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2005 International Conference on MEMS,NANO and Smart Systems最新文献

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Patterning nanometer resist features on planar & topography substrates using the 2-step NERIME FIB top surface imaging process 使用两步NERIME FIB顶表面成像工艺在平面和地形基板上绘制纳米抗蚀剂特征
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.97
K. Arshak, S. F. Gilmartin, D. Collins, O. Korostynska, A. Arshak
{"title":"Patterning nanometer resist features on planar & topography substrates using the 2-step NERIME FIB top surface imaging process","authors":"K. Arshak, S. F. Gilmartin, D. Collins, O. Korostynska, A. Arshak","doi":"10.1109/ICMENS.2005.97","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.97","url":null,"abstract":"The 2-step negative resist image by dry etching (2-step NERIME) focused ion beam (FIB) top surface imaging (TSI) process has been previously reported as an excellent technique for patterning nanometer scale features in DNQ/novolak based photoresists on silicon substrates. In this paper we demonstrate that the 2-step NERIME process can be used to pattern nanometer scale resist features on different substrate materials and topography substrates.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"185 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115707754","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Avery Dennison micro-nano replication capabilities for MEMS and microfluidics 艾利丹尼森MEMS和微流体的微纳米复制能力
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.29
P. Chu
{"title":"Avery Dennison micro-nano replication capabilities for MEMS and microfluidics","authors":"P. Chu","doi":"10.1109/ICMENS.2005.29","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.29","url":null,"abstract":"Polymers can be used as one of most promising materials for MEMS applications. In this paper, we successfully demonstrated embossing micro-nano structures on polymers, especially high temperature polymers (>300/spl deg/C) by using Avery's unique proprietary embossing technology. Also in this paper, we demonstrated a roll-to-roll embossing/lamination method for manufacturing low cost plastic microfluidics devices.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115787684","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Thermal design of an HTP microthruster 高温微推力器的热设计
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.124
W. Halswijk, J. Moerel, H. Sanders
{"title":"Thermal design of an HTP microthruster","authors":"W. Halswijk, J. Moerel, H. Sanders","doi":"10.1109/ICMENS.2005.124","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.124","url":null,"abstract":"A microscale thruster, has been successsfully designed using MEMS technology, in that 'stacked wafer' design is adopted.The thruster is built up of stacked and bonded silicon wafer, each with its own internal structure. The MEMS technology as succeed in acheiveing good performance and relatively short heat-up transient. This paper describes the preliminary design and detailed thermal analysis. The microthruster is designed to be used on small satellites,to deliver small impulse bits micro/nano-satellites for /spl delta/V impulses.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128714134","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Model studies of magnetic particle retention in the conducting airways 磁颗粒在导电气道中的滞留模型研究
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.8
J. Ally, A. Amirfazli, W. Roa
{"title":"Model studies of magnetic particle retention in the conducting airways","authors":"J. Ally, A. Amirfazli, W. Roa","doi":"10.1109/ICMENS.2005.8","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.8","url":null,"abstract":"This paper reports initial findings of using magnetic force to target and retain particles in airways using an ex vivo model, i.e. palate of bullfrogs (Rana catesbeiana). The purpose of this study was to investigate the feasibility of using magnetic force in targeted chemotherapy agents inhaled in an aerosolized form for lung cancer therapy. The results show that the clearance mechanism of airways will overcome magnetic force to clear aggregates of small particles (1-3 /spl mu/m) deposited, whereas aggregates of larger particles (180 /spl mu/m) can be retained at the targeted site when a magnetic strength of 80 mT and gradient of -6 T/m was used.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127045425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Microbolometer instrument payload design for a microsatellite mission 微卫星任务微辐射热计仪器载荷设计
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.69
W. F. Payne, J. Gore, T. Pope, L. Phong, Wanping Zheng
{"title":"Microbolometer instrument payload design for a microsatellite mission","authors":"W. F. Payne, J. Gore, T. Pope, L. Phong, Wanping Zheng","doi":"10.1109/ICMENS.2005.69","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.69","url":null,"abstract":"This paper describes the design of the mission and the instrument. It compares the use of microsatellites, ground and air based platforms. An Earth observation microsatellite mission is based on microbolometer technology. The detectors are linear arrays, filtered to be sensitive in five bands: 3 bands between 8.5 and 12.5 microns, and 2 bands between 3.0 and 4.5 microns. It is expected that this Earth observation satellite will produce useful dates like ice-shelf formation/melt, cloud monitoring, oil spills, forest fire tracking and damage assessment, Kyoto Accord compliance monitoring, city heat bloom, temperatures of oceans, land, and ice with the focus on northern coastal waters, Arctic and sub-Arctic land areas. Hence, satellite-based sensors have more advantages over terrestrial or airborne sensors.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"158 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114403195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Versatile inertial displacement sensor for planar motion 用于平面运动的通用惯性位移传感器
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.132
S. Spiewak
{"title":"Versatile inertial displacement sensor for planar motion","authors":"S. Spiewak","doi":"10.1109/ICMENS.2005.132","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.132","url":null,"abstract":"Inertial displacement sensors employing currently available high performance micromachined accelerometers and gyroscopes measure position and attitude with sub-micron accuracy for the duration up to several seconds. This performance makes them suitable for application in non contact multi-degree-of-freedom 'cross grids'. Because of the inertial based measurement, these new instruments alleviate severe disadvantages of the traditional testing devices, such as a high risk of collision, cost, size or long setup time, and application restrictions imposed by them. The paper presents the design and performance of a versatile 'cross grid', which employs high performance commercial accelerometers for the measurement of planar motion.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121746707","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
RF MEMS for space applications 用于空间应用的射频MEMS
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.104
R. Mansour
{"title":"RF MEMS for space applications","authors":"R. Mansour","doi":"10.1109/ICMENS.2005.104","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.104","url":null,"abstract":"The mass, volume and dc power consumption of payload electronic equipment is a significant contributor to the overall cost of space systems. The radiofrequency (RF) microelectromechanical system (MEMS) technology offers the potential of large reduction in mass and volume of electronic equipment, by replacing the waveguide and coaxial switch matrices with their MEMS counterparts. Mass reductions can be also exploited to increase the satellite system capacity (by adding payload electronics) or to extend operational life (by increasing station keeping fuel). As a result, market factors have constantly been pushing hardware suppliers to reduce mass and size of their space-based products.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"119 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123390396","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Injecting and controlling spin populations and currents in semiconductors using optically induced quantum interference effects 利用光诱导量子干涉效应注入和控制半导体中的自旋居群和电流
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.61
Masaaki Tanaka
{"title":"Injecting and controlling spin populations and currents in semiconductors using optically induced quantum interference effects","authors":"Masaaki Tanaka","doi":"10.1109/ICMENS.2005.61","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.61","url":null,"abstract":"Summary form only given. This paper reviews the recent developments of epitaxial ferromagnetic heterostructures based on semiconductors for spintronics. The magnetotransport of prepared ferromagnetic III-V semiconductor heterostructures (Mn-delta-doped GaAs/Be-doped AlGaAs) and the control of ferromagnetism in the heterostructures by using gate electric field and light irradiation at relatively high Curie temperature (TC) (/spl sim/100 K) are also studied. This paper proposes and theoretically analyzes a spin MOSFET consisting of a MOS gate and ferromagnetic contacts for the source and drain. The spin MOSFET has large magnetocurrent ratios (spin dependent transport similar to the GMR or TMR devices), high transconductance (gm), and good compatibility with CMOS technology, which are very important for integrated circuit applications.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128837536","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design of a thermal-bubble-based micromachined accelerometer 基于热气泡的微机械加速度计的设计
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.133
K. Liao, Rongshun Chen, Bruce C. S. Chou
{"title":"Design of a thermal-bubble-based micromachined accelerometer","authors":"K. Liao, Rongshun Chen, Bruce C. S. Chou","doi":"10.1109/ICMENS.2005.133","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.133","url":null,"abstract":"A novel thermal-bubble-based micromachined accelerometer with advantages of no proof mass, preferable frequency response, and high sensitivity is presented in this paper. Unlike the other techniques, the only moving element in the proposed device is a small thermal-bubble created by using a high flux heater to vaporize the liquid contained in the micro chamber. Numerical simulations are conducted to study the heat transfer and fluid flow behavior of the device and to demonstrate the feasibility of our design. The results show that the sensor has good linearity in the range from 0 to 10 g, and the normal sensitivity is about 1 /spl deg/C/g for operating power of 40 mW. The response time of the accelerometer filled up with water is close to 58 ms.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121699743","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Nondestructive evaluation of MEMS devices by laser confocal measurements 激光共聚焦测量MEMS器件的无损评价
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.87
Xiaoming Wu, Ning-xin Zhang, T. Ren, Litian Liu
{"title":"Nondestructive evaluation of MEMS devices by laser confocal measurements","authors":"Xiaoming Wu, Ning-xin Zhang, T. Ren, Litian Liu","doi":"10.1109/ICMENS.2005.87","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.87","url":null,"abstract":"This paper proposes an innovative nondestructive evaluation (NDE) setup for MEMS mechanical deformation measurements. The setup is based on an active laser confocal displacement meter, and a computer controlled motor-driven 3-dimension (3D) stage. The out-of-plane measurement resolution of the scanning confocal setup is 0.1 /spl mu/m. The maximum measurement range is 0.3 mm out-of-plane and 60 mm/spl times/60 mm in plane, respectively. The principle of the measurement method is introduced briefly. A multilayer piezoelectric acoustic MEMS membrane was fabricated and measured by using this setup. The profile of membrane was estimated. Nonlinear response feature of the membrane to direct current bias voltage was observed. The residual stresses of individual layer of the membrane were estimated according to Stoney's theory. The test results gave quantificational description of MEMS membrane deformation, which can guide the optimal design of the acoustic devices. The laser confocal technique proved to be a valuable micro-NDE characterization tool.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116314385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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