{"title":"微系统中流体温度和流动的无创测绘","authors":"M. Cyca, S. Spiewak, R. Hugo","doi":"10.1109/ICMENS.2005.85","DOIUrl":null,"url":null,"abstract":"Currently available temperature and fluid flow measurement methods have shown limitations in microscale systems. This research concerns the development of a non-invasive optical measurement technique and sensor for mapping two-dimensional temperature fields and, ultimately fluid flows. The system is based on the Shack-Hartmann wave-front sensor. Analytical considerations underlying the mapping technique and preliminary experimental results are presented. Two experimental rigs involved in this study are also discussed.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Non-invasive mapping of fluid temperature and flow in microsystems\",\"authors\":\"M. Cyca, S. Spiewak, R. Hugo\",\"doi\":\"10.1109/ICMENS.2005.85\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Currently available temperature and fluid flow measurement methods have shown limitations in microscale systems. This research concerns the development of a non-invasive optical measurement technique and sensor for mapping two-dimensional temperature fields and, ultimately fluid flows. The system is based on the Shack-Hartmann wave-front sensor. Analytical considerations underlying the mapping technique and preliminary experimental results are presented. Two experimental rigs involved in this study are also discussed.\",\"PeriodicalId\":185824,\"journal\":{\"name\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"volume\":\"48 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-07-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2005 International Conference on MEMS,NANO and Smart Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMENS.2005.85\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 International Conference on MEMS,NANO and Smart Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2005.85","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Non-invasive mapping of fluid temperature and flow in microsystems
Currently available temperature and fluid flow measurement methods have shown limitations in microscale systems. This research concerns the development of a non-invasive optical measurement technique and sensor for mapping two-dimensional temperature fields and, ultimately fluid flows. The system is based on the Shack-Hartmann wave-front sensor. Analytical considerations underlying the mapping technique and preliminary experimental results are presented. Two experimental rigs involved in this study are also discussed.