Journal of Microelectromechanical Systems最新文献_第5页

An Approach to Near Zero Power Bi-Stable Driving With a Simple Pulse Signal for RF MEMS Switch 利用简单脉冲信号实现射频 MEMS 开关近零功率双稳态驱动的方法

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-03-25 DOI: 10.1109/JMEMS.2024.3377279

Rusong He;Lyuyan Wang;Zhenci Sun;Jiahao Zhao

{"title":"An Approach to Near Zero Power Bi-Stable Driving With a Simple Pulse Signal for RF MEMS Switch","authors":"Rusong He;Lyuyan Wang;Zhenci Sun;Jiahao Zhao","doi":"10.1109/JMEMS.2024.3377279","DOIUrl":"10.1109/JMEMS.2024.3377279","url":null,"abstract":"This paper reports a novel bi-stable structure for a radio frequency micro-electro-mechanical system (RF MEMS) switch. The structure is activated by an in-plane electrostatic actuator and adopts the Inertial Generated Timing Sequence (IGTS) method to latch, allowing the switch to turn on and off with a simple pulse signal. This design eliminates the need for a complex external control circuit and enables the switch to maintain the ON state at zero power consumption. Furthermore, the electrode shape is designed to reduce the driving voltage, thereby lowering the power consumption of the boost circuit. To test and verify the functionality of the bi-stable mechanism, a coplanar waveguide (CPW), which is separated from the actuation structure to reduce interference between the DC drive signal and the RF transmitted signal, is employed. Fabricated using a silicon-on-glass process with two lithographic masks, the RF MEMS switch achieves bi-stability with a single pulse signal of 18V for latching and 14V for unlatching. The measured insertion loss and isolation at 6 GHz are −0.28 dB and −36.68 dB, respectively. This switch exhibits low pull-in voltage, low power consumption, and simple control, holding potential for future RF systems tailored to wireless applications with an emphasis on low power consumption and system simplicity. [2024-0008]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"322-332"},"PeriodicalIF":2.7,"publicationDate":"2024-03-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140302795","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition 通过聚焦离子束诱导沉积提高 MEMS 热机械致动效率

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-03-22 DOI: 10.1109/JMEMS.2024.3377595

Bartosz Pruchnik;Tomasz Piasecki;Ewelina Gacka;Mateus G. Masteghin;David C. Cox;Teodor Gotszalk

引用次数: 0

CMOS-Compatible Hollow Nanoneedles With Fluidic Connection 与 CMOS 兼容的带流体连接的空心纳米针头

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-03-22 DOI: 10.1109/JMEMS.2024.3376991

Noah Brechmann;Marvin Michel;Leon Doman;Andreas Albert;Karsten Seidl

{"title":"CMOS-Compatible Hollow Nanoneedles With Fluidic Connection","authors":"Noah Brechmann;Marvin Michel;Leon Doman;Andreas Albert;Karsten Seidl","doi":"10.1109/JMEMS.2024.3376991","DOIUrl":"10.1109/JMEMS.2024.3376991","url":null,"abstract":"Nanoneedles are used for a variety of different biomedical applications such as intracellular injection/extraction and electrical recording. Combining these two capabilities in one device, however, remains challenging. We propose a novel method for fabricating fluidically connected arrays of hollow nanoneedles and characterize the resulting devices regarding their fluidic and electrochemical functionalities. The fabrication process relies solely on complementary metal-oxide-semiconductor (CMOS) compatible and scalable microsystems technology methods. Fluorescence microscopy is used to prove the successful transport of molecules through the passive nanoneedle chips. Electrochemical measurements of ion flows through these devices further confirm both the fluidic contact and the validity of an analytical model used to estimate the electrical resistance of the chips. In total, the presented work paves the way for monolithic integration of fluidic and electrical functionalities for intracellular contacting in a single device. This, in turn, can enable controlled, continuous drug delivery with simultaneous electrical recording on a highly scalable platform. [2023-0171]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"342-349"},"PeriodicalIF":2.7,"publicationDate":"2024-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10477994","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140200727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Feedthrough Engineering to Enable Resonant Sensors Working in Conductive Medium for Bio Applications 通过馈通工程实现可在导电介质中工作的共振传感器在生物领域的应用

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-03-21 DOI: 10.1109/JMEMS.2024.3375363

Zhong-Wei Lin;Cheng-Yen Wu;Sheng-Shian Li

{"title":"Feedthrough Engineering to Enable Resonant Sensors Working in Conductive Medium for Bio Applications","authors":"Zhong-Wei Lin;Cheng-Yen Wu;Sheng-Shian Li","doi":"10.1109/JMEMS.2024.3375363","DOIUrl":"10.1109/JMEMS.2024.3375363","url":null,"abstract":"Operating micro-nanoscale sensors in conductive liquids faces challenges due to liquid damping and high feedthrough floor, leading to low signal-to-feedthrough ratio. This work presents an innovative feedthrough engineering technique for resonant sensors immersed in ionic liquids, eliminating the need of isolation layers or additional processing for the sensing device. By leveraging the feedthrough path through substrate, the proposed technique counteracts the feedthrough induced by the ionic liquid, and successfully resumes the desired motional signal of the sensor. A thin-film piezoelectric-on-silicon (TPoS) resonator and oscillator operated in ionic environment are introduced to demonstrate that this technique not only enables the measurement of resonant signals in conductive liquids but also offers suitable options regarding the mode shape and resonant frequency of the sensor in different ion concentration environments. Additionally, the cancellation phenomenon shows potential as a concentration detector for ionic liquids. The fundamental (5MHz) and higher (15MHz) frequency modes of the PZT-based resonator are thoroughly investigated. Measurements show that regardless of the frequency where it operates, the resonator features decent stopband rejection (SBR) of around 18~20dB using the cancellation approach, which is even better than operating in deionized water. When employed as an oscillator, the results indicate a remarkable frequency resolution of approximately 1.8 Hz for both fundamental and higher mode frequencies. These measurements highlight the improved resonant behavior and real-time sensing capability offered by the proposed technique in conductive liquids. Such MEMS resonant transducers using this engineered feedthrough cancellation mechanism would serve as crucial building blocks for chemical and biosensing applications. [2023-0194]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"333-341"},"PeriodicalIF":2.7,"publicationDate":"2024-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140200584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Erratum to “Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection” 用于真空和空气中动态质量传感的薄膜硅 MEMS 的勘误：相位噪声、阿兰偏差、质量灵敏度和检测极限" 的勘误表

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-03-21 DOI: 10.1109/JMEMS.2024.3375930

Rui M. R. Pinto;Pedro Brito;Virginia Chu;João Pedro Conde

引用次数: 0

Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction 通过线性化传导减少四倍质量陀螺仪角度随机漫步

IF 2.7 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-03-18 DOI: 10.1109/JMEMS.2023.3337636

Ryan R. Knight;Ryan Q. Rudy;Jeffrey S. Pulskamp;Robert R. Benoit;Don L. DeVoe;Esmond Lau

{"title":"Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction","authors":"Ryan R. Knight;Ryan Q. Rudy;Jeffrey S. Pulskamp;Robert R. Benoit;Don L. DeVoe;Esmond Lau","doi":"10.1109/JMEMS.2023.3337636","DOIUrl":"10.1109/JMEMS.2023.3337636","url":null,"abstract":"A quadruple mass Coriolis vibratory gyroscope operating in the mode-matched condition has been redesigned with the singular focus of minimizing nonlinear transduction mechanisms, thereby allowing for angle random walk (ARW) noise reduction when operating at amplitudes higher than \u0000<inline-formula> <tex-math>$2~mu text{m}$ </tex-math></inline-formula>\u0000. This is achieved through the following steps: (i) redesigning the Coriolis mass folded flexures and shuttle springs, (ii) linearizing the antiphase coupler spring rate while maintaining parasitic modal separation, (iii) replacing parallel plate transducers with linear combs, (iv) implementing dedicated force-balanced electrostatic frequency tuners, and (v) microTorr vacuum packaging enabling operation at the thermoelastic dissipation limit of silicon. Additionally, cross-axis stiffness is reduced through folded-flexure moment balancing to further reduce ARW. By the balancing of positive and negative Duffing frequency contributions, net frequency nonlinearity was further reduced to −20 ppm. The gyroscope presented in this study has achieved an ARW of 0.0005 deg/\u0000<inline-formula> <tex-math>$surd $ </tex-math></inline-formula>\u0000hr, with an uncompensated bias instability of 0.08 deg/hr. These advancements hold promise for enhancing the performance of precision vibratory gyroscopes for navigation and North-finding applications. [2023-0144]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 3","pages":"308-321"},"PeriodicalIF":2.7,"publicationDate":"2024-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140169186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Electrostatic MEMS Speakers With Embedded Vertical Actuation 具有嵌入式垂直致动功能的静电 MEMS 扬声器

IF 2.5 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-03-17 DOI: 10.1109/JMEMS.2024.3394809

Md Emran Hossain Bhuiyan;Prithviraj Palit;Siavash Pourkamali

{"title":"Electrostatic MEMS Speakers With Embedded Vertical Actuation","authors":"Md Emran Hossain Bhuiyan;Prithviraj Palit;Siavash Pourkamali","doi":"10.1109/JMEMS.2024.3394809","DOIUrl":"10.1109/JMEMS.2024.3394809","url":null,"abstract":"In this research, micromachined silicon membranes with embedded electrostatic vertical actuator arrays capable of high out-of-plane displacement have been presented. The performance of such devices as MEMS speakers has been characterized by showing relatively high Sound Pressure level (SPL) compared to existing MEMS electrostatic speakers. Large arrays of electrostatic actuator cells, consisting of up to 10,000 cells with submicron transduction gaps, are formed on the edges of the membranes, inducing a bending moment in the membrane upon excitation. The large number of cells, along with submicron transduction gaps, allow much larger vibrational energy to be pumped into the vibrating membrane compared to the conventional electrostatic acoustic transducers, leading to higher sound output. For \u0000<inline-formula> <tex-math>$50 , mu $ </tex-math></inline-formula>\u0000m thick membranes with a device footprint of 5mm \u0000<inline-formula> <tex-math>$ times 5$ </tex-math></inline-formula>\u0000mm, a maximum SPL of 114 dB in open air was measured at a 1 cm distance, translating to an out-of- plane displacement of over \u0000<inline-formula> <tex-math>$16 , mu $ </tex-math></inline-formula>\u0000m for the membrane. The transducer strength figure of merit defined as acoustic pressure per membrane surface area per actuation voltage, for the tested devices, is calculated to be up to \u0000<inline-formula> <tex-math>$25.1 times 10^{-5}$ </tex-math></inline-formula>\u0000 Pa/mm2/V, which is over 5X higher than the highest values calculated for the existing art. [2023-0192]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 4","pages":"446-455"},"PeriodicalIF":2.5,"publicationDate":"2024-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141061721","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Multipurpose Acoustic Metamaterial Anchors for Aluminum Scandium Nitride Contour Mode Resonators 用于氮化铝钪轮廓模式谐振器的多用途声超材料锚点

IF 2.5 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-03-16 DOI: 10.1109/JMEMS.2024.3399593

Xuanyi Zhao;Onurcan Kaya;Tommaso Maggioli;Cristian Cassella

{"title":"Multipurpose Acoustic Metamaterial Anchors for Aluminum Scandium Nitride Contour Mode Resonators","authors":"Xuanyi Zhao;Onurcan Kaya;Tommaso Maggioli;Cristian Cassella","doi":"10.1109/JMEMS.2024.3399593","DOIUrl":"10.1109/JMEMS.2024.3399593","url":null,"abstract":"We present a new design for AlScN contour-mode-resonators (CMRs) operating in the radiofrequency (RF) range. This design relies on acoustic metamaterials (AM) based lateral anchors to greatly enhance the power handling compared to conventional CMR-designs. Such anchors generate acoustic stopbands that prevent the leakage of piezo-generated acoustic energy from the resonating body into the substrate. The AM anchors reported in this work consist of the same AlScN film as in the CMRs’ active region, combined with a periodic array of SiO2 rods. Their use allows a reduction of CMRs’ thermal resistance with respect to conventional designs, and enables a significant temperature compensation. As a result, the CMRs with AM anchors reported in this work show a ~60% reduction in their Duffing coefficient with respect to conventional designs with fully-etched lateral sides, hence an improved linearity. Furthermore, when used to set the output frequency of high-power feedback loop oscillators, the CMRs with the AM anchors reported here enable a lower phase-noise compared to what achievable when employing the conventional counterparts.[2024-0053]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 4","pages":"473-481"},"PeriodicalIF":2.5,"publicationDate":"2024-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10532126","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141063929","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Suspended Silicon Nitride Platforms for Thermal Sensing Applications in the Limit of Minimized Membrane Thickness 在膜厚度最小化极限下用于热传感应用的悬浮式氮化硅平台

IF 2.5 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-03-15 DOI: 10.1109/JMEMS.2024.3392855

Ethan A. Scott;Hwijong Lee;John N. Nogan;Don Bethke;Peter A. Sharma;Patrick E. Hopkins;Tzu-Ming Lu;C. Thomas Harris

引用次数: 0

Design, Fabrication, and Characterization of High-Performance PMUT Arrays Based on Potassium Sodium Niobate 基于铌酸钾钠的高性能 PMUT 阵列的设计、制造和特性分析

IF 2.5 3区工程技术

Journal of Microelectromechanical Systems Pub Date : 2024-03-14 DOI: 10.1109/JMEMS.2024.3395294

Lei Zhao;Chong Yang;Xinyue Zhang;Zhiwei You;Yipeng Lu

{"title":"Design, Fabrication, and Characterization of High-Performance PMUT Arrays Based on Potassium Sodium Niobate","authors":"Lei Zhao;Chong Yang;Xinyue Zhang;Zhiwei You;Yipeng Lu","doi":"10.1109/JMEMS.2024.3395294","DOIUrl":"10.1109/JMEMS.2024.3395294","url":null,"abstract":"The demand for high-performance lead-free piezoelectric ultrasound transducers has grown significantly, driven by their applications in implantable, biocompatible medical devices and environmentally friendly consumer electronics. In this study, we present the design, fabrication, and characterization of arrays of lead-free (K, Na)NbO3 (KNN)-based piezoelectric micromechanical ultrasonic transducers (PMUTs) with a center frequency of 4.7 MHz in liquid and 5.85 MHz in air. High-quality KNN thin film (FWHM of 0.32°, \u0000<inline-formula> <tex-math>$e_{mathrm {31,}f}= -12$ </tex-math></inline-formula>\u0000 C/m2, \u0000<inline-formula> <tex-math>$epsilon _{r} =1200$ </tex-math></inline-formula>\u0000) was deposited via physical vapor deposition (PVD) and patterned using an optimized wet etching process with an oxide layer as a mask. Additionally, we obtained a −6 dB fractional bandwidth of 95.7% through optimizing layer stacks and transducers mutual acoustic impedance based on finite element model (FEM) and lumped element model (LEM) methods. We achieved high transmitting performance of 3.8 kPa/V at 3 cm away from a PMUT super-pixel (with an area of 0.278 mm2, consisting of \u0000<inline-formula> <tex-math>$3times 12$ </tex-math></inline-formula>\u0000 PMUTs). The measured transducer performance is comparable to previous PMUTs based on PZT (lead-included) thin films and demonstrates the potential of KNN-based PMUTs in future advanced applications. [2024-0005]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"33 4","pages":"438-445"},"PeriodicalIF":2.5,"publicationDate":"2024-03-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141061713","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0