High-Order Piezoelectric Micromachined Ultrasonic Transducer With Piezoelectric Layer Trench for Ultrasound Imaging

IF 3.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2025-03-16 DOI:10.1109/JMEMS.2025.3560146

Junxiang Cai;Yiwei Wang;Tao Wu

引用次数: 0

Abstract

This letter presents a high-order PZT PMUT (HO-PMUT) array with trenched piezoelectric layer operating at 1.78 MHz. This high-order and trench design boosts the resonant frequency to MHz without reducing the radius, while increasing vibration amplitude and Q factor compared to fundamental PMUTs. Through optimized dual electrodes, the array achieved a normalized transmitting sensitivity (TS) of 19 kPa*mm*V^-1*mm⁻². We demonstrated its pioneering application in ultrasound imaging by mechanically scanning a steel sample and generating a B-mode image with 7.34 dB SNR, showcasing its superior acoustic performance and potential for portable ultrasonic imaging devices. [2025-0027]

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用于超声成像的高阶压电微机械超声换能器

本文介绍了一种高阶PZT PMUT （HO-PMUT）阵列，其沟槽压电层工作频率为1.78 MHz。这种高阶和沟槽设计在不减小半径的情况下将谐振频率提高到MHz，同时与基本pmut相比，增加了振动幅度和Q因子。通过优化后的双电极，阵列的标准化发射灵敏度（TS）达到19 kPa*mm*V-1*mm−2。我们通过机械扫描钢样品并产生7.34 dB信噪比的b模式图像，展示了其在超声成像中的开创性应用，展示了其优越的声学性能和便携式超声成像设备的潜力。(2025 - 0027)

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.