高温微推力器的热设计

W. Halswijk, J. Moerel, H. Sanders
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引用次数: 3

摘要

利用MEMS技术成功设计了一种微型推力器,采用了“堆叠晶圆”设计。推力器由堆叠和粘合的硅片组成,每片硅片都有自己的内部结构。MEMS技术成功地实现了良好的性能和相对较短的加热瞬态。本文介绍了该系统的初步设计和详细的热分析。微推力器设计用于小型卫星,为微/纳米卫星提供小脉冲位/spl δ /V脉冲。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Thermal design of an HTP microthruster
A microscale thruster, has been successsfully designed using MEMS technology, in that 'stacked wafer' design is adopted.The thruster is built up of stacked and bonded silicon wafer, each with its own internal structure. The MEMS technology as succeed in acheiveing good performance and relatively short heat-up transient. This paper describes the preliminary design and detailed thermal analysis. The microthruster is designed to be used on small satellites,to deliver small impulse bits micro/nano-satellites for /spl delta/V impulses.
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