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2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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Micro device array design and fabrication in monolithic MEMS SoC 单片MEMS SoC中微器件阵列的设计与制造
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196736
Jung-Hung Wen, W. Fang
{"title":"Micro device array design and fabrication in monolithic MEMS SoC","authors":"Jung-Hung Wen, W. Fang","doi":"10.1109/NEMS.2012.6196736","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196736","url":null,"abstract":"This study presents novel micro-device-array designs and fabrications potentially for accelerometer, gyro or even bio-sensor applications based on an advanced 0.35μm 4 metal bipolar-CMOS-DMOS (BCD) technology. Structures built by pure metal single layer have better mechanical properties and multi-electrodes design provide more actuating and sensing possibilities for both out-of-plane and in-plane motions and signal fine-tunes. MEMS devices and integrated circuits can be fabricated monolithically. SEMs show the delicate array matrices by post-process micromachining and finished die with circuit area protected by passivation. No warpages are observed by interferometer in our devices, and linear out-of-plane movements are being electrically driven. At last, frequency responses of 14.22 kHz and 2.71 kHz are also characterized for device mode shapes.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123811690","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of microbead-based affinity biosensor by insulator-based dielectrophoresis 基于绝缘体介质电泳的微珠亲和生物传感器的研制
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196753
Tsung-Min Chuo, W. Hsu, S. Fan
{"title":"Development of microbead-based affinity biosensor by insulator-based dielectrophoresis","authors":"Tsung-Min Chuo, W. Hsu, S. Fan","doi":"10.1109/NEMS.2012.6196753","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196753","url":null,"abstract":"This research describes a high sensitivity microfluidic bead-based immunosensor based on the principle of insulator-based dielectrophoresis (iDEP). An insulator film with small holes between two electrodes creates a nonuniform electric field. By applying appropriate voltage and frequency, the fluorescent beads are concentrated to lower electric field regions due to the difference of dielectric properties. This concentrating step enhances the fluorescence intensity of analytes and decreases the detection limit of immunosensor. In this research, the fluorescence dye is conjugated with streptavidin which has high affinity to biotin. We use biotin-labeled polystyrene beads to bind with streptavidin, therefore, we can further detect fluorescent streptavidin conjugates by a fluorescence microscope. The biotin-labeled polystyrene beads perform not only various chemical characteristics by labeling different functional groups but also offer an increased surface area for antibodies or antigens to immobilize on. Finally, we fabricate a microfluidic bead-based immunosensor with high sensitivity (1 pg/ml), short analysis time (~10 minutes), few sample consumption (~0.5 μl) and without physical microchannel.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126295475","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An optimized fabrication of high yield CMOS-compatible silicon carbide capacitive pressure sensors 高成品率cmos兼容碳化硅电容式压力传感器的优化制造
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196876
B. Meng, W. Tang, Z. Wang, H. X. Zhang
{"title":"An optimized fabrication of high yield CMOS-compatible silicon carbide capacitive pressure sensors","authors":"B. Meng, W. Tang, Z. Wang, H. X. Zhang","doi":"10.1109/NEMS.2012.6196876","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196876","url":null,"abstract":"Using anodic bonding, we fabricated a silicon carbide absolute capacitive pressure sensor. Low process temperature below 430°C made the whole fabrication process CMOS compatible. Choosing gold as electrodes, good bonding between gold bottom electrode and SiC layer was available, which made the testing results agree well with the finite element method (FEM) simulations, i.e. the sensor with a square sensing membrane of 200 × 200 μm2 shows a sensitivity of 0.09494 pF/bar over a pressure range of 5 bars, while the simulation result is 0.1035pF/bar. The use of gold increased the yield of devices, for its lower strain, compared to tungsten. Additionally, owing to PECVD carbon silicon and gold's excellent corrosion resistance, this device could be used in harsh environment.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"158 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126482466","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Capillary kinetics of water in hydrophilic microscope coverslip nanochannels 亲水显微镜覆盖纳米通道中水的毛细动力学
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196856
Ju-Nan Kuo, Yi-Kai Lin
{"title":"Capillary kinetics of water in hydrophilic microscope coverslip nanochannels","authors":"Ju-Nan Kuo, Yi-Kai Lin","doi":"10.1109/NEMS.2012.6196856","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196856","url":null,"abstract":"This study analyzed the capillary filling speed of water in hydrophilic microscope coverslip nanofluidic channels with depths ranging from 40 to 575 nm. Nanofluidic channels were fabricated on a substrate of borosilicate glass (thickness of 160 μm) using the buffered oxide wet etching and glass-glass fusion bonding technique. The capillary filling speed was measured and compared with theoretical values. Comparison of capillary filling speed with theoretical values showed that filling speed inside the coverslip nanochannel was lower than the theoretical speed. A finite-element model was established to analyze the capillary filling speed of water in nanochannels. Finite-element analysis and experimental results show that the conventional theoretical formula for predicting the capillary filling speed is inaccurate without adjustable parameters. Experiments show that the capillary filling speed decreases with a decreasing depth of nanochannels. It need fill 8 mm long, 200 μm wide and 40 nm deep nanochannels around 90 s has been demonstrated.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124601677","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Study of thin film adhesion properties of multilayer flexible electronics composites 多层柔性电子复合材料薄膜粘附性能研究
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196877
C. C. Li, Zong-Hsin Liu, C. Pan, J. Tseng, H. L. Huang, S. Mao, S. Shen, S. Chang
{"title":"Study of thin film adhesion properties of multilayer flexible electronics composites","authors":"C. C. Li, Zong-Hsin Liu, C. Pan, J. Tseng, H. L. Huang, S. Mao, S. Shen, S. Chang","doi":"10.1109/NEMS.2012.6196877","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196877","url":null,"abstract":"The deformation between interface and adhesion mechanism of multi-layer flexible electronics composite were discussed. First, ITO (Indium tin oxide), Al (Aluminum) and ZnO (Zinc oxide) were directly deposited on a PET (Polyethylene terephthalate) substrate by RF (Radiofrequency) magnetron sputtering in room temperature to form the flexible multi-layer structures (ZnO/ITO/PET and ZnO/Al/PET) for piezoelectric transducers. ZnO thin film reveals a high (002) c-axis preferred orientation at 2θ=34.45° with an excellent piezoelectric property. To analyze adhesion following a periodic mechanical stress by vibrating flexible composite plates, nano-scratching test (Nanoindenter XP system) was used for scratch process to learn the relationship between normal force and penetration depth. The results show that the plastic deformation can be observed from SEM and OM observation between Al film and PET substrate. This behavior means that the deposited ZnO film has excellent adhesion with Al/PET conductive substrate compared with ITO/PET. Through nano-indentation test, ZnO film deposited on Al/PET substrate decreased the elastic modulus and hardness compared with ITO/PET substrate.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124714509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Fast self-resonant startup procedure for digital MEMS gyroscope system 数字MEMS陀螺仪系统的快速自谐振启动程序
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196864
Fei Ge, Dachuan Liu, Longtao Lin, Zhenchuan Yang, G. Yan
{"title":"Fast self-resonant startup procedure for digital MEMS gyroscope system","authors":"Fei Ge, Dachuan Liu, Longtao Lin, Zhenchuan Yang, G. Yan","doi":"10.1109/NEMS.2012.6196864","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196864","url":null,"abstract":"This paper describes a control procedure for the startup of a digital MEMS gyroscope system. Unlike the normal operating mode in which the gyroscope is actuated by synthesized sinusoidal drive signal, self-resonance of the gyroscope is stimulated by feeding back the drive-sense signal and converting it to a square-wave drive signal. During this procedure the resonant frequency that is near the natural frequency of the gyroscope can be calculated, and then provides a key parameter for the sinusoidal wave synthesizer, which will generate high-quality reference signals for driving and demodulation. Experiment shows a rapid rising of the magnitude of vibration, resulting a faster startup procedure for the system.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121473124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
The effect of Cytochalasin D on F-Actin behavior of single-cell electroendocytosis using multi-chamber micro cell chip 利用多腔微细胞芯片研究细胞松弛素D对单细胞电吞噬F-Actin行为的影响
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196744
Ran Lin, D. Chang, Yi-Kuen Lee
{"title":"The effect of Cytochalasin D on F-Actin behavior of single-cell electroendocytosis using multi-chamber micro cell chip","authors":"Ran Lin, D. Chang, Yi-Kuen Lee","doi":"10.1109/NEMS.2012.6196744","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196744","url":null,"abstract":"Electroendocytosis (EED) is a pulsed-electric-field (PEF) induced endocytosis, facilitating cells uptake molecules through nanometer-sized EED vesicles. We herein investigate the effect of a chemical inhibitor, Cytochalasin D (CD) on the actin-filaments (F-Actin) behavior of single-cell EED. The CD concentration (CCD) can control the depolymerization of F-actin. A multi-chamber micro cell chip was fabricated to study the EED under different conditions. Large-scale single-cell data demonstrated EED highly depends on both electric field and CCD.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127090786","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Automatic somatic cell operating process for nuclear transplantation 核移植的体细胞自动操作过程
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196793
Yiliao Wang, Xin Zhao, Qili Zhao, Mingzhu Sun, G. Lu
{"title":"Automatic somatic cell operating process for nuclear transplantation","authors":"Yiliao Wang, Xin Zhao, Qili Zhao, Mingzhu Sun, G. Lu","doi":"10.1109/NEMS.2012.6196793","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196793","url":null,"abstract":"Somatic cell operating, a key procedure of nuclear transplantation, is a process of picking up an appropriate donor cell. Improving its degree of automation and reducing operating time is very crucial for enhancing success rate of cloning. This paper presents an automatic somatic cell operating process for nuclear transplantation. Firstly, somatic cells are localized employing texture image segmentation and then the most active cell is selected for operation by cell morpha. Secondly, injection pipette is positioned utilizing template matching. Afterwards path planning for injection pipette to pick the selected cell is conducted considering obstacle avoidance, preventing other cells from sticking the pipette. Finally the pipette moves to the target cell along the path automatically under the guidance of visual servo control. Validity and efficiency of this operating process are proved by a dozen time of experiment.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133877958","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Adaptable chip-level microfluidic packaging for a micro-scale gas chromatograph 适用于微型气相色谱仪的芯片级微流控封装
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196722
N. Ward, Xiaoyi Mu, G. Serrano, E. Covington, Ç. Kurdak, E. Zellers, A. Mason, Wen Li
{"title":"Adaptable chip-level microfluidic packaging for a micro-scale gas chromatograph","authors":"N. Ward, Xiaoyi Mu, G. Serrano, E. Covington, Ç. Kurdak, E. Zellers, A. Mason, Wen Li","doi":"10.1109/NEMS.2012.6196722","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196722","url":null,"abstract":"In this paper, we present a robust and adaptable technique to integrate microfluidics with an on-chip thiolate-monolayer-protected gold nanoparticle coated chemiresistorarray for vapor analyte detection in a micro-scale gas chromatograph (μGC). The process involves mounting a sensing chip and capillary tubes within a silicon “extension carrier” (EC), capping the chemiresistor-array with a glass lid, and sealing the microfluidic package with non-sorbent epoxy. The stability and efficacy of the integrated detector cell is elucidated by consistent chip responses induced by the diffusion of vapor analytes though the detector cell.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132690700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A facile nanowire fabrication approach based on edge lithography 一种基于边缘光刻的简易纳米线制造方法
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2012-03-05 DOI: 10.1109/NEMS.2012.6196720
Yaoping Liu, Wei Wang, H. Zhang, Wengang Wu, Zhihong Li
{"title":"A facile nanowire fabrication approach based on edge lithography","authors":"Yaoping Liu, Wei Wang, H. Zhang, Wengang Wu, Zhihong Li","doi":"10.1109/NEMS.2012.6196720","DOIUrl":"https://doi.org/10.1109/NEMS.2012.6196720","url":null,"abstract":"This paper developed a facile nanofabrication approach at a 4-inch wafer level based on edge lithography defined hundreds nanometer-sized features. Aluminum nanowires with width around 600 nm were prepared and the wafer-level width non-uniformity was less than 8.45%. The aluminum nanowires functioned as masks in the deep reaction ion etching for vertically-stacked silicon nanowires and silicon nanoridge preparation. The obtained nanoridges acted as the nano-master in the molding of a PDMS micro/nano integrated channels. The proposed approach has the potential of nanofabricating with mass-production at effective cost, thereby holds promising future in MEMS (Microelectromechanical system) compatible micro/nano integration and nanobiotechnology applications.","PeriodicalId":156839,"journal":{"name":"2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133179524","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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