Pulse-actuated micromechanical resonator using digital Kalman observer

The paper presents a digital oscillating loop for a MEMS resonator in which the instantaneous resonator position is estimated on-line with a Kalman observer. The approach is applied to an oscillating loop with a pulse-actuated /spl mu/mechanical resonator, where the predicted resonator position can be used for oscillation amplitude control or resonator parameters measurement. We demonstrate the very good immunity of the method toward internal system and measurement noises.