Thermal stability of IrO/sub 2/ nanowires","authors":"Fengyan Zhang, R. Barrowcliff, S. Hsu","doi":"10.1109/ICMENS.2005.125","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.125","url":null,"abstract":"The thermal stability of IrO/sub 2/ nanowires has been studied. First single crystal IrO/sub 2/ nanowires with the diameter at 10-30 nm and length at about 500 nm were synthesized using MOCVD system. Then the nanowires were annealed in oxygen and nitrogen ambient separately at different temperatures. It shows that under oxygen annealing the IrO/sub 2/ nanowires become unstable at around 800/spl deg/C. After 900/spl deg/C annealing, the IrO/sub 2/ nanowires melted and vaporized. On the other hand, under nitrogen annealing at 800/spl deg/C the IrO/sub 2/ nanowires were reduced to Ir, after further annealing in nitrogen at 900/spl deg/C, the IrO/sub 2/ nanowires were completely reduced to Ir and also the IrO/sub 2/ nanowires fragment into Ir particles.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133928651","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Novel antimicrobial activity of nanocrystalline silver dressings 纳米晶银敷料的新型抗菌活性研究
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.90
C. R. Olson, T. Balasubramaniam, J. Shrum, T. Nord, P. Taylor, R. Burrell
{"title":"Novel antimicrobial activity of nanocrystalline silver dressings","authors":"C. R. Olson, T. Balasubramaniam, J. Shrum, T. Nord, P. Taylor, R. Burrell","doi":"10.1109/ICMENS.2005.90","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.90","url":null,"abstract":"Ovington (2004) suggests that all silver dressings work only via Ag/sup +/; however, there is evidence that nanocrystalline silver, which is highly effective against fungi, bacteria, and antibiotic resistant bacteria, releases unique species of silver in addition to Ag/sup +/, such as Ag/sup 0/ clusters. In this study, the efficacy of three silver dressings, two that generate only Ag/sup +/ and one that releases multiple species of silver including Ag/sup +/ and Ag/sup 0/, against silver sensitive and resistant strains of P. aeniginosa were compared to determine if there is an advantage to multiple-species releasing dressings.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124916106","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Electrokinetic flow in a wavy channel 波浪状通道中的电动流动
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.47
N. Quddus, S. Bhattacharjee, W. Moussa
{"title":"Electrokinetic flow in a wavy channel","authors":"N. Quddus, S. Bhattacharjee, W. Moussa","doi":"10.1109/ICMENS.2005.47","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.47","url":null,"abstract":"An electrokinetic model for microfluidic flow has been developed. The effects of surface waviness of the channel wall on a pressure-driven flow have been investigated. Current analysis considers a cylindrical microchannel of finite length, having two reservoirs at ends. Poisson-Nernst-Planck and Navier-Stokes equations constitute the electrokinetic model. Significant influence of the concentration boundary condition, at the reservoir exit plane, on the solution was observed. Solvent flux and channel length are two determining factors for the concentration distribution along the channel length. The effects of frequency and amplitude of the surface waviness were also investigated. Any irregularity in channel wall causes higher concentration and potential gradients across the channel.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124930430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
New methodologies in computational nanoscience facilitated by the GRID computing environment 网格计算环境促进了计算纳米科学的新方法
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.81
F. Hirata
{"title":"New methodologies in computational nanoscience facilitated by the GRID computing environment","authors":"F. Hirata","doi":"10.1109/ICMENS.2005.81","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.81","url":null,"abstract":"The nanoscience explores the materials which are about 10/sup -9/ times smaller in size. It is the quantum mechanics (or mechanics) that governs the NANO world. A material treated in the nanoscience consists of an infinite or homogeneous system and finite or heterogeneous systems: for example, a protein (finite) in water (infinite) and a molecular wire (finite) connected to metal surface (infinite). It will be essential to combine the \"heterogeneous\" methodologies in number of different ways to create new theories or computational methods to investigate \"heterogeneous\" materials in the NANO world. We have been developing a new computational environment which is called GRID. A newly developed method or computer program in a particular research node will be integrated into the collaborative research to be shared in \"real time\" by the group members scattered among the heterogeneous GRID nodes. One of our concerns in the computational nanoscience is self-organization processes in solution such as micelle (or vesicle) formation and protein folding, in which \"solvent\" plays a crucial role.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126394669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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