{"title":"Avery Dennison micro-nano replication capabilities for MEMS and microfluidics","authors":"P. Chu","doi":"10.1109/ICMENS.2005.29","DOIUrl":null,"url":null,"abstract":"Polymers can be used as one of most promising materials for MEMS applications. In this paper, we successfully demonstrated embossing micro-nano structures on polymers, especially high temperature polymers (>300/spl deg/C) by using Avery's unique proprietary embossing technology. Also in this paper, we demonstrated a roll-to-roll embossing/lamination method for manufacturing low cost plastic microfluidics devices.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 International Conference on MEMS,NANO and Smart Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2005.29","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Polymers can be used as one of most promising materials for MEMS applications. In this paper, we successfully demonstrated embossing micro-nano structures on polymers, especially high temperature polymers (>300/spl deg/C) by using Avery's unique proprietary embossing technology. Also in this paper, we demonstrated a roll-to-roll embossing/lamination method for manufacturing low cost plastic microfluidics devices.