{"title":"用于大功率综合配电系统的先进MEMS","authors":"R. Kasim, Bruce C. Kim, J. Drobnik","doi":"10.1109/ICMENS.2005.21","DOIUrl":null,"url":null,"abstract":"This paper presents a design and fabrication of advanced MEMS in high power applications. The developed MEMS is used as a circuit breaker for high power distribution systems. We designed and fabricated MxN array of low power MEMS switches to handle high power which are mass actuated by an external magnetic field.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"194 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Advanced MEMS for high power integrated distribution systems\",\"authors\":\"R. Kasim, Bruce C. Kim, J. Drobnik\",\"doi\":\"10.1109/ICMENS.2005.21\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a design and fabrication of advanced MEMS in high power applications. The developed MEMS is used as a circuit breaker for high power distribution systems. We designed and fabricated MxN array of low power MEMS switches to handle high power which are mass actuated by an external magnetic field.\",\"PeriodicalId\":185824,\"journal\":{\"name\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"volume\":\"194 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-07-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMENS.2005.21\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 International Conference on MEMS,NANO and Smart Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2005.21","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Advanced MEMS for high power integrated distribution systems
This paper presents a design and fabrication of advanced MEMS in high power applications. The developed MEMS is used as a circuit breaker for high power distribution systems. We designed and fabricated MxN array of low power MEMS switches to handle high power which are mass actuated by an external magnetic field.
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